A-361 PIglide Air-Bearing XY Rotation Stage

High Performance • Cleanroom-Compatible • Low Profile

  • Travel range in X and Y directions ±2.5 mm
  • Rotation range ±1°
  • Load capacity to 3 kg
  • Motion platform diameter 200 mm
  • Overall height 40 mm
  • Integrated vacuum chuck
  • Friction-free operation, air bearings lockable
A-361 PIglide Air-Bearing XY Rotation Stage
Product Description Specifications Downloads Quote / Order

Product overview

A-361 is an air-bearing XY-ThetaZ stage with direct drives. Designed as a parallel-kinematic multi-axis system, the platform moves in the X and Y directions as well as rotational in the Z axis. This stage offers ultra-high precision with a very low profile. The combination of the noncontact components results in frictionless movements. Thereby the A-361 offers not only ultra-high precision, but very high performance, and long service life. As the A-361 can be locked as needed, it offers excellent positional stability.

The A-361 can be mounted on a A-523 Z tip/tilt stage. This results in a compact 6 degrees of freedom motion system.

Accessories and options

  • Air filter preparation kits
  • Compatible A-8xx cables
  • Multi-axis A-8xx controller
  • Integrated vacuum chuck

Application Fields

The stage is ideally suited for many high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.

Specifications

Datasheet

Datasheet A-361

Version / Date
2024-02-21
pdf - 622 KB
Version / Date
2024-02-21
pdf - 631 KB

Downloads

Datasheet

Datasheet

Datasheet A-361

Version / Date
2024-02-21
pdf - 622 KB
Version / Date
2024-02-21
pdf - 631 KB

3D Models

3D Models

A-361 3D Model

zip - 1 MB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

A-361.AA100
PIglide air-bearing XY rotation stage; voice coil drive; ±2.5 mm × ±2.5 mm travel range (X × Y), ±1° rotation range (θZ); 30 N load capacity; 3 incremental encoders with sin/cos signal transmission, 80 µm signal period

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