PIglide Precision Air Bearing Stages, Components, Systems

Air bearings provide advantages over mechanical bearings when vibration-free motion is required, highly constant velocity control is crucial, and when angular repeatability and geometric performance must be optimal. Air bearing stages (linear, rotary, and spherical) replace mechanical contact by a thin air film, avoiding wear, friction, vibration, and hysteresis effects.

Motorized Rotary Stages and Z-Tip-Tilt Stages

Manual X-Y-Tilt Platform for Rotary Air Bearings

Air Bearings BLOG

PI offers the broadest and deepest portfolio of precision motion technologies. PI’s US operation has extensive experience with the design and manufacture of Air Bearing precision positioning products. PI is building on over 200 years of in-house air bearing experience to offer linear, planar XY, and rotary air bearing stages to serve the OEM, industrial, and research markets. PI US also has its own precision grinding facility located in Nashua, NH. The global PI group offers comprehensive precision air bearing motion control and positioning products and systems, which are inherently frictionless, for smooth accurate motion.

By combining extremely responsive engineering support and lean manufacturing techniques, PI is able to provide the highest quality service to its customers. Maximum performance of precision systems is achieved through extensive design and analysis expertise, using in-house built equipment and proprietary techniques.

In addition to a variety of standard air bearings and motorized positioning stages, fully integrated custom-designed multi-axis positioning systems for metrology and machining applications are available from PI’s US design and engineering team. ACS (part of the PI group) motion controllers are our primary controllers; we have experience with many other controllers, if the customer prefers a different brand.

For more information on PIglide air bearing technology, download our air bearing catalog.

Read detailed air bearing application examples >

These stages use ironless cog-free 3-phase linear motors or voice coil motors, integral optical linear encoders and non-contact fully preloaded air bearings. Some models come with a choice of sine/cosine, A/B and absolute BISS encoders.

A-142 Mini Voice Coil Linear Slide with Air Bearings

Air Bearings, Frictionless, Fast

10mm travel
3kg load
5nm encoder, 0.1µm straightness
75x80mm table; 27mm height
450mm/sec, 2g acceleration
20N push/pull force

Details

The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra-precision in a miniature package. The combination of non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. This stage is ideally suited for many high precision applications, such as metrology, photonics alignment, optics positioning, and scanning. The non-contact design also makes these stages ideal for cleanroom applications. There are no moving electrical cables to manage. The air bearing offers a locking design for the ultimate in position stability.

Ultra-Compact Air Bearing Stage

40mm travel
3.5kg load
20nm resolution
57x83mm table; 38mm height
0.25m/sec max. velocity
0.35g max. acceleration

Details Articles Video

PIglide LC air bearing positioning stages are linear servo motor driven with fully preloaded air bearings and optical linear encoders. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor, flat panel display and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications.

Affordable Design, Travel to 16”

2/4/8/12/16” travel
10kg load
1nm resolution, abs/enc option
160x200mm table; 60mm height
1m/sec max. velocity
3g max. acceleration

Details Article

The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. A high-force linear motor can drive the stage to top speed within a few milliseconds. The dovetail preloaded air bearing design in this model will support normal, vertical, and side-mounted orientation.

Travel to 14”

2/4/6/10/14” travel
10kg load
1nm resolution, abs/enc option
115x115mm table; 60mm height
1m/sec max. velocity
2g max. acceleration

Details

The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. A high-force linear motor can drive the stage to top speed within a few milliseconds, and the large capacity bearings can support payloads up to 35 kg. The laterally opposed, actively preloaded air bearing design in this model will support normal, vertical, and side-mounted orientations.

Large, Travel to 30”

2/4/6/10/14/20/30” travel
10kg load
1nm resolution, abs/enc option
210x210mm table; 85mm height
1m/sec max. velocity
3g max. acceleration

Details

PIglide VC air bearing positioning stages are voice coil driven with fully preloaded air bearings and optical linear encoders. These stages are ideally suited for many high precision applications where long travels are not required, such as autofocus and scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. Optional bellows protect the bearing from contamination. Low moving mass means high accelerations and fast turnaround times.

For Fast Scanning/Autofocus

1” travel
Optional bellows
1nm resolution
8g max. acceleration

Details Article Video

V-508 Cross roller bearing linear motor stages, 170x170mm

Custom Examples

Air, spring, mechanical, and magnetic counterbalance options
Custom bridge and gantry designs

Details Article Video

Planar multi-axis air bearing stages provide additional advantages compared to mechanical bearing stages. Due to one common base for the X and Y axes torque and bending moments do not exist and will not influence the geometric performance (straightness, flatness) of the XY motion. The A322 three motor stage incorporates active yaw control using three motors and a flexural coupling element. In addition to linear motions in the X and Y axis, a small amount of rotational motion in theta Z is possible.

The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection. The cross-beam mounts to the Y axis via a highly engineered flexural coupling that provides yaw-compliance without sacrificing system stiffness. The gantry axis is a dual air-bearing design that incorporates dual linear motors and dual linear encoders. Ironless linear motors provide smooth motion and no cogging or attractive forces. Both incremental and absolute encoder options are available. The PIglide HS incorporates three high-accuracy linear encoders, one for the bridge axis and two for the gantry axis. The PIglide HS is coupled with industry-leading digital controls that offer superior servo update rates (up to 5 kHz), advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.

3&4-Motor Designs, Granite Base

3 Models: Base, Plus, Ultra
500x1000mm max. travel
15kg load
1nm resolution
Active yaw control flex coupling
Dynamic error mapping
1m/sec / 2g max. acceleration

Details Article Video PDF - All New Models

Compact, Affordable, Al Base

50x50mm to 300x300mm travel
15kg load
1nm resolution
Light weight, AL base
Dynamic error mapping
2m/sec / 2.7g max. acceleration

Details Video

Stacked XY Combinations

Various travel ranges
10kg load
1nm resolution
Dynamic error mapping

Contact us to talk about your custom needs>

Air Bearings & Linear Bearings, Linear Motors

300x300 to 500x1000mm XY travel
10kg load
Absolute encoders, 1nm resolution
Z-Stage options: linear motors or ball screws
Dynamic error mapping
2m/sec max velocity (cross axis)

Details Drawing

Linear Bearings, Linear Motors

300x300 to 500x1000mm XY travel
20kg load
Absolute encoders, 1nm resolution
Z-Stage options: linear motors or ball screws
Dynamic error mapping
2m/sec max velocity (cross axis)

Details Drawing

Linear Bearings, Linear Motors

750x750 to 1000x2000mm XY travel
30kg load
Absolute encoders, 1nm resolution
Z-Stage options: linear motors or ball screws
Dynamic error mapping
2m/sec max velocity (cross axis)

Details PDF Drawing

As Seen at Photonics West

PI's A-341 hybrid Gantry System for 3-D printing, laser processing with software is explained at Photonics West

A-621, A-623, A-624, A-627 PIglide RM motorized rotary air bearing stages can be used in any orientation, while the low profile series of A-635/A-637 stages are designed for horizontal use. PIglide rotary stages feature high performance, low-cogging frameless slotless torque motors, and optical encoders. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. Applications include optical alignment, metrology, inspection, calibration, and scanning. These stages offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” or drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life.

The PIglide RM series of motorized rotary air bearing stages are a complete positioning solution designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation. These stages feature high performance, low-cogging frameless slotless torque motors, and optical encoders. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RM stages offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” or drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life.

Direct Drive, High Load

2/4/6/12” table diameter
13 to 420kg load
0.008µrad max. resolution
40 to 100nm flatness
500 to 2500 RPM max.

Details Article

Low Profile, Large Diameter

6/8/12/14” table diameter
20/32/60/120kg load capacity
0.03µrad max. resolution
<100nm eccentricity & flatness
500 RPM max.
Self-locking option at rest

Details

Large Clear Aperture

⌀260mm clear aperture
77kg load capacity
0.0015µrad max. resolution
500 RPM max.
Flatness/Eccentricity <175/300nm
Wobble: < 1µrad
Direct drive

Details

Low Profile

⌀250mm table
8 kg load capacity
5mm Z-stroke, to 2° tip/tilt
10nm/0.06µrad incremental motion
1nm sensor resolution

Details

Voice Coil Driven, Low Profile

5mm x 5mm x 2° Travel
40mm height, ø200mm
Air Bearings & Voice Coils
Parallel Kinematics
Lock-down Capable
6-DOF Option

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These high performance controllers feature state of the art ACS SPiiPlusEC motion control modules and EtherCAT® master, and includes ServoBoost™ for up to eight axes of motion. ServoBoost™ provides better, more consistent servo performance that is insensitive to noise or (load) changes in the system.

This series of motion controllers from PI offers a completely integrated electronics solution, with controller, drives, and power supplies packaged together. The A-81x is in a compact 19-inch rack-mount enclosure for 1, 2, or 4 axes of motion, while the slightly larger A-82x is capable of controlling 4, 6, or 8 axes. These controllers are designed and optimized to work with the PIglide line of air bearing stages which feature direct drive linear and rotary servo motors and high resolution encoders.

High Power: 4, 6 & 8 Motion Axes

Fully integrated closed-loop servo, amplifier module & power supplies
2000 W continuous, 3900 W peak
3-Phase BLDC / voice coil / DC
Quiet PWM drives
Sine/cosine and BiSS-C encoders
20A peak output current/axis

Details

Compact: 1, 2 & 4 Motion Axes

Fully integrated closed-loop servo, amplifier module & power supplies
600W power supply
3-phase BLDC / voice coil / DC
Quiet PWM drives
Sine/cosine and BiSS-C encoders
10A Peak output current/axis

Details

An advanced algorithm called ServoBoost™ in ACS motion controllers automatically adapts the servo settings to load changes in real time.

from ACS

Watch Video

An advanced algorithm called ServoBoost™ in ACS motion controllers automatically adapts the servo settings to load changes in real time.

For applications that require smooth, precise, linear motion, the PIglide RB series linear air bearings are right for you. These bearings can easily replace ball bearing and crossed roller bearing slides, and are simple to integrate and use. They offer better straightness, angular deviation, and repeatability than ball bearing slides, especially for travel lengths over 4". In addition, because air bearings are inherently frictionless, they do not exhibit breakaway or running friction, even under their maximum loading. The totally noncontact, clean nature of air bearings means that they are virtually maintenance free and their accuracy won't degrade over time due to wear.

Non Motorized Linear Slides

50 to 1000mm range
9 table sizes: 50x50 to 300x300mm
13 to 760kg vertical load
7.5 to 21kg lateral load
Excellent straightness/flatness

Details Article

he PIglide RT series of non-motorized passive rotary air bearings are designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation and are easy to integrate with motors and encoders for complete positioning solutions. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RT series bearings offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” o r drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life. An optional high resolution optical encoder can be added to allow precision table angle recording during manual operation. Applications include parts inspection, optical alignment and drag torque measurement.

Non Motorized, Encoder Options

Ideal for optics testing
2/3/4/6/8/12” table diameter
13 to 420kg axial load
5 to 270kg radial load
75 to 300nm eccentricity
Optional high resolution encoder

Details

The PIglide HB series spherical air bearing enables unique positioning and simulation applications in both research and industrial fields. These bearings provide excellent load capacity and stiffness while allowing three axes of inherently frictionless rotational motion. Commonly used for zero-g satellite research, spherical bearings are also used in systems for precision chip bonding and optical alignment. Extremely rigid spindles can be made using a spherical bearing at each end of the spindle shaft. This arrangement also allows precision alignment of the spindle shaft on the fly by moving one spherical bearing relative to the other.

3 Degrees of Freedom

Ideal for zero gravity simulation
2/3/4/6/8/10/12” sphere diameter
15 to 635kg load
±45 degrees rotation range

Details Article Video

The PIglide MTT series of manual alignment tabletops can manually adjust a payload mounted to a rotary air bearing in four degrees of freedom, allowing alignment of the payload to the bearing’s axis of rotation. Adjustments can be made in two linear orthogonal directions (X and Y) and in two angular directions (tip and tilt). The tabletop surface is made from durable, wear- resistant stainless-steel. This accessory is ideal for metrology, roundness measurement, and part gauging applications.

Add-On For Rotary Stage

Ideal for optics testing
4 degrees of freedom: X, Y, θX, θY
Manual operation
Travel to ±3mm, ±1.25°
3/4/6/8/10” table diameter
Direct mount on A-60x / A-62x

Details

For Spherical Air Bearings

Works with A-651 to A-657
Ideal for satellite control and simulation of weightlessness

Details

Air supplied for air bearing stages must be clean, dry, and oil-free for long-term reliability and proper component operation. Contaminants in the air can cause a reduction in stiffness and load capacity, an increase in friction, and potential bearing damage. Available in 2 models, PI’s cost effective air preparation kits are a simple way to clean any air supply, with multi-stage filtration, pressure regulation, semi-automatic drains, and an optional pressure switch.

Pressure Control & Air Filtration

Cleans & filters compressed air
Controls the supply pressure
Optional pressure switch
Recommended for all PIglide products
Customized adaptations

Details

For PIglide Linear Air Bearings

For A-101 - A-109 linear air bearings
Hardcoat aluminum

Details

Add-On For Rotary Stage

Ideal for optics testing
4 degrees of freedom: X, Y, θX, θY
Manual operation
Travel to ±3mm, ±1.25°
3/4/6/8/10” table diameter
Direct mount on A-60x / A-62x

Details

PI's air bearing products serve the needs of a wide variety of applications and industries. Below are examples of diverse problems that were solved with PI products.

A-60X PIglide RT Series Rotary Air Bearing

PI air bearing products can be used to build metrology systems for roundness, flatness, surface profile, or thickness measurements. When precision manufactured parts need to be measured to the tightest tolerances in aerospace, aircraft, automotive, ball bearings, infrared and precision optics, semiconductors, or turbines, contact a PI engineer to help design your system.

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Research Air Bearing Application Example

Contact a PI engineer to discuss research and development applications. PI's broad range of positioning and control products can be integrated into almost any configuration imaginable to help reach the next breakthrough.

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Flat Panel Display Air Bearing Application Example

As flat panel displays (FPDs) continue to grow in size and improve image resolution, the demands on test and inspection equipment continue to become more challenging. PI's planar air bearing stages and gantries can be customized to meet incredibly tight precision specifications over very long travels.

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Beamline Positioning Air Bearing Application Example

PI offers sophisticated equipment for high-end scientific research in large-scale synchrotron and accelerator research facilities. Linear and rotary air bearing stages are used to position sensors and instrumentation in various beamline applications, including tomography and holography, micro-CT positioning, sample adjustment, microscopy, and X-Ray scanning.

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Large Format Printing Air Bearing Application Example

Digital printing demands fast, accurate motion with precise velocity control and very low angular motion errors. PI's long travel linear air bearings are the key to leading manufacturer's digital print to film high resolution printer setters. Lightweight bearings deliver over one meter of travel with a straightness accuracies as low as 3 µm. The system achieves excellent velocity stability, resulting in exceptional print quality.

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Optical Grinding Air Bearing Application Example

Optical grinding requires extremely precise and smooth motion in order to achieve demanding tolerances for surface finish. When leading optical manufacturers need a rotary bearing with run-out and flatness errors less than 0.1 µm for integration into their custom grinding machine, PI provides the solution. In addition to excellent accuracy, the outstanding stiffness of air bearings allows the bearing to withstand forces without a degradation of positioning accuracy and repeatability.

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Tensile Testing Air Bearing Application Example

Tensile testing machines apply precise forces, under high loads at zero velocity. Rolling element bearings exhibit significant breakaway friction which causes irregularities in the applied force. PI supplies major test equipment manufacturers with entirely non-contact, linear motor-actuated stage solutions for tensile testing machines. Due to PI's extensive experience with assembling to extremely tight tolerances, complex assemblies are delivered with higher quality and lower cost than manufacturers can achieve in-house.

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Optical Spectrometry Air Bearing Application Example

Leading manufacturers of high resolution laboratory spectrometers require custom linear air bearings that provide extremely precise, tilt-free, smooth motion for their scanning mirrors. PI's totally non-contact assemblies deliver the reliability and minimal maintenance today's laboratory users demand.

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A-65X PIglide HB Series Spherical Air Bearings Mounted For Zero Gravity Simulation & Satellite Testing

Satellite systems attitude control research often requires simulation of a zero-g environment. PI's spherical air bearings have solved this problem for government and commercial research agencies. PI delivers complete systems, including mounting pedestals and air handling equipment, that support significant loads with a large range of motion.

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A-322 PIglide HS Series Planar Air Bearing Positioning System

Semiconductor processing equipment must operate with high reliability and minimal particle generation. Unlike traditional bearings, non-contact air bearings deliver exceptional reliability and lifetime with zero maintenance. Operating on a clean air or nitrogen supply, no particles are generated. This is why leading manufacturers of semiconductor processing equipment use PI air bearings for a variety of wafer inspection, handling, and transport applications.

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Spherical Air Bearing For Planarization and Assembly

PI developed custom linear air bearings in response to the need of major auto manufacturers for high load capacity air bearings for vehicle testing. Air bearings support heavy loads without the binding and high friction, typical of traditional bearings. As a result, multiple uses of automotive applications have been found, such as suspension testing and racecar suspension tuning.

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Micro-Machining Air Bearing Application Example

Micro-machining and nano-manufacturing require ultra-precision, smooth motion, high stiffness, and dynamic motion. An air bearing motion system combines all these aspects. Combine linear motion with a voice-coil stage for a fast-tool servo system, or add a spindle for machining applications. Optional bellows covers can be added to protect the stages from dust and debris.

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PIglide Precision Air Bearing Stages, Components, Systems

Choose from a Product Group below, or scroll to see all Product Groups

Motorized Linear, Vertical & Rotary Stages

Non-motorized Linear & Rotary Bearings

Controllers & Accessories

Air Bearing Background Information

PI Experience Matters for OEMs

Custom Systems / ACS Motion Controllers

Motorized Linear & Vertical Air Bearing Stages

Motorized XY Air Bearing Stages

XY & XYZ Overhead Gantries

Motorized Rotary Air Bearing Stages & Tip/Tilt Stages

Controllers for Motorized Air Bearing Stages

Watch Video

Linear / Rotary / Spherical Air Bearings (non-motorized)

Accessories for PIglide Air Bearing Products

Application Examples of Air Bearings, Stages and Systems

Gauging

Research

Flat Panel Display Test & Inspection

Beamline Positioning

Large Format Digital Printing

Optical Grinding

Tensile Testing

Optical Spectrometry

Satellite Research

Semiconductor Wafer Inspection and Handling

Automotive Suspension Testing

Micro-Machining