The linear piezo motors and actuators shown here are intended to be integrated into motion systems that contain a guiding mechanisms.
An overview of integrated piezo motor positioning stages (linear stages, rotation stages and multi-axis positioning systems) can be found here:
In addition to novel positioning concepts with piezo ceramic motors, PI also offers conventional motorized positioning stages with electrodynamic linear motors and motor/screw drive mechanisms.
Mini-rod stick-slip motors (piezo inertia motors) are based on a small piezo element moving (along) a rod when driven with a quasi sawtooth signal. A “stick” phase slow enough to transfer motion, is followed by a very rapid “slip” phase where the piezo element retracts but the load cannot follow.
N-412 Piezo Motor Actuator
Direct Drive Piezo Inertia Motor
- 13mm travel
- 0.3µm step size
- 5mm/sec max. velocity
- 7N push/pull force
- 10N holding force
N-422 OEM Piezo Motor Actuator
Direct Drive Piezo Inertia Motor
- 35mm travel
- 0.3µm step size
- 5mm/sec max. velocity
- 7N push/pull force
- 10N holding force
Piezo ratchet drives are a special form of inertia motors based on the stick-slip effect. A small piezo ceramic actuator embedded in a precision mechanism drives a high resolution screw. The drive principle relies on a quasi-saw tooth signal with a slow expansion phase and a fast contraction phase. This expansion leads to a small rotation of a high resolution lead screw (see animation). When the piezo element has reached its maximum expansion, a much shorter contraction phase follows – too fast for the screw to follow, because of its inertia.
N-472 Closed-Loop PiezoMike
Piezo Ratchet Drive
- <1nm encoder resolution
- ¼” and 1/2” (13mm) motion range
- Self-clamping: Holding force >100N
- Pushing force 22N
- Variety of mounting options
N-470 PiezoMike Micrometer
Piezo Ratchet Drive
- ¼” to 1” (26mm) motion range
- Self-clamping: Holding force >100N
- Pushing force 22N
- 30 nanometer step size
- Variety of mounting options
N-470.V/U Vacuum PiezoMike
Piezo Ratchet Drive
- ¼” to 1” (26mm) motion range
- Self-clamping: Holding force >100N
- Pushing force 22N
- 20 nanometer step Size
- Variety of mounting options
PiezoWalk® Linear Motors are based on the coordinated motion of several piezo elements. They provide a very responsive short travel dithering mode (no stepping required) with sub-nanometer resolution and several long travel modes, optimized for maximum force, speed or constant velocity. PI makes two basic types of PiezoWalk motors: the smaller and faster 300-series and the higher-force 100/200-series. Both provide very high stability and sub-nanometer resolution.
N-381 PiezoWalk® Linear Actuator
Manipulator, Piezo Stepper
- 30mm travel
- 0.03nm open loop resolution
- 10mm/sec max. velocity
- 10N push/pull force
- 20nm encoder integrated
N-310 PiezoWalk® OEM Actuator
Direct Drive, Piezo Stepper
- Requires external encoder
- 15 to 125mm motion range
- 10mm/sec velocity
- Dither mode for 30pm resolution
- 10N push/pull force, self locking
- Vacuum options
N-331 V8 PiezoWalk® Actuator
V8 Drive: Higher Force & Speed
- 25 to 100mm travel
- 0.02nm open loop resolution
- 15mm/sec max. velocity
- 50N push/pull force
- 5nm encoder integrated
N-331 UHV-Compatible Actuator
V8 Piezo Linear Motor
- 55mm travel
- 0.02nm open loop resolution
- 10mm/sec max. velocity
- 50N push/pull force
- 4nm encoder resolution
- For vacuum to 10-9 hPa
N-111 PiezoWalk® Linear Actuator
Medium Force, Encoder Option
- 10mm travel
- 0.03nm open loop resolution
- 1mm/sec max. velocity
- 50N push/pull force
- 5nm encoder integrated
N-216 NEXLINE® Piezo Motor
High-Force PiezoWalk® Direct Drive
- 5nm encoder resolution
- 20mm motion range
- 1mm/sec velocity
- Dither mode for 30pm resolution
- 600N push/pull force, self locking
- Vacuum options
Ultrasonic Motor Linear Actuator
OEM Actuator for Integration
- 50 mm/sec velocity
- 200mm / 300mm travel
- Linear encoder
- 6N holding force
- Self-clamping
- Compact, low profile
