Piezo Drivers, Controllers, Power Supplies, High-Voltage Amplifiers

A piezo controller or driver is used to control the motion of a piezo positioning device.  There are open and closed loop controllers. Open-loop controllers are often referred to as piezo driver or even piezo power supply. Closed-loop controllers are divided in two basic types: analog-servo and digital servo controllers. PI offers the largest selection of both digital and analog piezo motion controllers, drivers and high-voltage amplifiers for piezoelectric mechanisms worldwide. Digital servo controllers (not to be confused with digital interfacing) provide higher linearity, stability and dynamic performance compared to analog servo controllers; they are also easy to tune and optimize by software commands. 

What Type of Piezo Mechanisms
The piezo controllers and drivers shown in this overview are designed to drive traditional piezo actuators or piezo flexure nanopositioning mechanisms in single axis or multi-axis configuration – providing typical motion ranges of a few microns to 1mm.  (Piezo-motor controllers for longer travel ultrasonic motors, stick-slip motors, and PiezoWalk motors are shown here)

Open & Closed Loop Operation – How do they work
In these precision piezo flexure mechanisms, motion is proportional to the applied voltage at the piezo element (see piezo motion tutorial for details).  Typically a position sensor (capacitive, piezoresistive, strain gauge or optical) integrated in the mechanism (or external) is used to provide position feedback to the servo controller to close the loop. 

Open loop operation is also possible - in this case the position is roughly proportional to the driver voltage. This may be used in applications, where the exact position does not matter, because feedback is provided by another external signal such as an optical power meter, a quad cell, a force sensor, camera, etc.

Overview of our offering: Digital and analog servo designs; digital and analog interfaces; 60  to- 1100V amplifiers; 1W to 6kW peak power; modular, OEM and PC-plug-in designs; ultra-low-noise, high-stability closed-loop controllers; voltage and charge amplifiers;  linear and switched amplifiers; energy-recovery designs. OEM cards, rack-mount solutions and custom controllers with 40 channels and more are available on request. 

Choose from a Product Group below, or scroll to see all Product Groups

Digital Servo Piezo Controllers (Higher Precision / Flexibility)

  • Flexibility of digital signal processing and control for the cost of analog
  • Digital motion control algorithms with 10 kHz sampling rate
  • For capacitive sensors and piezo resistive strain gauge sensors
  • Linearity to 0.02%
  • USB and RS-232 interfaces
  • Fast 25 Mbit/s serial interface
  • Digital servo for advanced control algorithms
  • 25 kHz control bandwidth
  • For capacitive and piezo-restive strain gauge feedback sensors
  • Optional high resolution analog control inputs and outputs
  • Interfaces: Ethernet, USB, and RS-232
  • Digital inputs and outputs
E-754 Reference Class Digital Piezo Controller
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E-754 Reference Class Digital Piezo Controller

For 1 Axis Closed-Loop Piezo Mechanisms

  • 50kHz servo loop
  • 22-Bit DAC resolution
  • 20-Bit analog input
  • 45W peak power, 500mA peak current
  • Extensive software package
  • Ethernet (TCP/IP), SPI, USB, RS-232 interfaces
E-712 Reference Class Modular Digital Piezo Motion Controller
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E-712 Reference Class Modular Digital Piezo Motion Controller

Up to 6 Axes

  • Reference class digital motion controller
  • Highly stable 20-bit D/A converters
  • Real-time operating system for excellent trajectory control
  • Modular design for greatest flexibility in meeting custom requirements
  • Auto-calibrating from stage ID-chip for interchangeability of controller and mechanics w/o recalibration
  • Flexible interfacing: USB, RS-232 & Ethernet

Motion Controller for Fast Steering Mirrors

E-616 Motion Controller
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E-616 Analog Motion Controller

For Multi-Axis Piezo Tip/Tilt Mirrors and Platforms

  • Precision motion control for piezo nano positioning systems
  • Bench-top and OEM versions
  • Three integrated amplifiers provide up to 10W peak power
  • Closed-loop and open-loop versions
  • Internal coordinate transformation simplifies control of parallel kinematics designs (tripod & differential drive)
  • Compact and cost-effective design for OEMs or bench-top
  • Digital servo for advanced control algorithms
  • 25 kHz control bandwidth
  • For capacitive and piezo-restive strain gauge feedback sensors
  • Optional high resolution analog control inputs and outputs
  • Interfaces: Ethernet, USB, and RS-232
  • Digital inputs and outputs
E-712 Reference Class Modular Digital Piezo Motion Controller
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E-712 Reference Class Modular Digital Piezo Motion Controller

Up to 6 Axes

  • Reference class digital motion controller
  • Highly stable 20-bit D/A converters
  • Real-time operating system for excellent trajectory control
  • Modular design for greatest flexibility in meeting custom requirements
  • Auto-calibrating from stage ID-chip for interchangeability of controller and mechanics w/o recalibration
  • Flexible interfacing: USB, RS-232 & Ethernet

Controllers for Nanocube® and PicoCube XYZ Nanopositioning Stages

  • Digital servo for advanced control algorithms
  • 25 kHz control bandwidth
  • For capacitive and piezo-restive strain gauge feedback sensors
  • Optional high resolution analog control inputs and outputs
  • Interfaces: Ethernet, USB, and RS-232
  • Digital inputs and outputs
E-664 NanoCube® Piezo Controller
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E-664 NanoCube® Piezo Controller

Low-Cost, Analog Servo

  • 3 x 14W peak power
  • Closed-loop precision motion control
  • For P-611 NanoCube® nano positioning XYZ stages
E-536 PicoCube® Piezo Controller
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E-536 PicoCube® Piezo Controller

  • Extremely low noise: resolution to 25 picometers
  • For P-363 PicoCube® systems
  • Peak power 3 x 100W
  • Output voltage ±250V

High-Power Piezo Amplifiers / Drivers / Controllers

280W to 6kW; Voltage Swing 160V to 1050V

  • 1200W peak power, 10A peak current (switched)
  • 3200W peak power, 20A peak current (linear)
  • Output voltage -30 to 130V
  • Optional position servo-motion controller module
  • Optional computer interface and display module
  • Bandwidth to 20kHz for high dynamics applications
  • 280W peak power, 2A peak current
  • Output voltage -30 to 130V
  • OEM module & top hat rail module
  • 3.5khz bandwidth 
  • High-voltage amplifier up to 6kW peak power
  • Linear amps and switched amps with energy recovery
  • Output voltage 0 to 1050V and bipolar
  • Optional position servo-motion controller module
  • Optional computer interface and display module
  • Differential output

Controllers for Bender Piezo Actuators

E-651 Piezo Controller
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E-651 Piezo Controller

For Closed-Loop Low-Voltage Piezo (60V) Multilayer Bender Actuators

  • Controller for closed-loop multilayer bimorph Aatuators
  • 1- and 2-channel versions
  • Integrated linear amplifiers
  • Bench-top & OEM-board versions
E-650 Piezo Drivers
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E-650 Piezo Drivers

For Low-Voltage Piezo (60V) Multilayer Bender Actuators

  • Specifically designed to drive multilayer bimorph piezo actuators
  • Bench-top and OEM versions
  • Integrated Llnear amplifier w/ up to 18W peak power
  • LCD voltage display
  • Output voltage ±30V or 0 to 60V and separate fixed voltage

OEM Driver and Controller Modules

  • Open-loop and closed-loop versions
  • Most cost-efficient digital piezo motion controller
  • Servo tuning and parameter setting by software
  • Digital algorithms improve linearity
  • Analog control input for target values
E-621 Piezo Driver & Servo-Controller Module
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E-621 Piezo Driver & Servo-Controller Module

With 24-Bit USB Interface

  • 24-bit USB interface and high-speed analog interface
  • Notch filters for higher bandwidth
  • Networking for up to 12 motion controllers
  • Choice of sensor strain gauge (lower cost) or capacitive sensor (higher precision)
  • Table for user-defined curves
E-610 Piezo Driver & Position Servo-Controller Modules
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E-610 Piezo Driver & Position Servo-Controller Modules

  • Open-loop and closed-loop versions
  • For capacitive, strain gauge and LVDT sensors
  • Integrated linear amplifier w/ 14W peak power
  • Runs on single stabilized voltage (12 to 30 VDC)
E-836 Low-Cost OEM Piezo-Driver Module & Benchtop
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E-836 Low-Cost OEM Piezo-Driver Module & Benchtop

With Integrated High-Voltage Power Supply

  • Open-loop driver
  • PCB-mount possible
  • 100 mA peak current for dynamic piezo operation
  • Integrated high voltage power supply, requires one 24V source to operate
  • Low noise, high stability
  • Full overcurrent, short-circuit and temperature protection
E-831 OEM Piezo Driver and Power Supply Modules
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E-831 OEM Piezo Driver and Power Supply Modules

  • Cost effective piezo driver
  • Up to 40 channel custom configurable versions
  • Small size
  • Low noise, high stability
  • Easy-to-use
  • Full overcurrent, short-circuit and temperature protection
E-413 Compact Piezo Driver
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E-413 Compact Piezo Driver

For DuraAct™ Patch Transducers and PICA™ Shear Piezo Actuators

  • Peak power to 50W
  • Output voltage to +/-250V
  • OEM module / bench-top for PICA™ shear actuators
  • OEM module for DuraAct™ piezoelectric patch transducers
Low-Power High Voltage Driver (1000V)
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Low-Power High Voltage Driver (1000V)

Benchtop and OEM Module

  • Runs on 12V: battery or p/s operation
  • Single channel high voltage piezo driver
  • Output voltage range +10 to +1000V

Modular Piezo Controllers

Analog Servo

E-500 Modular Piezo Motion Controller System
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E-500 Modular Piezo Motion Controller System

Up to 6 Channels, for Low Voltage and High Voltage Piezo Systems

  • DetailsModular piezo controller system with many options
  • For high power amps to 280 Watts
  • Up to 6 channels
  • Choice of linear amplifier modules, low & high voltage
  • Optional servo-motion controller for cap sensors, strain sensors and piezo resistive sensors
  • Optional USB interface, TCP/IP, RS-232

Modules for E-500 Modular Piezo Motion Controller System

E-509 Sensor & Position Servo-Control Modules
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E-509 Sensor & Position Servo-Control Modules

For Piezo-Driven Nanopositioning Systems

  • Position servo-control for piezo-driven nano positioning systems
  • Improves linearity
  • Eliminates drift & hysteresis
  • For capacitive sensors, strain gauge sensors & LVDT sensors
  • Increases piezo stiffness
  • Notch filter for improved dynamics
E-518 Computer Interface and Display Module
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E-518 Computer Interface and Display Module

For Modular Piezo Controllers

  • Low-noise 24-bit D/A converter
  • Sample rate 25kHz
  • TCP/IP, USB, and RS-232 interfaces
  • 6-Digit display for voltage and position
  • 1- & 3-channel versions
  • Wave generator with programmable trigger-I/O
E-503 Piezo Driver Module
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E-503 Piezo Driver Module

3 Channels

  • Integrated linear piezo amplifiers, 3 x 14W peak power
  • Output voltage range -20 to +120V
  • E-503.00S with 2 amplifier channels and one fixed voltage of +100V
E-505 Piezo Driver Module
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E-505 Piezo Driver Module

  • 200W peak power
  • Output voltage range -20 to 120V
  • Module for E-500 piezo controller rack
  • Prepared for position servo-motion control upgrade (optional)
  • Prepared for interfaces / display modules (optional)
E-504 High Power Piezo Driver Module
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E-504 High Power Piezo Driver Module

  • Peak power 280W
  • High average output power 100W
  • Very energy efficient through energy recovery
  • Output voltage range -30 to 130V
  • Module for E-500 piezo controller rack
  • Prepared for position servo-control upgrade (optional)
E-506 Linearized Piezo Driver
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E-506 Linearized Piezo Driver

  • Highly linear amplifier module
  • 280W peak power
  • Output voltage range -30 to 130V
  • Module for E-500 piezo controller rack
  • Prepared for position servo-motion control upgrade (optional)
  • Prepared for interfaces / display modules (optional)
E-508 High-Voltage Piezo Driver (1000V) Module
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E-508 High-Voltage Piezo Driver (1000V) Module

  • Integrated linear amplifier, up to 400W peak power
  • Output voltage Range +3 to +1100V & bipolar
  • ±250V for shear actuators

Single Channel Piezo Drivers / Controllers / Cards

  • Flexibility of digital signal processing and control for the cost of analog
  • Digital motion control algorithms with 10 kHz sampling rate
  • For capacitive sensors and piezo resistive strain gauge sensors
  • Linearity to 0.02%
  • USB and RS-232 interfaces
  • Fast 25 Mbit/s serial interface
E-665 Piezo Servo-Controller
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E-665 Piezo Servo-Controller

With 24 Bit High-Speed USB Interface

  • Closed-loop precision motion controller for nano positioning systems
  • Integrated 24-bit high-speed USB & RS-232 interfaces
  • Network capability with up to 12 channels
  • Integrated linear piezo driver with 36W peak power
  • For piezo systems with SGS and capacitive sensor feedback
  • Table for user-defined curves
E-625 Compact Piezo Servo-Controller
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E-625 Compact Piezo Servo-Controller

With 24 Bit High-Speed USB Interface

  • Closed-loop precision motion controller for nano positioning systems
  • Integrated 24-bit high-speed USB & RS-232 interfaces
  • Integrated linear piezo driver, 14W peak power
  • Network capability with up to 4 channels
  • For piezo systems with capacitive and strain gauge position feedback sensors
  • Wave table for user-defined curves
E-621 Piezo Driver & Servo-Controller Module
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E-621 Piezo Driver & Servo-Controller Module

With 24-Bit USB Interface

  • 24-bit USB interface and high-speed analog interface
  • Notch filters for higher bandwidth
  • Networking for up to 12 motion controllers
  • Choice of sensor strain gauge (lower cost) or capacitive sensor (higher precision)
  • Table for user-defined curves
E-610 Piezo Driver & Position Servo-Controller Modules
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E-610 Piezo Driver & Position Servo-Controller Modules

  • Open-loop and closed-loop versions
  • For capacitive, strain gauge and LVDT sensors
  • Integrated linear amplifier w/ 14W peak power
  • Runs on single stabilized voltage (12 to 30 VDC)
Entry-Level High Performance Open-Loop Piezo Driver
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Entry-Level High Performance Open-Loop Piezo Driver

  • Cost-efficient piezo driver
  • High output power for dynamic operation: up to 100mA source and sink current
  • -30 to 130V output voltage
  • Power supply included

Open-Loop Piezo Drivers

E-663 Low Voltage (100 V) Piezo Driver
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E-663 Low Voltage (100V) Piezo Driver

3 Channels

  • 3 independent output channels
  • Integrated linear amplifiers, 3 x 14W peak power
  • 3 LED voltage displays
  • Output voltage range - 20 to 120V
E-464 High-Voltage Piezo Driver (1000 V)
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E-464 High-Voltage Piezo Driver (1000V)

3 Channels

  • 3 independent channels
  • Integrated linear amplifiers, 3 x 25W peak power
  • 3 LED voltage displays
  • Output voltage range 0 to + 1000V