NEW

N-331.xxU Vacuum-Compatible PICMAWalk Walking Drive

OEM Walking Drive for Durable Applications with up to 12 mm/s Velocity and 50 N Drive Force

  • Vacuum compatible up to 10-9 hPa
  • Robust walking drive for industrial use with PICMA® ​t​e​c​h​n​o​l​o​g​y for extreme durability
  • Fastest and strongest drive of its size class
  • Precise, nanometer precision positioning of loads up to 5 kg
  • Plug-and-play, thanks to PI proprietary controller ​t​e​c​h​n​o​l​o​g​y
N-331.xxU Vacuum-Compatible PICMAWalk Walking Drive
Product Description Specifications Downloads Quote / Order

Application fields

  • Motion in strong magnetic fields and in a vacuum
  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology

Suitable for sophisticated vacuum applications

N-331.xxU PICMAWalk walking drives are designed vacuum compatible. Special versions of the drives are available for operation in strong magnetic fields. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Nanometer precision and high feed force with PiezoWalk® walking drives

In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

 

Specifications

Datasheet

Datasheet N-331.xxU

Version / Date
2023-12-11
pdf - 768 KB
Version / Date
2023-12-11
pdf - 769 KB

Downloads

Datasheet

Datasheet

Datasheet N-331.xxU

Version / Date
2023-12-11
pdf - 768 KB
Version / Date
2023-12-11
pdf - 769 KB

Documentation

Documentation

User Manual PZ271

N-331 Piezoelectric Walking Drive PICMAWalk

Version / Date
1.1.5 2023-11-24
pdf - 2 MB
English

3D Models

3D Models

N-331.24U 3D Model

Version / Date
2023-05-11
zip - 412 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

N-331.20U NEW!

Vacuum compatible PICMAWalk walking drive, 55 mm travel range (open loop); 50 N drive force, 12 mm/s maximum velocity; vacuum compatible to 10⁻⁹ hPa; 1 m cable length

N-331.24U NEW!

Vacuum compatible PICMAWalk walking drive, 50 mm travel range; 50 N drive force, 12 mm/s maximum velocity; incremental linear encoder; vacuum compatible to 10⁻⁹ hPa; 1 m cable length

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