A-121 PIglide AT1 Linear Stage with Air Bearings

High Performance Small Footprint Nanopositioning Stage

  • Ideal for scanning applications or high-precision positioning
  • Cleanroom compatible
  • Size of the motion platform 115 mm × 115 mm
  • Travel ranges to 350 mm
  • Low profile from 60 mm
  • Resolution to 1 nm
A-121 PIglide AT1 Linear Stage with Air Bearings
Product Description Specifications Downloads Quote / Order

Product overview

The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation.

Accessories and options

  • Encoder
  • PIglide filter and air preparation kits
  • Multi-axis motion controller and direct drives
  • XY setups and individual configurations
  • Cable track variations
  • Counterbalance options for vertical assembly
  • Base plates made of granite and systems for reducing vibration

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet

Datasheet A-121

Version / Date
2023-11-17
pdf - 660 KB
Version / Date
2023-11-17
pdf - 668 KB
Version / Date
2021-04-27
pdf - 714 KB

Downloads

Product Note

Product Note

Product Change Notification A-xxx.*C1

Version / Date
2018-08-02
pdf - 71 KB
English

Datasheet

Datasheet

Datasheet A-121

Version / Date
2023-11-17
pdf - 660 KB
Version / Date
2023-11-17
pdf - 668 KB
Version / Date
2021-04-27
pdf - 714 KB

Documentation

Documentation

User Manual A121D0001

A-121 PIglide AT1 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback

Version / Date
2021-05-17
pdf - 1,020 KB
English

3D Models

3D Models

A-121 3-D model

Version / Date
2018-03-15
zip - 12 MB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

A-121.050A1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 50 mm travel range; 100 N load capacity; 500 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-121.050B1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 50 mm travel range; 100 N load capacity; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-121.100A1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 100 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-121.100B1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 100 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-121.150A1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 150 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-121.150B1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 150 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-121.200A1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 200 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-121.200B1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 200 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-121.250A1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 250 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-121.250B1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 250 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-121.350A1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 350 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-121.350B1

PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 350 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

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