Miniature Positioning Stages / Linear & Rotary Stages

Motorized miniature linear stages and miniature rotary stages (often referred to as micropositioners) are offered in a variety of designs, each optimized for a range of specific applications. When the highest dynamic performance and travel ranges in the centimeter range is required, along with continuous scanning operation, motorized miniature stages with voice-coil drives are often a good starting point. Longer travel ranges, higher forces, and even higher velocities are achievable with closed-loop 3-phase linear motor stages. Ultrasonic direct-drive piezo motor linear stages and rotary stages also provide very high speed and acceleration, and their inherently self-clamping design is an advantage in applications that require dynamics and high stability over longer periods with no heat generation. More traditional approaches are based on lead-screw and ball-screw drives with stepper motors or closed-loop servo motors. When nanometer and sub-nanometer performance is paramount, piezo flexure stages are hard to beat. Independent of the use case, compact, high precision positioning stages are crucial for the miniaturization process in cutting-edge research and industrial applications, such as test & measurement, optical and opto-mechanical alignment, photonics automation and component assembly. PI provides the largest portfolio of motorized miniature linear stages and rotary tables, including high-speed electromagnetic linear motors, economical stepper motor units, and ultra-compact piezo motor positioners, all available from single axis to multi-axis systems.

Choose from a Product Group below, or scroll to see all Product Groups

These highly engineered motorized micropositioners are available in different sizes and motion ranges. Most models can easily be combined to form X-Y micropositioners (see graphic below). PI offers open and closed-loop micropositioning stages with precision ranges from 1 micron to sub-nanometer resolution. The selection includes linear positioners and rotary tables, single-axis and multi-axis stage assemblies, for ambient and vacuum environments, custom designs and non-magnetic motorized stages are also available.

The smallest motorized stages offered are the finger-tip-sized, inertia motor-driven Q-Motion positioners. For the highest performance, the flexure guided PIhera series is recommended.

Custom Stages for OEMs: Since one design can NOT fit all applications, please contact a PI engineer and they will work with you on the best standard or custom solution for your motion application.

Servo/Stepper Motor Driven Miniature Linear Stages

Travel to 5 - 25mm

Micropositioners with stepper motors and linear motors and lead-screw or ball-screw drives are often employed when relatively high forces are required, speed requirements are moderate, and controls need to be simple.

PI offers micropositioners with lead screws (typically higher resolution and holding forces) and ball screws (higher speed, lower friction). Both are available with closed-loop servo motors and stepper motors.

The M-110, M-111 and M-112 series is is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball screws (higher speed, lower friction). The DC-servo motor versions come with motor mounted encoders (calculated resolution as low as 7 nanometers); the stepper motor driven versions are run open loop. Guidance is with linear ball bearings. X, XY and XYZ combinations are available.
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M-110/1/2 Miniature Stages
Lead/Ballscrew, Servo & Stepper
  • 5/15/25mm travel
  • 0.05µm min. incremental motion
  • 7nm sensor resolution
  • 1-2mm/sec max. velocity
  • 10N push/pull force
  • DC & stepper gearbox motors
L-505 Miniature Stages
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L-505 Miniature Stages
Linear Encoder to 5nm
  • 13/26mm travel
  • 0.05-1µm min. incremental motion
  • 5nm & 50nm linear encoder resolution
  • 1-15mm/sec max. velocity
  • 20-65N push/pull force
  • DC & stepper motors
The M-122 is a compact, high precision linear stage with integrated linear encoder providing 100 nanometers resolution. It is a bit larger than the M-112 lead screw-driven stage (with motor/gearhead combination), but provides higher speed and precision.
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M-122 Miniature Stages
Linear Encoder, 20mm/sec
  • 25mm travel
  • 0.1µm linear encoder
  • 20mm/sec max. velocity
  • 20N push/pull force
  • DC motor
L-406 Low Cost Compact Stages
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L-406 Low Cost Compact Stages
Leadscrew Servo & Stepper Motors
  • 26/52/102mm travel
  • 0.2-0.5µm min. incremental motion
  • 10-250nm sensor resolution
  • 3-20mm/sec max. velocity
  • 15-100N push/pull force
  • DC & stepper motors

Folded Drive Trains:  M-11x and M-12x Stages are especially compact through the use of a folded drive train. The M-110, M-111 and M-112 series is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball screws (higher speed, lower friction). The DC-servo motor versions come with motor mounted encoders (calculated resolution as low as 7 nanometers); the stepper motor driven versions are run open loop. Guidance is with linear ball bearings. X, XY, and XYZ combinations are available.

The M-122 is a compact, high precision linear stage with integrated linear encoder, providing 100 nanometers resolution. It is a bit larger than the M-112, 25mm stage (with motor/gearhead combination), but provides higher speed and precision. Cross roller bearings with anti creep cage assist replace the linear ball bearings in the M-11x stage series. 

The new L-505 is available in many configurations with linear encoders down to 5 nm resolution. It provides a very good balance of cost and precision.

More Compact Linear Stages

Servo/Stepper Motor Driven Miniature Z-Stages

13mm Vertical Travel

The L-306 precision vertical stage can be combined with the L-406 linear stage to form compact XZ or XYZ positioning systems.

L-306 Precision Vertical Stage
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L-306 Precision Vertical Lift Stage
Combines with L-406 Linear Stages
  • 13mm travel
  • 0.1µm min. inc. motion
  • 5nm linear encoder resolution
  • 5mm/sec max. velocity
  • 2kg load
  • 63x63mm footprint, combines with L-406 compact linear stages

Servo/Stepper Motor Driven Miniature Rotation Stages

These compact motorized rotation stages provide unlimited rotation ranges. The use of a worm gear reduction mechanism converts high speed input from the servo or stepper motor into high resolution motion at the turn table. Open loop stepper/gear motor and closed-loop servo gear motor versions with motor shaft mounted encoders are available.  

The RS-40 miniature rotation stage provides a 20mm aperture. Its preloaded anti-backlash worm drive is available with small DC servo/gear and stepper/gear motors.
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RS-40 Small Rotation Stage
Worm Gear, Servo & Stepper
  • 20mm aperture, 34mm turn table
  • 87µrad min. inc. motion
  • 7°/sec max. velocity
  • 2kg load 
DT-80 Small Rotation Stage
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DT-80 Small Rotation Stage
Worm Gear, Servo & Stepper
  • 40mm aperture, 64mm turn table
  • 70µrad min. inc. motion
  • 40°/sec max. velocity
  • 2kg load 

High-Speed Linear Translation / Rotation Stages

Ultrasonic Motors, Wide Dynamic Range, Velocity to 200mm/sec

Ultrasonic motor direct drives are based on the piezo effect. A compact piezoceramic actuator is driven at inaudible frequencies of 100’s of kHz (hence the ultrasonic designation), and with each cycle transfers nanoscopic motion to a linear or rotary ceramic surface bonded to a linear runner or rotary platform. Ultrasonic motors provide very fast start/stop behavior, smooth motion with a very wide dynamic range from microns/second to 100’s of millimeters/second.

Ultrasonic motors are self-clamping at rest, provide excellent long-term stability, there is no servo dither, or energy consumption once a position has been reached. While high velocities can be achieved with ultrasonic motors, when continuous scanning is required, magnetic linear motors and voice-coil drives, such as in the V-522 miniature stage, are recommended. Ultrasonic drives permit the design of very compact positioners; the motor design is intrinsically non-magnetic and vacuum compatible.

The U-521 miniature piezo-motor stage is designed for fast, quiet motion and positioning applications with high resolution and excellent step and settle behavior. Equipped with direct position feedback, two versions are offered, a lower-cost 0.4 micron linear encoder and 0.1 micron version for higher precision applications.
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U-521 Miniature Linear Stage
Silent Ultrasonic Linear Motor
  • 18mm motion range
  • 0.1µm encoder resolution 
  • 200mm/sec velocity
  • 35x35mm footprint
  • Self clamping motor design
  • Vacuum options
Designed with patented technology, the U-523 is a quiet, space-saving, light positioner. As a single axis mini piezo-motor stage, it delivers fast motion and accurate positioning with high resolution and excellent step and settle behavior and is equipped with a high sensor resolution of 10nm.
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U-523 Miniature Linear Stage
Silent Ultrasonic Linear Motor
  • 22mm motion range
  • 10nm encoder resolution 
  • 200mm/sec velocity
  • 42x42mm footprint
  • Self clamping motor design
  • Vacuum options
The U-723 mini piezo-motor stage is designed for fast, quiet, motion and positioning applications with high resolution and excellent step and settle behavior. With patented technology, it's a space-saving and light positioner with sensor resolution of 10nm.
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U-723 Miniature XY Linear Stage
Silent Ultrasonic Linear Motor
  • 22x22mm XY motion range
  • 10nm encoder resolution 
  • 200mm/sec velocity
  • 42x42mm footprint
  • Self clamping motor design
  • Vacuum options

The U-521 is the smallest member of the ultrasonic miniature stage family. It is designed for fast, quiet motion and positioning applications with high resolution and excellent step and settle behavior. Equipped with direct position feedback, two versions are offered; a lower-cost 0.4 micron linear encoder and 0.1 micron version for higher precision applications.

The U-523 is slightly larger, providing 22mm travel and a linear encoder with 10nm resolution.

The U-723 is an integrated, space saving XY version of the U-523.

High Speed Miniature Rotary Stages

Ultrasonic Motors, Wide Dynamic Range, Velocity to 720°/sec

These ultrasonic motor driven rotation stages provide high velocity to 720°/second and compact dimensions. They are equipped with optical, direct metrology encoders, and due to the self-clamping motor design, boast excellent position stability. The U-628 is the largest example featuring a table diameter of just under 2”. With Ø30mm and Ø20mm, respectively, the U-624 and U-622 are even more compact versions of the U-628 rotary stage.

With Ø30mm and Ø20mm, respectively the U-624 and U-622 are even more compact versions of the U-628 rotary stage.
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U-622 Miniature Ultrasonic Motor Stage
Direct Drive, Direct Encoder
  • 18.5mm turn table, 10mm height
  • 525µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.03kg load
  • Ultrasonic motor, self locking
With Ø30mm and Ø20mm, respectively the U-624 and U-622 are even more compact versions of the U-628 rotary stage.
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U-624 Miniature Ultrasonic Motor Stage
Direct Drive, Direct Encoder
  • 28.5mm turn table, 12mm height
  • 105µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.1kg load
  • Ultrasonic motor, self locking
The U-628 ultrasonic-motor-driven small rotation stage provides high velocity to 720°/second. It is equipped with an optical, direct metrology encoder, and due to its self-clamping motor design, boasts very high position stability.
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U-628 Miniature Ultrasonic Motor Stage
Direct Drive, Direct Encoder
  • 7mm aperture, 50mm turn table, 19mm height
  • 51µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.5kg load
  • Ultrasonic motor, self locking

Piezo Inertia Motors: Sub-Miniature Linear & Rotary Stages

Ultra-Compact, Velocity to 10mm/sec

Stick-slip piezo motors (inertia motors) permit the design of the smallest class of precision motorized positioners. The direct drive motors are only a few millimeters in size, there are no gears, or other conventional power transmission components involved that add size, complexity, play or backlash.

Inertia piezo motors make use of the difference in the static and dynamic friction coefficients between two surfaces; their controllers provide a quasi sawtooth output voltage, with a slow expansion phase and a fast contraction phase. In the expansion phase, the piezo actuator moves the slider; in the contraction phase, its inertia prevents the slider from following the quick motion of the actuator, and it remains at its position.

Piezo inertia motors can be operated in open loop, but for high accuracy and repeatability, a position encoder is integrated in the stage. Vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. 

The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions. Two linear encoder options for 1 and 4 namometer resolution are offered, both integrated in the stage body, for minimized dimensions.
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Q-521 Sub-Miniature Linear Stage
Piezo Inertia Direct Drive Motor
  • 12, 22, 32mm motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 21mm width, 10mm height
  • Self clamping motor, 1N
The Q-545 mini positioning stage is driven by a high-force stick slip motor, based on a slightly different design compared to the Q-521 and Q-522 stages. A linear encoder is integrated for nanometer-scale precision. Vacuum versions, and non-magnetic versions are also offered. The piezo inertia drive runs at inaudible frequencies and is self-clamping at rest with position holding forces around 2 lbs.
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Q-545 Miniature Linear Stage
Piezo Inertia Direct Drive Motor
  • ½” &  1” motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 45mm width, 15mm height
  • Self clamping motor, 8N
The Q-600 series of miniature rotary stages are based on the stick-slip motor principle. The Q-632, a 32mm stage, boasts an ultra-low profile of only 7mm.
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Q-632 Q-Motion® Miniature Rotation Stage
Inertia Motor, Direct Encoder
  • 30mm turn table, 10mm height
  • 3µrad min. inc. motion
  • 45°/sec max. velocity
  • 0.1kg load
  • Piezo inertia motor, self locking

The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions are available. Two linear encoder options for 1 and 4 namometer resolution are offered, both integrated in the stage body, for minimized dimension.

The Q-545 mini positioning stage is driven by a higher force stick slip motor, based on a slightly different design compared to the Q-521 stage. A linear encoder is integrated for nanometer-scale precision. The piezo inertia drive runs at inaudible frequencies and is self-clamping at rest with position holding forces around 2 lbs.

Miniature Linear Stages with PiezoWalk Motors (NEXACT® Motors)

High-End Piezo Motor, 0.5nm Encoder Resolution

PiezoWalk is a more powerful and complex drive than stick-slip and ultrasonic motors. PiezoWalk motors combine long travel with high stiffness and force, providing virtually unlimited travel ranges. PI’s NEXACT® motor technology integrates these advantages into a small package. Piezo-class resolution, millisecond responsiveness with low operating voltages, and a self-clamping design are other features.

The motors offer multiple operating modes including a high-dynamics, short-range dither mode with 100’s of Hertz bandwidth and picometer resolution, and several long distance modes optimized for highest force, highest speed, and constant velocity.

N-332 Nanometer-Precision Stage
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N-332 Nanometer-Precision Stage
1µm straightness/100mm
  • 1” and 2” motion range
  • 3nm min. incremental motion
  • 12mm/sec velocity
  • 80mm width, 30mm height
  • 75N force, self-clamping motor
  • UHV option
Driven by PiezoWalk® technology, which combines piezo class resolution with long travel ranges, subnanometer resolution, high forces and stiffness, these stepping drives are not subject to sliding friction or wear as motion is achieved when the “legs” lift off for each step. Designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology and scientific research in beamlines and laser labs.
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N-565 Nanometer-Precision Stage
PiezoWalk Direct Drive Motor
  • ½”, 1” and 2” motion range
  • 0.5nm encoder resolution
  • 10mm/sec velocity
  • 65mm width, 20mm height
  • Self clamping motor, 10N
  • Vacuum options

Electrodynamic Linear Motor Stages - Voice Coil & 3-Phase Motors

PIMag® Technology - Zero Fricton Motors, High Speed

Electromagnetic linear motor-driven stages are used in high-speed positioning, scanning, and automation applications. They have lower holding forces compared to classical motor /screw driven stages, but no wear in the drive train, and are ideal for fast, high-duty cycle motion and positioning applications. .

Voice Coil Actuators use a one-phase electromagnetic linear motor similar to the driver of a loud-speaker. They provide high velocity with zero wear and motion ranges typically up to 1 inch.

Three phase linear motors can be used for longer travel ranges and provide higher forces.

The V-408 features high load capacity precision crossed roller elements with anti-creep cage assist, preventing roller creep, and a zero-wear, non-contact linear motor – ideal prerequisites for long lifetime in high duty cycle industrial applications. The high-force linear motor achieves velocities up to 1.5m/sec. An integrated optical linear encoder provides 10 nanometers resolution. The stage achieves 20nm minimum incremental motion and excellent geometric performance with 4µm straightness and flatness.
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V-408 Low Cost Linear Motor Stage
Compact, High Force
  • 25 and 50mm travel
  • 20nm min. incremental motion
  • 10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force
V-141 Low-Cost Linear Motor Stage
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V-141 Low-Cost Linear Motor Stage
Compact, High Force
  • 40, 60, and 100mm travel

  • 60nm bidirectional repeatability

  • 2µm accuracy

  • 1.1m/sec max. velocity

  • 17N push/pull force

The V-52x series of voice-coil-driven linear stages come in 3 sizes and provide high-dynamics over travel ranges of 5mm, 10mm, and 20mm. Applications include optics scanning, fiber alignment, biotechnology, and laser technology. These compact linear scanning stages achieve significantly higher dynamics and speed than conventional screw-type positioners with stepper and servo motors; scanning frequencies of several 10Hz with velocities up to 250mm/sec can be achieved with the recommended C-413 compact controller. The design uses no moving cables and the frictionless voice-coil drive is not subject to wear & tear and generates no particles.
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V-522/4/8 Voice Coil Stage
Ideal for Scanning
  • 5/10/25mm travel
  • 20nm min. incremental motion
  • 10nm linear encoder resolution
  • 10’s of Hz scanning frequency
  • 4N push/pull force
Compact Linear Motor Stages
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V-571 Compact Linear Motor Stage
1µm straightness/100mm
  • 25/50/75/100mm travel
  • 60nm bidirectional repeatability
  • 1nm absolute encoder resolution
  • 0.5m/sec max. velocity
  • 7.1N push/pull force
V-508 Linear Motor Stage
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V-508 Linear Motor Stage
Compact, High End Sensor Option
  • 80/170/250mm travel
  • 1 to 20nm min. inc. motion
  • 0.2-10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force

The V-52x series of voice-coil-driven linear stages come in 3 sizes and provide high-dynamics over travel ranges of 5mm, 10mm, and 20mm. Applications include optics scanning, fiber alignment, biotechnology, and laser technology. These compact linear scanning stages achieve significantly higher dynamics and speed than conventional screw-type positioners with stepper and servo motors; scanning frequencies of several 10Hz with velocities up to 250mm/sec can be achieved with the recommended C-413 compact controller. The design uses no moving cables and the frictionless voice-coil drive is not subject to wear & tear and generates no particles.

The V-408 features high load capacity precision crossed roller elements with anti-creep cage assist, preventing roller creep, and a zero-wear, non-contact linear motor – ideal prerequisites for long lifetime in high duty cycle industrial applications. The high-force linear motor achieves velocities up to 0.7m/sec. An integrated optical linear encoder provides 10 nanometers resolution. The stage achieves 20nm minimum incremental motion and excellent geometric performance with 4µm straightness and flatness.

The V-508 provides absolute measuring encoders and longer travel ranges to 170mm.

 

Wear and Friction Free Bearings, No Particle Generation
Flexures and air bearings provide friction free and wear free precision guidance.

The A-142 is our smallest motorized Air Bearing Linear Stage. It is driven by a voice coil motor and equipped with a high-resolution optical linear encoder. A brake and air springs can be added for vertical applications. 

The A-141 miniature Air Bearing Linear Stage is equipped with a 3-phase motor, fully preloaded air bearings, and an integral high-resolution optical linear encoder. A locking design provides the ultimate in position stability. This stage offers ultra-precision in a very compact package.

A-141 Miniature Air Bearing Stage
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A-141 Miniature Air Bearing Stage
Friction Free, No Particle Generation
  • 40mm travel
  • 20nm min. inc. motion
  • 0.25m/sec max. velocity, 0.35g max. acceleration
  • 2.3N push/pull force
  • 3-Phase motor
  • Table size 57mm x 83mm
A-142 Mini Voice Coil Linear Slide with Air Bearings
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A-142 Mini Voice Coil Linear Slide
Air Bearings, Frictionless, Fast
  • 10mm travel
  • 3kg load
  • 5nm encoder, 0.1µm straightness
  • 75x80mm table; 27mm height
  • 450mm/sec, 2g acceleration
  • 20N push/pull force
Z-Tip-Tilt Air Bearing Stage
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A-523 Z-Tip-Tilt Air Bearing Stage
Low Profile
  • ⌀250mm table
  • 8 kg load capacity
  • 5mm Z-stroke, to 2° tip/tilt
  • 10nm/0.06µrad incremental motion
  • 1nm sensor resolution

Piezo Flexure Stages

Ultra-High Performance, Short Travel 0.1 to 1.8mm

Piezo flexure-guided positioning stages provide several advantages over classical motorized positioning systems with mechanical bearings. They are completely free of backlash and friction and can position and settle in milliseconds or even microseconds. Driven by a piezo ceramic (with optional flexure motion amplifier), the response time is based on the sound propagation in the ceramics.

Piezo flexure stages are used when extremely smooth motion, fast response, high force or continuous scanning is required, with travel ranges typically below 1 millimeter. PI flexure stages are driven with PI’s exclusive PICMA piezo elements that have been life tested for 100 billion cycles and were selected by NASA /JPL for the Mars mission due to their extremely high performance and reliability.

	These miniature positioning stages are piezo-actuator driven and flexure guided for ultra-smooth, fast and high-precision motion and positioning applications. High precision capacitance positioning sensors provide feedback to a closed-loop controller. PIHera flexure stages are available in X, XY, and Z configurations and can be assembled to form compact XYZ positioning systems.
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PIHera Family of Piezo Flexure Stages
0.05 to 1.8mm Travel
  • 50 to 1800µm travel ranges
  • <1 nanometer resolution
  • Backlash-free precision flexure guiding system
  • X, XY, Z, XYZ versions
  • Vacuum option
P-616 Compact XYZ Piezo Scanner
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P-616 Compact XYZ Piezo Scanner
PKM = Higher Performance
  • 100µm XYZ motion
  • Parallel-kinematics (PKM)
  • Compact (40x40x40mm)
  • <1 nanometer resolution
  • Ideal for fast scanning
P-733.3DD High-Dynamics Scanners
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P-733.3DD High-Dynamics Scanners
Fastest XYZ Piezo Stages
  • 30x30x10µm motion
  • Direct drive = Higher dynamics
  • Up to 2.2 kHz resonant frequency
  • 100 picometers resolution
  • Frictionless precision flexure guides

Miniature Hexapod & 6-Axis Parallel Positioning Systems

A hexapod is based on a 6-axis (XYZ, Pitch, Roll, Yaw) actuator system arranged between a top and bottom platform.  Hexapods are also referred to as Gough-Stewart platforms and offer many advantages over serial kinematics stages, such as lower inertia, improved dynamics, smaller package size, and higher stiffness. In addition, hexapods are more flexible than conventional 6 axis positioners.

PI's miniature hexapods are available with different configurations: standard, high-speed, vacuum, and high resolution.

In addition to hexapods, PI offers a second class of planar 6-axis parallel manipulators. These piezo motor driven units are even smaller and fit inside the palm of a hand.

H-811 Miniature Hexapod
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H-811 Miniature Hexapod
Brushless DC Motors
  • 34x32x13mm XYZ travel
  • 20x20x41° rotary travel
  • 5kg load
  • 5nm actuator resolution
  • 10mm/sec max. velocity
  • Ø136mm base, 114mm height
Z-Tip-Tilt Air Bearing Stage
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A-523 Z-Tip-Tilt Air Bearing Stage
Low Profile
  • ⌀250mm table
  • 8 kg load capacity
  • 5mm Z-stroke, to 2° tip/tilt
  • 10nm/0.06µrad incremental motion
  • 1nm sensor resolution
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A-361 X-Y-θ Air Bearing Alignment Stage
Voice Coil Driven, Low Profile
  • 5mm x 5mm x 2° Travel
  • 40mm height, ø200mm
  • Air Bearings & Voice Coils
  • Parallel Kinematics
  • Lock-down Capable
  • 6-DOF Option

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