Heavy Duty Linear Stages and Rotary Stages for Industrial Automation

These precision linear and rotary positioning stages are designed for high load / high duty cycle applications in industrial automation.

We recommend ACS controllers with EtherCat® connectivity. 

Features

  • Brushless motors (linear or high-torque rotary)
  • Self lubricating bearings and zero-wear air bearings
  • Absolute encoder options
  • Drag chains
  • High-performance connectors, etc.
  • Gantry XY and XYZ systems

Choose from a Product Group below, or scroll to see all Product Groups

High Speed 3-phase Linear Motor Driven Stages: Single Axis and XY Planar, Mechanical Bearings and Air Bearings

Ball-screw Driven Linear and Planar XY Stages

Rotary Stages – Mechanical Bearings and Air Bearings

High Load Ball Screw Linear Stages for Industrial Automation

1 to 600nm Resolution, up to 813mm Travel

These stages are equipped with brushless motors for high duty cycle applications. Ball-screw drives provide higher push/pull forces than linear motors and can work in vertical orientation without the need for counterbalance. Position feedback is provided by rotary encoders, linear incremental encoders with sine/cosine output or absolute encoders (no need for homing).

L-412 High Load Linear Stage
Show more

L-412 High Load Linear Stage

Ball Screw Drive 400N Load

  • 102 - 610mm (4”-24”) travel
  • 0.05µm to 1µm min. inc. motion
  • 1nm to 600nm encoder res.
  • 350mm/sec max. velocity
  • 700N push/pull force
  • Linear encoder option
L-417 High Load Linear Stage
Show more

L-417 High Load Linear Stage

Ball Screw Drive, 450N Load

  • 102 - 813mm (4”-32”) travel
  • 0.05µm to 1µm min. inc. motion
  • 1nm to 600nm encoder res.
  • 350mm/sec max. velocity
  • 700N push/pull force
  • Linear encoder option
L-741 Integrated High Load Precision XY Stage, 12" Travel
Show more

L-741 Integrated High Load Precision XY Stage, 12" Travel

Ballscrew, Stepper & Servo Motor

  • 12” XY travel (305mm)
  • 0.1µm min. inc. motion
  • 0.1 to 0.001µm sensor resolution
  • 90mm/sec max. velocity
  • 20kg load
  • Linear encoder option

High Speed Linear Motor Stages for Industrial Automation

1 to 10nm Resolution, up to 813mm Travel, Recirculating Ball Bearings and Air Bearings

Linear motor stages provide very high speed and very long lifetime. They are ideal for precision automation applications. Frictionless 3-phase motors and voice coil motors provide the driving force. Stages are equipped with self lubricating high-load recirculating ball bearings or frictionless air bearings. Position feedback is provided by linear encoders with sine/cosine output or optional absolute encoders (no need for homing).

V-412 High Speed Linear Stage
Show more

V-412 High Speed Linear Stage

Linear Motor 400N Load

  • 102 - 610mm (4”-24”) travel
  • 5nm to 10nm min. inc. motion
  • 1nm encoder res.
  • 2m/sec max. velocity
  • 151N peak force
  • Absolute encoder option
V-417 High Speed Linear Stage
Show more

V-417 High Speed Linear Stage

Linear Motor, 450N Load

  • 102 - 813mm (4”-32”) travel
  • 5nm to 10nm min. inc. motion
  • 1nm encoder res.
  • 2m/sec max. velocity
  • 300N peak force
  • Absolute encoder option
The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. A high-force linear motor can drive the stage to top speed within a few milliseconds, and the large capacity bearings can support payloads up to 35 kg. The laterally opposed, actively preloaded air bearing design in this model will support normal, vertical, and side-mounted orientations.
Show more

A-123 PIglide Air Bearing Stage

Large, Travel to 30”

  • 2/4/6/10/14/20/30” travel
  • 10kg load
  • 1nm resolution, abs/enc option
  • 210x210mm table; 85mm height
  • 1m/sec max. velocity
  • 3g max. acceleration

XY Planar High Speed, Linear Motor Stages for Industrial Automation

Mechanical Bearings and Air Bearings

V-741 Integrated High Speed Precision XY Stage, 12" Travel
Show more

V-741 Integrated High Speed Precision XY Stage, 12" Travel

Linear Motor, Linear Encoder

  • 12” XY travel (305mm)
  • 0.02µm min. inc. motion
  • 0.001µm sensor resolution
  • 200mm/sec max. velocity
  • 5kg load
  • Linear motor, linear encoder
The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y directions on a common base, providing smooth, frictionless motion. Ideal for inspection, laser marking, microscopy, scanning, and other precision motion applications. The efficient, compact design saves space in tight machine designs. Ironless linear motors provide smooth motion with no cogging or attractive forces. Optical linear encoders provide position feedback information down to 1nm, depending on interpolation.   The PIglide IS can be coupled with a variety of industry-leading digital controls and drives that offer advanced algorithms to improve dynamic performance and error compensation and a wide suite of software development tools.
Show more

A-311 Planar Air Bearing Stage

Compact, Affordable, Al Base

  • 2x2” to 8x8” travel
  • 15kg load
  • 1nm resolution
  • Light weight, AL base
  • Dynamic error mapping
  • 2m/sec / 2.7g max. acceleration
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection.  The cross-beam mounts to the Y axis via a highly engineered flexural coupling that provides yaw-compliance without sacrificing system stiffness. The gantry axis is a dual air-bearing design that incorporates dual linear motors and dual linear encoders. Ironless linear motors provide smooth motion and no cogging or attractive forces. Both incremental and absolute encoder options are available. The PIglide HS incorporates three high-accuracy linear encoders, one for the bridge axis and two for the gantry axis.   The PIglide HS is coupled with industry-leading digital controls that offer superior servo update rates (up to 5 kHz), advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.
Show more

A-322 Planar Air Bearing Stage

3-Motor Design, Granite Base

  • 500x1000mm max. travel
  • 15kg load
  • 1nm resolution
  • Active yaw control flex coupling
  • Dynamic error mapping
  • 1m/sec / 1g max. acceleration

Compact Linear Motor Stages

<1 to 20nm Resolution, up to 1.5m/sec

These compact linear motor stages provide high speed and very long lifetime. They are ideal for precision automation applications with smaller loads. Frictionless 3-phase motors provide high acceleration and zero wear. Crossed roller bearings provide excellent straightness and flatness with minimized runout. Position feedback is provided by linear encoders with sine/cosine output or optional absolute encoders (no need for homing).

V-408: This stage provides 1” travel and a very economical design.

V-508: The V-508 family comes in many variations.

V-551: The V-551 family provides the highest geometric precision: a 0.5nm resolution option is available.

The V-408 stage is small, precise, and affordable as it's equipped with an incremental linear encoder for direct position measurement and a high-force 3-phase linear motor drive. It's well-suited for industrial automation applications with high demands on dynamics, duty cycles, and nanopositioning precision.
Show more

V-408 Low Cost Linear Motor Stage

Compact, High Force

  • 25 and 50mm travel
  • 20nm min. incremental motion
  • 10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force
	V-508 stages are compact linear positioning stages configured with high force 3-phase linear motors and crossed roller guides. Options include travel ranges, motor types, and encoders choices that result in 18 ultra-precise stages well-suited for industry and research applications.
Show more

V-508 Linear Motor Stage

Compact, High End Sensor Option

  • 80/170/250mm travel
  • 1 to 20nm min. inc. motion
  • 0.2-10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force
V-551 Linear Motor Stage
Show more

V-551 Linear Motor Stage

Absolute Encoder Option

  • 60/130/230mm travel
  • 0.5 to 2nm min. incremental motion
  • 0.2 to 1nm linear encoder res.
  • 0.5m/sec max. velocity
  • 180N push/pull force

Precision Rotary Stages for Industrial Automation

PI provides different drive technologies to match the application as best as possible.

Worm gear drives provide high holding torque as well as self locking capabilities, direct drive torque motors provide high acceleration and speed, and air bearings provide the highest possible geometric performance along with zero friction and wear. 

L-611 Precision Rotary Stage
Show more

L-611 Precision Rotary Stage

Worm Gear, Servo / Stepper

  • 35mm aperture, 80mm turn table
  • 0.7µrad min. inc. motion
  • 50-200°/sec max. velocity
  • 10kg load
  • Direct encoder option
PRS-200 Precision Rotary Stage
Show more

PRS-200 Precision Rotary Stage

Worm Gear, Servo / Stepper

  • 120mm aperture, 200mm turn table
  • 0.5 – 8.7µrad min. inc. motion
  • 35-75°/sec max. velocity
  • 50kg load
  • Direct encoder option
UPR-100 Ultra Precision Stage
Show more

UPR-100 Ultra Precision Rotation Stage

Direct Drive, Direct Encoder

  • 21mm aperture, 96mm turn table
  • 1.4µrad min. inc. motion
  • 360°/sec max. velocity
  • 2kg load
  • Torque motor, sine/sosine encoder
UPR-120 Ultra Precision Stage
Show more

UPR-120 Ultra Precision Rotation Stage

Direct Drive, Direct Encoder

  • 35mm aperture, 120mm turn table
  • 1.4µrad min. inc. motion
  • 360°/sec max. velocity
  • 20kg load
  • Torque motor, sine/cosine encoder
The PIglide RM series of motorized rotary air bearing stages are a complete positioning solution designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation. These stages feature high performance, low-cogging frameless slotless torque motors, and optical encoders. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RM stages offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” or drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life.
Show more

A-621 - A-627 PIglide Rotary Stages

Direct Drive, High Load

  • 2/4/6/12” table diameter
  • 13 to 420kg load
  • 0.008µrad max. resolution
  • 40 to 100nm flatness
  • 500 to 2500 RPM max.
A-635/37 PIglide Rotary Stages
Show more

A-635/37 PIglide Rotary Stages

Low Profile, Large Diameter

  • 8/12” table diameter
  • 20/50kg load
  • 0.03µrad max. resolution
  • <100nm eccentricity & flatness
  • 500  RPM max.
  • Self-locking option at rest

Industrial High Performance Motion Controllers

PI offers rack-mount and modular motion controllers based on ACS hardware. The ACS modular system is organized in three layers: User interfaces (software), motion controllers, and drive modules.

The motion controller communicates with the host software and manages profile generation, trajectory, macros, diagnostics, etc. Position commands are sent to the universal drive modules (third level) via an EtherCAT real-time network. Drive modules include the digital servo processor (DSP) and actuate the motors, handle the feedback devices, manage the I/Os, and analyze the sensor signals for closed-loop positioning control.

Patented features, such as NanoPWM, enable dynamic current control ranges of >100,000:1, resulting  in nanometer level tracking accuracy (e.g. for wafer scanning) and standstill jitter of sub-nanometer in metrology applications.

Extensive trigger functionality facilitate laser applications and inspection, and an integrated 3-DOF error compensation and yaw compensation for gantry solutions satisfy the highest demands on accuracy.

The proprietary Servo-Boost algorithm increases robustness, minimizing the effect of external disturbances in real time, while simplifying tuning and optimizing the performance and settling with changing loads.

Gantries / Multi-Axis Systems / Engineered Motion Sub-Systems

PI provides multi-axis solutions, such as gantries, parallel kinematics and engineered automation sub-systems. Our engineers have access to diverse driving and guiding technologies, spanning from electromagnetic to piezoceramic and from mag-lev to air bearings. They also have experience selecting the right technology for each individual application. Often an adaptation of existing technologies/products will suffice to solve a problem. However, experience along with detailed knowledge and PI’s significant R&D investment in new technologies enables our engineers to take unique approaches.

Air Bearings & Linear Bearings, Linear Motors
Show more

A-341 Hybrid Gantry XY / XYZ Stage

Air Bearings & Linear Bearings, Linear Motors

  • 300x300 to 500x1000mm XY travel
  • 10kg load
  • Absolute encoders, 1nm resolution

  • Z-Stage options: linear motors or ball screws 
  • Dynamic error mapping
  • 2m/sec max velocity (cross axis)
A-351 Overhead Gantry XY / XYZ Stage
Show more

A-351 Overhead Gantry XY / XYZ Stage

Linear Bearings, Linear Motors

  • 300x300 to 500x1000mm XY travel
  • 20kg load
  • Absolute encoders, 1nm resolution

  • Z-Stage options: linear motors or ball screws 
  • Dynamic error mapping
  • 2m/sec max velocity (cross axis)

Automation Platform for High Dynamic Laser Processing of Small Geometries

Fast and precise motorized positioning stages play a major role in the accuracy and throughput of modern laser micro-machining and processing applications. The performance of the motion control system is crucial for the quality of the machined parts. The video shows an automation platform for high dynamic laser processing of small geometries. The multi-axis system is based on the advanced family of L-4xx and V-4xx stages linear stages. A highly dynamic XY-stack of V-417 stages with direct drive linear motors moves the workpiece in the X-Y plane.

The vertical distance of the laser objective can be controlled by a robust L-412/L-417 screw-drive servo motor stage with a holding brake. To address the needs of machine builders the high performance stages are equipped with reference edges to support the alignment in the machine, side seals for debris protection and robust industrial connectors for flexible cable exit. Different encoder variants including absolute-measuring sensors offer nanometer resolution. The automation platform can be controlled by an EtherCAT based ACS motion control module for optimum synchronization of the axes and simultaneous control of the laser.