XYZ Stage for Ultrafast Laser Material Processing
Compact Air Bearing Planar XY Stage with 360° Access Z-Stage Platform
- For ultrafast laser processing using SPC PRO software
- Use cases include laser ablation for materials research (with a galvo scanner, fixed optics), 2PP, 3D printing
- Optional ACS LCM laser control module for femtosecond laser control with pulse picker
- XY travel from 100x100mm to 300x400mm
- Z-travel 25mm
The XYZ stage is based on the A-311 series planar XY air bearing stage and the L-310 series precision lift Z-stage. The air bearing stage is available in different travel ranges from 100x100mm to 300x400mm to match your application. Encoder options include incremental and BiSS type absolute encoders. The Z-stage provides 25mm high resolution vertical travel with 360° access.
The individual stages are assembled and aligned, equipped with a custom cable management solution and delivered as an integrated XYZ motion system at our Hopkinton, MA facility. Factory optimized system configuration will be performed for each axis post-assembly with servo tuning optimization under application specific applied dummy load. Interferometer measurements will be performed to measure repeatability and accuracy with error mapping. Performances will be measured post-assembly on per-axis basis and documented in system metrology report. System Parameter Information including safety parameters will be saved to a high-performance, ACS-module based A-81x series motion controller ready for factory optimized operation on startup.
Specifications of the A-311 Series High Performance Air-Bearing XY Motion System
- Low-profile, innovative planar XY air bearing design with custom cable management system
- Ironless linear motors for smooth dynamic characteristics
- Incremental linear encoders (1.2 nm, interpolated resolution)
- All cables (3 meters), factory optimized configuration and error mapping/calibration provided on controller for optimized use
Specifications of the L-310 Series Precision Lift Z- Stage
- Compact, 360° access lift stage
- 25mm travel
- Incremental rotary encoder, 50 nm, resolution
- Brushless servo motor
- Zero-Play ball screw
- Crossed roller bearings
A-81x Series 4-Axis High Performance Motion Controller
- 4-Axis motion controller with integrated drives
- 2U, 19” rack enclosure
- MPU optimized for best computational performance
- Integrated drives matched to system for best dynamic range
- ACS ADK software suite with MMI interface & motion simulator
- XSEG synchronized motion algorithm
- UFLMP-like synchronization, galvo and G-code compatible
