PIOne interferometric linear encoder technology offers ultra-high resolution position feedback at the moving platform. This direct metrology sub-nm resolution measurement provides superior performance along multiple metrics including: MIM, repeatability, accuracy, and position stability.
20pm Resolution: In linear incremental encoders, the resolution, i.e., the smallest measurable displacement the sensor head can discern along the scale, is highly dependent on the pitch (signal period) of the scale, the electronic signal interpolation factor, and electronic noise level. The lower the noise, the higher the possible interpolation can be set without losing performance, yet there are physical limitations and the best way to achieve higher resolution is a smaller signal period. The PIOne sensor can achieve better than 20 picometer resolution, based on its extremely short signal period of 0.5 µm and its advanced signal processing circuits – it allows 4000X interpolation without noise limitations.