Precise Motorized Linear Actuators/Stages, Stepper & Servo | PI

Direct Drive, Voice Coil, Ball Screw, Linear Motor and Piezo Motor Actuators for Precision Motion and Positioning

A large selection of high performance motorized linear actuators & stages for high precision motion control and positioning applications.

A precision linear actuator is a positioning device that provides motion in 1 degree of freedom. PI designs and manufactures a variety of precision actuators (pushers) including economical stepper-motor actuators, high-speed linear motor actuators for automation and nanometer precise piezo-motor actuators.

While there are many different types of precision actuators, piezoelectric actuators are the first choice when accuracy, speed, responsiveness, and resolution are essential. Long travel, motorized rodless actuators, often called linear stages, provide precision guidance and facilitate the mounting of objects.

See our latest direct-drive linear modules for industrial automation.

Servo and Stepper Motor Captive Actuators: 10 to 75mm Travel, to 400N Force, to 50mm/sec

Rodless Actuators (Linear Motion Stages)

Fast Voice Coil Actuators: 10 to 25mm, to 1000mm/sec

Micro linear actuator — Set & Forget Piezo Motor Actuators: Micrometer Replacement, 7 to 26mm Travel

Mini-Rod Piezo Motor Actuators: 10 to 35mm Travel, 10N Force, 10mm/sec

PiezoWalk® Actuators: High-End Applications, Sub-nm Resolution, Travel to 125mm, Forces to 600N

High Dynamics, Flexure-Guided -Amplified Piezo Actuators: Fast, Compact, Travel to 1mm

Piezo Stack Actuators: ~100µm Travel, Forces to 30kN, <1msec Response

<0.1µm Resolution to 50mm Travel, ~1mm/sec

These classical captive motorized actuators are available as closed-loop models, with servo motors and for lower cost applications with stepper motors. Typically, they are based on combinations of a rotation-type motor and a screw-type actuator.

Lead-screws provide high forces and self locking capabilities, while ball screws are used for higher speed applications with longer service life. Position feedback is available with linear encoders and motor shaft mounted rotary encoders.

Smaller motors are often equipped with gear heads to provide higher torque and resolution, however at the cost of speed.

Actuators with built-in anti-rotation (non rotating tip) are easier to integrate and when used as pushers, do not generate torque or wear at the contact surface.

M-230 High Precision Actuator

Servo & Stepper Motors

10 and 25mm travel
0.05µm min. incremental motion
4nm sensor resolution
1.2 mm/sec max. velocity
70N push/pull force
Nonrotating tip

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Compact Linear Actuator

Compact, Servo & Stepper

17mm travel
0.1µm min. incremental motion
7nm sensor resolution
1.5 mm/sec max. velocity
40N push/pull force

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The M-227 Series provides very high resolution and smooth motion. It requires external limit switches.

Servo & Stepper Motors

10, 25, 50mm travel
0.05µm min. incremental motion
4nm sensor resolution
0.75mm/sec max. velocity
40N push/pull force
Nonrotating tip
Requires external limit switches

To 25mm Travel, 1µm Resolution, to 5mm/sec

M-228/9 Low Cost Linear Actuators

Gear & Direct Drive, Stepper

10 and 25mm travel
1µm min. incremental motion
1.5 and 5mm/sec max. velocity
20/50/80N push/pull force

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To 0.1µm Resolution, Low Friction, To 50mm/sec, Forces to 400N

Recirculating ball screws (RBS) provide lower friction and higher velocity than lead screws by replacing sliding friction with rolling friction. Lower friction also means less heat generation when operated at high duty cycles and high velocities. On the other hand, reduced friction also means lower holding forces when powered off.

Motorized actuators with built-in anti-rotation (non rotating tip) are easier to integrate and when used as pushers, do not generate torque or wear at the contact surface.

L-220 High Precision Actuators

Servo & Stepper Motors

13/26/52/77mm travel
0.1µm min. incremental motion
20nm sensor resolution
3.5mm/sec max. velocity
125N push/pull force
Nonrotating tip

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M-235 High Precision Actuators

Servo & Stepper Motors

20/50mm travel
0.1 & 0.5µm min. inc. motion
16 & 500nm sensor resolution
2.6 & 30mm/sec max. velocity
120 & 50N push/pull force
Nonrotating tip

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The L-239 is our highest load standard linear actuator. It can handle pushing forces of up to 66 lbs. The high-speed version reaches velocities of 2 inches/second.

Servo & Stepper Motors

52mm travel
0.2 & 0.1µm min. inc. motion
50nm sensor resolution
50 & 25mm/sec max. velocity
300N push/pull force
Nonrotating tip

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M-238 High Precision Actuators

Servo Motor / Linear Encoder

50mm travel
0.1µm min. inc. motion
0.1µm linear encoder
30mm/sec max. velocity
400N push/pull force
Nonrotating tip

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Velocity to 750mm/sec, to 20mm Travel, to 20N Force

Voice Coil Actuators are based on a single-phase electromagnetic linear motor similar to the driver of a loud-speaker. They provide high velocity with zero wear and motion ranges typically up to 1 inch. The V-273/5/7 high-speed, closed loop actuator family shown below come with a force sensor option, useful in applications such as switch testing or touch surface sensitivity analysis. The C-413 closed-loop controller allows on-the-fly switching between force and position mode.

V-273 Voice Coil Actuator

Force Sensor Option

20mm travel
10nm linear encoder resolution
100mm/sec max. velocity
6N push/pull force
1mN force sensor option

Details Buy Online Article Video

V-275 Voice Coil Actuator

High-Speed, Force Sensor Option

10mm travel
10nm linear encoder resolution
600mm/sec max. velocity
15N push/pull force
1mN force sensor option

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V-277 Voice Coil Actuator

High-Speed, Force Sensor Option

15mm travel
10nm linear encoder resolution
750mm/sec max. velocity
20N push/pull force
1mN force sensor option

V-308 Fast Nano Focus Voice Coil Scanner, 7mm

Voice Coil Scanner, 7mm

7mm motion
Voice coil linear motor
Adjustable Z-counterbalance
Millisecond settling time
1nm sensor resolution

Details Applications Optical Inspection

Zero Wear, Velocity to 1000mm/sec, to 25mm Travel, to 70N Force

These voice coil actuators uses frictionless bearings – either flexures for short travel, or air bearings for extremely straight guiding. Both drive and guiding systems are wear free and clean room compatible.

PIglide VC air bearing positioning stages are voice coil driven with fully preloaded air bearings and optical linear encoders. These stages are ideally suited for many high precision applications where long travels are not required, such as autofocus and scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. Optional bellows protect the bearing from contamination. Low moving mass means high accelerations and fast turnaround times.

For Fast Scanning/Autofocus

1” travel
Optional bellows
1nm resolution
8g max. acceleration

Details Article Video

Micro Linear Actuator

Zero-Wear Flexures

1.5mm travel
100nm linear encoder resolution
Frictionless, zero-wear flexures
Very compact: 32x44x14mm

Voice Coil / 3-Phase Linear Motor Drives

PI currently offers several types of long travel piezo linear motors and several types of short travel actuators such as flexure actuators, stack actuators, and bender actuators. The drive principle in piezo ceramic motors / actuators is intrinsically nonmagnetic and vacuum-compatible.

Piezo Motor Actuators
Stick-Slip Ratchet Type Piezo Motor Actuators (Screw Drives) are often used for set & forget type adjustments, replacing manual micrometers. They provide high resolution and holding forces, but low speed typically on the order of a few mm/minute.

Stick-Slip Direct-Drive Piezo Motor Actuators (Mini-Rod Drives) are compact ceramic linear motors with forces to 10N and speed to 10 mm/sec.

PiezoWalk® Linear Motors achieve holding forces to 800N and picometer range resolution; however they are more complex and typically used in high-end applications.

For more information on the differences between piezo motors and actuators and their applications, refer to the piezo motion tutorial.

Ultrasonic Piezo Motors are characterized by very high speed of 100's of mm/sec and a very compact design.

Information on vacuum compatible motorized actuators can be found here.

Set & Forget Applications, to 20nm Steps, to 22N Force

Piezo ratchet drives leverage the stick-slip effect to provide nanometric motion by turning a precision lead screw in very small increments. A special driver generates a quasi-saw tooth signal. PI offers open-loop and closed-loop piezo motor actuators.

N-472 PiezoMike Linear Actuator

Piezo Ratchet Drive

<1nm encoder resolution
¼” and 1/2” (13mm) motion range
Self-clamping: Holding force >100N
Pushing force 22N
Variety of mounting options

Details Buy Online Video

Piezo ratchet drives are a special form of inertia motors based on the stick-slip effect. A small piezo ceramic actuator embedded in a precision mechanism drives a high resolution screw. The drive principle relies on a quasi-saw tooth signal with a slow expansion phase and a fast contraction phase. This expansion leads to a small rotation of a high resolution lead screw (see animation). When the piezo element has reached its maximum expansion, a much shorter contraction phase follows – too fast for the screw to follow, because of its inertia.

Piezo Ratchet Drive

¼” to 1” (26mm) motion range
Self-clamping: Holding force >100N
Pushing force 22N
30 nanometer step size
Variety of mounting options

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N-470.V/U Vacuum PiezoMike

Piezo Ratchet Drive

¼” to 1” (26mm) motion range
Self-clamping: Holding force >100N
Pushing force 22N
20 nanometer step Size
Variety of mounting options

Application Example:
N-480 kinematic mirror mount with N-470 actuators

7N Force, Travel to 35mm, 5mm/sec

These actuators require some kind external position feedback – the inertia motors provide high resolution, but w/o an internal sensor exact position information is not provided. Unlike conventional stepper motors, the step size in piezo inetia motors is not equidistant.

Captive and Non-captive Versions
The N-422 is a non-captive design with the shaft running through the motor, providing longer travel. The N-412 is a captive design.

Compact Actuator

Direct Drive Piezo Inertia Motor

35mm travel
0.3µm step size
5mm/sec max. velocity
7N push/pull force
10N holding force

Details Article Video

Micro Linear Actuator

Direct Drive Piezo Inertia Motor

13mm travel
0.3µm step size
5mm/sec max. velocity
7N push/pull force
10N holding force

Details Article Video

N-412 PIShift linear actuators with a kinematic mirror mount for the adjustment of optics

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To 600N Force, Travel to 125mm, up to 10mm/sec

The operating principle of a PiezoWalk^® linear motor is similar to the principle of biological walking. Motion is generated through a succession of coordinated lift/forward/drop cycles of two or more “legs”. Each cycle can be controlled to provide steps from a few picometers to a few microns of linear motion. With repetition rates of up to 100’s of steps per second, continuous motion up to 15mm/sec can be achieved. These drives are preloaded, self-clamping and achieve exceptional life times. PI offers open-loop and closed-loop PiezoWalk motor actuators.

N-381 PiezoWalk® Linear Actuator

Manipulator, Piezo Stepper

30mm travel
0.03nm open loop resolution
10mm/sec max. velocity
10N push/pull force
20nm encoder integrated

N-331 V8 PiezoWalk® Actuator

V8 Drive: Higher Force & Speed

25 to 100mm travel
0.02nm open loop resolution
15mm/sec max. velocity
50N push/pull force
5nm encoder integrated

Details Article Video: Operating Principle Video: Control with Interferometer

N-310 PiezoWalk® Linear Actuator

Miniature OEM Actuator

31010 to 125mm travel
0.03nm open loop resolution
10mm/sec max. velocity
10N push/pull force
Use w/external position feedback

N-111 PiezoWalk® Linear Actuator

Medium Force, Encoder Option

10mm travel
0.03nm open loop resolution
1mm/sec max. velocity
50N push/pull force
5nm encoder integrated

Details Article Video

N-216 PiezoWalk® Linear Actuator

High Force, Encoder Option

20mm travel
0.03nm open loop resolution
1mm/sec max. velocity
600N push/pull force
5nm encoder integrated

Details Article Video

"Honey, I shrunk the V8 Engine!"

PI's PICMA-Walk V8 Piezo Linear Motor - Power, Reliable, Precise

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For Fast Step & Settle or Dynamic Scanning Applications, Sub-nm Resolution, up to 1mm Travel

Piezo flexure actuators provide friction free motion with sub-nm resolution and very fast response (millisecond and below).

Flexure-guided and motion-amplified piezo ceramic actuators provide longer displacement ranges compared to piezo stacks in a more compact package. They are designed with protective preloads and several types of integrated flexure-guiding mechanisms are feasible depending on the guiding precision required in the application.

300µm Motion, Flexure Guided

300µm travel
Cost-optimized for large quantities
Lightweight construction, only 4 grams
Flexure guided = Frictionless & straight motion
Small footprint of 13x20mm
PICMA® long-life piezo actuator
For OEM instrumentation

Details Article

P-601 Piezo Flexure Actuator

Closed-Loop Option

100, 250 and 400µm travel
Position sensor option for closed-loop operation
Flexure guided = Frictionless & straight motion
High dynamics and stiffness
PICMA® long-life piezo actuator

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P-602 Piezo Flexure Actuator

Motion to 1mm, High Force

Up to 1mm travel
Position sensor option for closed-loop operation
Flexure guided = Frictionless & straight motion
To 400N force, high stiffness & dynamics
PICMA® long-life piezo actuator

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P-603 Piezo Flexure Actuator

Motion to 500µm

100, 300 and 500µm travel
Position sensor option for closed-loop operation
Compact, cost-effective design
Flexure guided = Frictionless & straight motion
High dynamics and stiffness
PICMA® long-life piezo actuator

Details Article

P-853 Piezo-Micrometer

Piezo Flexure + Micrometer

Sub-nanometer resolution
18mm manual / 25µm fine motion
Combines piezo-flexure-class fine
Travel with manual micrometer
Dynamic operation to 10 Hz

Details Article

Forces to 30kN+, Sub-millisec Response, Sub-nm Resolution

These closed-loop actuators provide high forces, high stiffness, and very fast response in the sub-millisecond range, with displacement typically in the 100µm range.

Applications: Biotechnology, nano-dispensing, microfluidics, valve control, fast switching and nanopositioning, optics, medical-devices, life-sciences

Piezo Stack Actuators

Very high force & stiffness
Sub-millisec response
Many different designs
Sub-nanometer resolution
Learn more….

High performance precision linear actuators can be customized for force, speed, resolution and travel length to suit varying applications - like adjusting 798 quarter ton segments in the primary mirror of the Extremely Large Telescope (ELT) with nanometer accuracy in the extreme environment of the Chilean Atacama Desert, with a hybrid actuator design. More information