XY Stages - Precision Motorized Planar XY Positioning Stages

In addition to stacked XY stage combinations of single axis linear translation stages, PI provides a number of single module manual and motorized XY stages. These planar motion systems are available in different load and precision classes providing position resolution from a few microns down to nanometers and below.

Highest Performance: XY Stages with Air Bearings
Planar Air Bearing XY stages are used when the highest precision is required in terms of straightness & flatness, smoothness of motion, and constancy of velocity. Planar XY air bearing stages use one common base for both the X and Y motion, eliminating torque and bending moments that occur with stacked stages. Air bearing stages are driven by linear motors and can provide very high velocity and acceleration, ideal prerequisites for industrial precision manufacturing applications.

High Performance: XY Stages with Mechanical Bearings
Single module XY stages provide a stiffer base and a lower profile than a pair of stacked linear positioning stages. PI offers planar XY stages with motor / screw drives, for higher load and 3-phase electrodynamic direct drive linear motors for higher speed. Compact XY stages with piezo linear motors (non-magnetic motors) are also available.

Short Travel: XY Stages with Flexure Guides
For small travel ranges <1mm and high precision, high-speed nanopositioning requirements, piezo flexure XY stages are recommended.

XY Stages with Mechanical Bearings and Screw Drives or Linear Motor Drives

  • 4, 8, 12” XY travel (102, 205, 305mm)
  • 0.02µm min. inc. motion
  • 0.001µm sensor resolution
  • 200 & 500mm/sec max. velocity
  • 5kg load
  • Linear motor, linear encoder
  • 4, 8, 12” XY travel (102, 205, 305mm)
  • 0.1µm min. inc. motion
  • 0.1 to 0.001µm sensor resolution
  • 90mm/sec max. velocity
  • 20kg load
  • Linear encoder option
	The M-545 stage was designed as a high stability platform for high-speed XY and XYZ piezo flexure scanning stages in microscopy applications. In its basic version it comes with manual micrometers. Motorized micrometers are available in an upgrade kit.
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M-545 Microscope Stage

Combines with PInano Piezo Stage

  • 25x25mm travel
  • 1µm min. inc. motion
  • 5kg load
  • Combines with P-545 XYZ piezo scanner for microscopy
  • Stepper motor upgrade

XY Stages with Mechanical Bearings and Fast Piezo Ultrasonic Linear Motors

U-723 Miniature Planar XY Stage
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U-723 Miniature Planar XY Stage

Ultrasonic Motor, Linear Scale

  • 22x22mm travel
  • 0.1µm min. inc. motion
  • 0.01 µm sensor resolution
  • 200mm/sec max. velocity
  • 0.2kg load
  • Very wide velocity range
	The U-751/M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The ceramic motors auto-clamp at rest, providing significantly better long term stability than other motors w/o the need for a brake.
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U-751 Planar XY Stage

Ultrasonic Motor, Linear Scale

  • 25x25mm travel
  • 0.3µm min. inc. motion
  • 0.1 µm sensor resolution
  • 100mm/sec max. velocity
  • 5kg load
  • Very wide velocity range
The U-780/M-687 and U-751/M-686 XY stages are based on ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The ceramic motors auto-clamp at rest, providing significantly better long term stability than other motors w/o the need for a brake.
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U-780 Precision XY Microscope Stage

Ultrasonic Motor, Linear Scale

  • 135x85mm travel
  • 0.1µm min. inc. motion
  • 0.1 µm sensor resolution
  • 120mm/sec max. velocity
  • 2.5kg load
  • Very wide velocity range

XY Stages with Air Bearings and Linear Motors

The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y directions on a common base, providing smooth, frictionless motion. Ideal for inspection, laser marking, microscopy, scanning, and other precision motion applications. The efficient, compact design saves space in tight machine designs. Ironless linear motors provide smooth motion with no cogging or attractive forces. Optical linear encoders provide position feedback information down to 1nm, depending on interpolation.   The PIglide IS can be coupled with a variety of industry-leading digital controls and drives that offer advanced algorithms to improve dynamic performance and error compensation and a wide suite of software development tools.
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A-311 Planar Air Bearing Stage

Compact, Affordable, Al Base

  • 2x2” to 8x8” travel
  • 15kg load
  • 1nm resolution
  • Light weight, AL base
  • Dynamic error mapping
  • 2m/sec / 2.7g max. acceleration
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection.  The cross-beam mounts to the Y axis via a highly engineered flexural coupling that provides yaw-compliance without sacrificing system stiffness. The gantry axis is a dual air-bearing design that incorporates dual linear motors and dual linear encoders. Ironless linear motors provide smooth motion and no cogging or attractive forces. Both incremental and absolute encoder options are available. The PIglide HS incorporates three high-accuracy linear encoders, one for the bridge axis and two for the gantry axis.   The PIglide HS is coupled with industry-leading digital controls that offer superior servo update rates (up to 5 kHz), advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.
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A-322 Planar Air Bearing Stage

3-Motor Design, Granite Base

  • 500x1000mm max. travel
  • 15kg load
  • 1nm resolution
  • Active yaw control flex coupling
  • Dynamic error mapping
  • 1m/sec / 1g max. acceleration

XY Piezo Flexure Nanopositioning Stages

Piezo flexure stages provide sub-nanometer resolution, frictionless motion and very fast step and settle response. They are used in microscopy, imaging, semiconductor metrology and precision optics applications. PI provides a very large selection of flexure stages, from one to 6 axes.
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P-542, P-527, P-545 Piezo Stages

For Scanning and Nanopositioning

  • 200x200µm travel
  • <1nm resolution
  • 5kg load
  • For photonics, super-resolution microscopy and lithography

Multi-Axis Assemblies and 6-Axis Stages (Hexapods)