XY Stages - Precision Motorized Planar XY Positioning Stages

In addition to stacked XY stage combinations of single axis linear translation stages, PI provides a number of integrated manual and motorized XY stages and true planar XY stages based on air bearings or flexures. These integrated linear motion systems are available in different load and precision classes providing position resolution from a few microns down to nanometers and below.

Highest Performance: XY Stages with Air Bearings
Planar Air Bearing XY stages are used when the highest precision is required in terms of straightness & flatness, smoothness of motion, and constancy of velocity. Planar XY air bearing stages use one common base for both the X and Y motion, eliminating torque and bending moments that occur with stacked stages. Air bearing stages are driven by linear motors and can provide very high velocity and acceleration, ideal prerequisites for industrial precision manufacturing applications.

High Performance: XY Stages with Mechanical Bearings
Single module XY stages provide a stiffer base and a lower profile than a pair of stacked linear positioning stages. PI offers planar XY stages with motor / screw drives, for higher load and 3-phase electrodynamic direct drive linear motors for higher speed. Compact XY stages with piezo linear motors (non-magnetic motors) are also available.

Short Travel: XY Stages with Flexure Guides
For small travel ranges <1mm and high precision, high-speed nanopositioning requirements, piezo flexure XY stages are recommended.

XY Stages with Mechanical Bearings and Linear Motor Drives

V-738 Integrated High Speed Precision XY Stage, 4" Travel
Show more

V-738 Integrated High Speed Precision XY Stage, 4" Travel

Aperture, Linear Motor & Encoder

  • 4” XY travel (102mm)
  • 0.02µm min. inc. motion
  • 0.001µm sensor resolution
  • 500mm/sec max. velocity
  • 5kg load
  • Linear motor, linear encoder
V-731 Integrated High Speed Precision XY Stage, 8" Travel
Show more

V-731 Integrated High Speed Precision XY Stage, 8" Travel

Linear Motor, Linear Encoder

  • 8” XY travel (205mm)
  • 0.02µm min. inc. motion
  • 0.001µm sensor resolution
  • 200mm/sec max. velocity
  • 5kg load
  • Linear motor, linear encoder
V-741 Integrated High Speed Precision XY Stage, 12" Travel
Show more

V-741 Integrated High Speed Precision XY Stage, 12" Travel

Linear Motor, Linear Encoder

  • 12” XY travel (305mm)
  • 0.02µm min. inc. motion
  • 0.001µm sensor resolution
  • 200mm/sec max. velocity
  • 5kg load
  • Linear motor, linear encoder

These XY-Linear Stages are based on non-contacting linear motor direct drives. Linear motors are frictionless, wear free, and provide high acceleration and excellent velocity control over wide dynamic ranges. PI recommends ACS motion controllers that provide advanced features such as InputShaping to improve settling behavior and suppress unwanted resonances. Linear encoders with resolution to 1 nanometer are available.

XY Stages with Mechanical Bearings and Screw Drives

This low profile, integrated XY linear stage is available with stepper and servo motors. Driven by a ball screw and guided by precision anti-creep crossed roller bearings for higher stiffness and lower friction, the stage provides repeatability to 0.25µm. Noncontact optical linear encoders measure the actual position directly at the moving platform, providing higher accuracy than motor-mounted rotary encoders. Optical limit and reference point switches are also integrated. Applications include metrology, inspection, microscopy in industry and research.
Show more

L-738 Integrated High Load Precision XY Stage, 4" Travel, Aperture

Ballscrew, Stepper & Servo Motor

  • 4” XY travel (102mm)
  • 0.1µm min. inc. motion
  • 0.1 to 0.001µm sensor resolution
  • 90mm/sec max. velocity
  • 20kg load
  • Linear encoder option
This low profile, integrated XY linear stage is available with stepper and servo motors. Driven by a ball screw and guided by precision anti-creep crossed roller bearings for higher stiffness and lower friction, the stage provides repeatability to 0.25µm. Noncontact optical linear encoders measure the actual position directly at the moving platform, providing higher accuracy than motor-mounted rotary encoders. Optical limit and reference point switches are also integrated. Applications include metrology, inspection, microscopy in industry and research.
Show more

L-731 Integrated High Load Precision XY Stage, 8" Travel

Ballscrew, Stepper & Servo Motor

  • 8” XY travel (205mm)
  • 0.1µm min. inc. motion
  • 0.1 to 0.001µm sensor resolution
  • 90mm/sec max. velocity
  • 20kg load
  • Linear encoder option
L-741 Integrated High Load Precision XY Stage, 12" Travel
Show more

L-741 Integrated High Load Precision XY Stage, 12" Travel

Ballscrew, Stepper & Servo Motor

  • 12” XY travel (305mm)
  • 0.1µm min. inc. motion
  • 0.1 to 0.001µm sensor resolution
  • 90mm/sec max. velocity
  • 20kg load
  • Linear encoder option

For applications requiring higher loads and/or push-pull forces, ball screws are used in the L-731 / L-738 / L-741 XY-linear stage family. Several motor options are available, from open loop steppers to closed-loop servo motors with 10-nanometer resolution linear encoders.

The M-545 stage was designed as a high stability platform for high-speed XY and XYZ piezo flexure scanning stages in microscopy applications. In its basic version it comes with manual micrometers. Motorized micrometers are available in an upgrade kit.
Show more

M-545 XY-Linear Stage for Microscopy

Combines with PInano Piezo Stage

  • 25x25mm travel
  • 1µm min. inc. motion
  • 5kg load
  • Combines with P-545 XYZ piezo scanner for microscopy
  • Stepper motor upgrade

The M-545 is a manual XY-stage for microscopy applications. It can be motorized by replacing the manual micrometers with motorized versions. The M-545 XY stage also combines with the P-545 XY and XYZ nanopositioning stages for scanning microscopy applications.

XY and XYZ Gantries

Air Bearings & Linear Bearings, Linear Motors
Show more

A-341 Hybrid XY / XYZ Gantry Stage

Air Bearings & Linear Bearings, Linear Motors

  • 300x300 to 500x1000mm XY travel
  • 10kg load
  • Absolute encoders, 1nm resolution

  • Z-Stage options: linear motors or ball screws 
  • Dynamic error mapping
  • 2m/sec max velocity (cross axis)
A-351 Overhead Gantry XY / XYZ Stage
Show more

A-351 Overhead XY / XYZ Gantry Stage

Linear Bearings, Linear Motors

  • 300x300 to 500x1000mm XY travel
  • 20kg load
  • Absolute encoders, 1nm resolution

  • Z-Stage options: linear motors or ball screws 
  • Dynamic error mapping
  • 2m/sec max velocity (cross axis)

XY Stages with Mechanical Bearings and Fast Piezo Ultrasonic Linear Motors

U-723 Integrated Miniature XY Linear Stage
Show more

U-723 Integrated Miniature XY Linear Stage

Ultrasonic Motor, Linear Scale

  • 22x22mm travel
  • 0.1µm min. inc. motion
  • 0.01 µm sensor resolution
  • 200mm/sec max. velocity
  • 0.2kg load
  • Very wide velocity range
The U-751/M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The ceramic motors auto-clamp at rest, providing significantly better long term stability than other motors w/o the need for a brake.
Show more

U-751 Integrated XY Linear Stage

Ultrasonic Motor, Linear Scale

  • 25x25mm travel
  • 0.3µm min. inc. motion
  • 0.1 µm sensor resolution
  • 100mm/sec max. velocity
  • 5kg load
  • Very wide velocity range
The U-780/M-687 and U-751/M-686 XY stages are based on ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The ceramic motors auto-clamp at rest, providing significantly better long term stability than other motors w/o the need for a brake.
Show more

U-780 Precision XY Microscope Stage

Ultrasonic Motor, Linear Scale

  • 135x85mm travel
  • 0.1µm min. inc. motion
  • 0.1 µm sensor resolution
  • 120mm/sec max. velocity
  • 2.5kg load
  • Very wide velocity range

Piezo linear-motor driven XY-stages combine the advantages of piezoceramic properties with long linear travel ranges. Ultrasonic linear motors provide rapid step/settle performance and a wide dynamic range. At rest, the self-clamping properties automatically lock the platform, providing high stability without the need for driving current.

XY Stages with Air Bearings and Linear Motors: True Planar XY Motion

The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y directions on a common base, providing smooth, frictionless motion. Ideal for inspection, laser marking, microscopy, scanning, and other precision motion applications. The efficient, compact design saves space in tight machine designs. Ironless linear motors provide smooth motion with no cogging or attractive forces. Optical linear encoders provide position feedback information down to 1nm, depending on interpolation.   The PIglide IS can be coupled with a variety of industry-leading digital controls and drives that offer advanced algorithms to improve dynamic performance and error compensation and a wide suite of software development tools.
Show more

A-311 Planar Air Bearing Stage

Compact, Affordable, Al Base

  • 2x2” to 8x8” travel
  • 15kg load
  • 1nm resolution
  • Light weight, AL base
  • Dynamic error mapping
  • 2m/sec / 2.7g max. acceleration
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection.  The cross-beam mounts to the Y axis via a highly engineered flexural coupling that provides yaw-compliance without sacrificing system stiffness. The gantry axis is a dual air-bearing design that incorporates dual linear motors and dual linear encoders. Ironless linear motors provide smooth motion and no cogging or attractive forces. Both incremental and absolute encoder options are available. The PIglide HS incorporates three high-accuracy linear encoders, one for the bridge axis and two for the gantry axis.   The PIglide HS is coupled with industry-leading digital controls that offer superior servo update rates (up to 5 kHz), advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.
Show more

A-322 Planar Air Bearing Stage

3-Motor Design, Granite Base

  • 500x1000mm max. travel
  • 15kg load
  • 1nm resolution
  • Active yaw control flex coupling
  • Dynamic error mapping
  • 1m/sec / 1g max. acceleration

Air bearing XY-linear stages provide the highest geometric performance. These true planar XY positioning systems use one common base for both the X and Y axes avoiding flex and torsion common with stacked X-Y stages.

XY Piezo Flexure Nanopositioning Stages

Piezo flexure stages provide sub-nanometer resolution, frictionless motion and very fast step and settle response. They are used in microscopy, imaging, semiconductor metrology and precision optics applications. PI provides a very large selection of flexure stages, from one to 6 axes.
Show more

XY Piezo Stages: P-542, P-527, P-545

For Scanning and Nanopositioning

  • 200x200µm travel
  • <1nm resolution
  • 5kg load
  • For photonics, super-resolution microscopy and lithography

Flexure-guided, piezo-driven XY linear stages are used in nanopositioning and scanning applications with short travel ranges on the order of 100’s of microns. They provide excellent accuracy, dynamic properties, and geometric performance (straighness, flatness, etc) with resolution down to the sub-nanometer range.

Multi-Axis Assemblies and 6-Axis Stages (Hexapods)