- OEM / SystemsOEM Systems | Precision Components | Automation Sub-SystemsPI offers 1000’s of proven, off-the-shelf precision motion products that can be quickly modified for the OEM or into a custom automation sub-system.
- Meeting the Demands of OEMsOEM Systems | Precision Components | Automation Sub-SystemsPI has a long track record of working with OEMs in the most demanding industries from Semiconductor Technology to Medical Design – industries where product performance, quality, and the ability to ramp up quickly are not the only parameters required to satisfy the customer's demands. Working with technology leaders all around the world forces you to continuously improve your yield, process, and product performance. And unless your quality is outstanding, you cannot become a key supplier to major US, European, and Japanese companies in the Optics, Photonics, Semiconductor, and Automotive industry.
- Engineered Motion / Automation Sub-SystemsPrecision Automation Solutions | Engineered SystemsPI is a supplier of high-end precision motion systems and makes use of own drive components and high-precision positioners to build customized positioning and automation sub-systems —“motion engines”—for our customers. With the largest portfolio of precision motion technologies in the industry, PI engineers have the best foundation to find a solution that matches your requirements in terms of precision, quality and budget – in a timeframe that works for you.
- Meeting the Demands of OEMs
- ProductsPrecision Motion Technologies | Positioning SystemsOverview of the Broadest & Deepest Portfolio of Precision Motion and Automation Technologies from Piezo to Air Bearings and Linear Motors
- Products: Overview, New, Finder, ShopFind Precision Positioning Solutions Quickly - Product Finder | PI USAWith thousands of standard products and customization available, PI has the motion control positioning product solution for your application.
- Products OverviewProducts OverviewOverview of the Broadest & Deepest Portfolio of Precision Motion and Automation Technologies from Piezo to Air Bearings and Linear Motors
- New ProductsNew Motion Control & Precision Positioning Products | PI USALearn about the latest innovations in motion control and nanopositioning components and systems.
- Product FinderUse the PI Product Finder - it's fast and easy!Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results. Select more than one filter at at time, for example, to find positioning stages designed for higher load capacity, too.
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- Products Overview
- Air Bearings & Ultra High Precision StagesAir Bearing Stages | Motorized | Linear | RotaryAir bearings provide advantages over mechanical bearings when vibration-free motion is required, highly constant velocity control is crucial, and when angular repeatability and geometric performance must be optimal. Air bearing stages (linear, rotary, and spherical) replace mechanical contact by a thin air film, avoiding wear, friction, vibration, and hysteresis effects.
- Miniature Positioning StagesMiniature Positioning Stages | Supplier | ManufacturerCompact positioning stages are crucial for the miniaturization process in cutting-edge research and industrial applications, for test & measurement, optical and opto-mechanical alignment, and component assembly. PI provides the largest portfolio of miniature stages, including high-speed linear motor stages, economical stepper motor units, and ultra-compact piezo motor positioners.
- Motorized Stages: Linear, Rotary, XYMotorized Stages | Positioning | ManufacturerPI offers the broadest and deepest range of precision motion technologies for micro and nano precision applications. Our engineers work with our customers to find the best drive and bearing technology for each individual application. Having access to multiple drive and positioning technologies allows an open discussion with a better outcome for the customer.
- Overview - Motorized Linear/Rotary StagesOverview - Motorized Linear/Rotary Stages
- Linear StagesLinear Stages - Precision Positioning Solutions | PI USASeveral types of motorized precision linear translation stages | PI USA
- Fast Linear Motor Stages and ActuatorsOverview: Linear Stage, Linear Motor Driven, Fast Brushless Motor Positioning Stages | PI USABrushless linear motor-driven stages provide high speed, precision and long life.
- Z-Stages (Vertical Motion)Vertical Linear Stages – Precision Motorized Z-Positioners | PI USA
- XY StagesXY Stages – 2-Axis Motorized Precision Positioning Stages | PI USASeveral types of planar XY stages: Direct-driven stages, ball-screw stages and air bearing planar XY stages
- XYZ StagesXYZ Stage - Multi-Axis Precision Motorized Stages
- Rotary Stages / GoniometersPrecision Rotation Stage, High Resolution Rotary Positioners, Rotation Tables, Goniometers, by PI USASeveral types of motorized rotation stages: Direct-driven stages, ball-bearing stages and air bearing stages
- Heavy Duty Stages / Industrial AutomationHigh Speed / Performance Positioning Stages for Automation - Linear Stages | Rotary Stages | PI USAHigh performance motorized stages, designed for heavy duty applications in industrial precison automation.
- Sub-Systems for AutomationSYS > Engineered Motion/Automation Sub-SystemsThe PI group employs over 1,200 people in 15 countries and runs engineering and manufacturing centers on 3 continents. Select from the broadest portfolio of precision motion technologies, including piezoelectric and air bearing systems, with 1,000’s of standard products or have our engineers provide you with a custom solution.
- Overview - Motorized Linear/Rotary Stages
- Linear ActuatorsActuators | Precision | Linear | Actuator SystemA precision linear actuator is a positioning device that provides motion in 1 degree of freedom. PI designs and manufactures a variety of precision linear actuators (pushers) including economical stepper-motor driven actuators, high-speed linear motor types for automation and nanometer precise piezo-motor actuators.
- Gantries / Cartesian RobotsGantry Stages | Gantries | Cartesian RobotA gantry precision positioning stage is sometimes called a linear robot or Cartesian robot. Gantries typically provide motion in 2 or 3 linear degrees of freedom (X-Y and X-Y-Z) and are often used for pick and place applications, 3D printing or laser machining, and welding applications.
- 6-Axis Hexapods / Parallel PositionersHexapod Positioner | Six DOF | Stewart PlatformsHexapod positioners are often referred to as Stewart Platforms. A hexapod is based on a 6-axis (XYZ, Pitch, Roll, Yaw) actuator system arranged in parallel between a top and bottom platform. PI parallel kinematics (PKM) precision positioning systems have many advantages over serial kinematics stages, such as lower inertia, improved dynamics, smaller package size and higher stiffness. In addition hexapods are more flexible than conventional 6 axis positioners.
- 6-Axis Hexapods / Parallel Positioners6-Axis Hexapods / Parallel Positioners
- Control of Hexapod / Stewart Platforms: Hexapod Motion Controllers & Simulation Software6DOF Motion Platforms | Hexapod Controllers & Simulation Software | Stewart Platform | ManufacturerControllers, software and accessories for Hexapod Stewart platforms and parallel kinematic motion systems | PI USA
- 6-Axis Hexapods / Parallel Positioners
- Piezo Flexure Nanopositioning StagesNanometer Precision: Piezo Stages for Nanopositioning, Piezo Nanopositioners, Piezo Flexure Scanning Stages | PI USAPI offers the broadest and deepest portfolio of nanometer precision motion technologies, from piezo-driven nanopositioning and scanning stages to motorized 6-axis hexapod positioning systems.
- Overview - Piezo Flexure StagesOverview - Piezo Flexure Stages
- Linear Piezo Flexure StagesLinear Piezo Stages for Nanopositioning – Flexure-Guided Precision NanoPositioners | PI USALargest selection of frictionless, high performance piezo-stack-driven flexure linear nanopositioning stages | PI USA
- Vertical & Tip/Tilt Piezo StagesPiezo Z-Stage, Piezo Z-Tip-Tilt Platform. Flexure Guided Nanopositioning Stages| PI USALarge selection of Piezo Z-Stages and Tip/Tilt scanners with nanometer precision | PI USA
- Fast Steering Mirrors & Tip/Tilt PlatformsPiezo Steering Mirrors | Active Optics
- Nanofocus Lens ScannersFast Piezo Focus Lens Positioners and Scanners – Piezo Flexure Guided Precision Positioners | PI USALargest Selection of Nano-Focus drives for microscope lenses – flexure-guided precision positioners
- XY Piezo Flexure StagesPiezo Stages | XY | Nanopositioning StagesLargest selection of integrated XY piezo flexure stages with nanometer precision.
- XYZ Piezo Flexure StagesXYZ Piezo Nanopositioning Stages – Flexure Guided 3-Axis Precision Positioners | PI USALargest selection of integrated XYZ piezo flexure stages with nanometer precision.
- 6-Axis Piezo Flexure Stages6-Axis Piezo Nanopositioning Stages – Flexure Guided Precision Positioners | PI USAPiezo-driven fast steering mirrors (FSM) achieve nanoradian resolution and high bandwidth.
- Tutorial - Piezo NanopositioningNanometer Precision: Nanopositioning Basics Tutorial. Piezo Nanopositioners, Scanning Stages, Flexure Guided Positioners | PI USAThere are several ways to achieve nanometer precision motion. The best positioning systems avoid friction all together, in both the drive system (motor) and in the guiding system (bearings). Frictionless bearings also avoid the bearing rumble caused by balls and rollers and provide vibration-free motion with highly constant velocity.
- Overview - Piezo Flexure Stages
- Piezo Motors: Stages & ActuatorsPiezo Motors | Linear Motor Positioners | ManufacturerPiezo Motors are intrinsically vacuum compatible, non-magnetic and self locking at rest, providing long travel compared to traditional piezo mechanisms. The individual drive concepts are optimized for different applications, they differ in their design, size, cost, force & speed and other performance parameters.
- Overview - Piezo Motors (Stages/Actuators)Overview - Piezo Motors (Stages/Actuators)
- Actuators with Piezo MotorsCompact precision linear actuators stages with several types of piezo motor drives – ultrasonic, stick-slip, piezo-walk, piezo-ratchet. | PI USA
- Linear Stages with Piezo MotorsPrecision linear stages with several types of piezo motor drives – ultrasonic, stick-slip, piezo-walk, piezo-ratchet. | PI USA
- XY Stages with Piezo MotorsXY piezo motor linear stages with several types of precision piezo motor drives – ultrasonic, stick-slip, piezo-walk | PI USA
- XY Piezo Flexure StagesXY Piezo Flexure StagesHigh-precision 2-axis nanopositioning systems integrate PICMA® piezo actuators for maximum reliability. Repeatable, drift-free positioning with optimal stability is possible by the use of high-quality nanometrology sensors.
- Rotary Stages with Piezo MotorsRotary piezo motor stages with several types of precision piezo motors– ultrasonic, stick-slip (inertia), | PI USA
- Tutorial - Piezo Motion ControlWhy All Piezo Motors are NOT Created Equal: The piezoelectric effect for precision motion control - PI Physik Instrumente.The demand for higher speed and/or precision in fields such as bio-nanotechnology, semiconductors, metrology, data comm, and photonics keep pushing manufacturers to come up with innovative drive technologies.
- Overview - Piezo Motors (Stages/Actuators)
- Piezo Transducers & ActuatorsPiezo Actuator | Piezo Transducer | ManufacturerPiezoelectric translators (transducers) are precision ceramic actuators which convert electrical energy directly into linear motion with high speed, force and virtually unlimited resolution. These actuators are used in every modern high tech field from semiconductor test & inspection to super-resolution microscopy, bio-nanotechnology and astronomy/aerospace technology.
- Piezo Actuators & Transducers: Stacks, Chips, Benders, Tubes, Spheres, Shear…Piezo Actuators & Transducers: Stacks, Chips, Benders, Tubes, Spheres, Shear…
- Value-Added Piezo Transducers & Piezo AssembliesValue Added Piezo Assemblies: Transducers, Actuators, Sensors, Manufactured by PI CeramicDeveloping and manufacturing piezo ceramic materials and components are complex processes. PI Ceramic - PI’s piezo material design and manufacturing facility - boasts several decades of experience as well as the right tools for rapid prototyping of custom engineered piezo components and assemblies. From the formulation of advanced piezo materials to the processing steps such as cutting, milling, grinding, and the precision assembly, every stage is controlled by our engineers and product specialists.
- Piezo Ceramic ComponentsPiezo Ceramic Components
- Piezo Actuators & Transducers: Stacks, Chips, Benders, Tubes, Spheres, Shear…
- Microscopy, Bio-Imaging, Life SciencesHigh Precision Microscope Stages, Piezo Lens Scanners, Tools for Bio-Imaging | PI-USAPiezo nano-positioning stages are essential tools for high-resolution microscopy, such as Super Resolution Microscopy or AFM. Their sub-atomic resolution and extremely fast response allow researchers to create higher-quality images faster. PI provides a large variety of fast Z-Stages and collar piezo objective positioners for 3D imaging (Z-stack acquisition), deconvolution, and fast focusing applications.
- Stages for Microscopy & Bio-ImagingStages for Microscopy & Bio-Imaging
- Applications: Life Sciences / MedicalPrecision motion control for medical engineering and life sciences applications | PI USA
- Stages for Microscopy & Bio-Imaging
- Photonics Alignment SolutionsActive Photonics Alignment | Optics Alignment | SolutionsPI provides a variety of innovative fiber alignment systems from motorized fiber positioners to automated optic and photonic alignment such as used in telecommunication, data commumication and for packaging / automation. In addition to fiber-based applications, fast steering systems for free-space-optical communication are also available. Products range from motorized 6D micromotion alignment systems for industrial photonics automation, through ultra-fast piezoelectric scanning & alignment modules to modular devices with manual control for laboratory test setups. All motorized systems come with extensive software for easy setup and integration.
- Vacuum Positioning Stages & ActuatorsVacuum / UHV Compatible Stages - Linear & Rotary Positioners for Vacuum, Wide Temperature Ranges | PI USAPI miCos has extensive experience in the design and manufacturing of vacuum and high vacuum compatible precision optomechanical positioning equipment for low temperature and wide temperature ranges. We provide translation stages, vertical linear stages, rotation stages, XY stages and complex multi-axis positioning systems in vacuum spec.
- VacuumProduct Series with Vacuum-Ready ItemsPI offers specific catalogue items for selected product series that are already suitable for high vacuum (HV) or ultra-high vacuum (UHV).
- Vacuum
- Controllers, Drivers, Motion SoftwareMotion Controllers, Piezo Drivers-High Voltage Amplifiers, and Motion Software Overview | PI USA
- Overview - Controllers & Motion SoftwareOverview - Controllers & Motion Software
- Piezo Controller, Driver, Nanopositioning Controller, High-Voltage Amplifier, Piezo Power Supply by PI USAPiezo Drivers | Piezo Motion Controllers | ManufacturerA piezo controller or driver is used to control the motion of a piezo positioning device. There are open and closed loop controllers. Open-loop controllers are often referred to as piezo driver or even piezo power supply. Closed-loop controllers are divided in two basic types: analog-servo and digital servo controllers.
- Controllers/Drivers for Motorized StagesMotion Controller | Drivers | Positioning SystemsPI provides a large variety of hardware & software solutions for high precision motion control. Our portfolio spans from integrated compact single axis servo controllers / drivers, such as popular Mercury-class motion controllers, to complex multi-axis systems for parallel-kinematics positioners, such as hexapods.
- ACS Motion ControlACS Motion Control for Industrial AutomationWe recommend the controllers of our partner, ACS Motion Control especially for automation with industrial standards. Ask us about your integrated solution!
- Software - Motion Control SoftwareMotion Control Software | Software Tools | Positioning SolutionsFor LabView, C++, VB, Matlab, Image Acquisitiong Packages, NI DAC Cards, ..... PI provides high-level, robust, easy-to-use software tools for fast, seamless integration of motion systems into application control software.
- Overview - Controllers & Motion Software
- Capacitive SensorsNanometer Resolution: Capacitance Sensors for Nano-Measuring, Nano-Metrology | PIA capacitive sensor is a proximity sensor that detects nearby objects by their effect on the electrical field created by the sensor.
- Accessories: Plates, Brackets, CablesAdapters and Cables for PI Precision Motion ComponentsStandardization is common with adapter plates and brackets, but we can create a custom accessory to fit your application system. PI products ship with the required cables. Customization is always an option.
- Products: Overview, New, Finder, Shop
- Tech BlogPI Blog / Tech Articles on Advancements in Precision Motion Control, Automation and Piezo Technology | PI USAPI’s tech blog offers 50 years of insight into innovative applications of precision motion control, nanopositioning, and micropositioning in industry, science, and research. We hope the PI blog is an enjoyable and informative resource, and a starting-point for innovation across disciplines.
- Resources
PI – Resources – Papers, Videos, ISO9001, Service, DownloadsFind Tech Articles, Videos, Papers, Brochures, Software Information, ISO9001 Certificates and more.- Ask an Engineer (direct email request)Ask an Engineer (direct email request)
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- Catalogs & BrochuresDownload Catalogs on Precision Motion Control and Nanopositioning ProductsFind brochures and catalogs for download.
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- Metric Tolerances & Thread PitchMetric Tolerances & Thread PitchView metric tolerances and thread pitch classifications
- Motion Control SoftwareMotion Control SoftwarePI provides high-level, robust, easy-to-use motion control software tools for fast, seamless integration of motion systems into application control software. Supported programming languages and applications include LabView, C++, VB, Matlab, Image Acquisitioning Packages, NI DAC Cards, ...
- News & EventsNews & EventsFind PI press releases, enews, and tradeshow exhibit schedule where you can get free advice from a PI Engineer.
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- Tech BlogTech BlogPI’s tech blog offers over 40 years of insight into innovative applications of precision motion control, nanopositioning, and micropositioning in industry, science, and research. We hope the PI blog is an enjoyable and informative resource, and a starting-point for innovation across disciplines.
- Technical Papers / WhitepapersTechnotes & Whitepapers / Application Articles: Piezo / Micro- / Nanopositioning Motion Control: Technical Research PaperPI precision motion and positioning solutions have helped customers in many industrial fields and research laboratories to achieve their goals faster. Feel free to download the papers below.
- Videos & AnimationsVideos on Motion Control and Positioning Technologies | PI USAWatch videos, animations and practical applications of PI products, systems, components
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Technologies and Applications for Precision Motion Components and Sub-Systems | PI USAPI products are often used at the cutting edge of technology. They solve critical motion problems in lithography, microscopy, astronomy, laser technology, photonics and semiconductor manufacturing on locations around the world and in places as remote as the Science Lab on the Mars Rover.- News/Events
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About PI USA: Custom design & service / export controlled applications & ITAR RegisteredPI (Physik Instrumente) provides the broadest and deepest portfolio of precision motion technologies in the world. PI USA complies with the US laws for export controlled technologies.- AboutAbout PI USA / Custom design & service / export controlled applications & ITAR RegisteredPI (Physik Instrumente) provides the broadest and deepest portfolio of precision motion technologies in the world. PI USA complies with the US laws for export controlled technologies.
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A precision linear actuator is a positioning device that provides motion in 1 degree of freedom. PI designs and manufactures a variety of precision actuators (pushers) including economical stepper-motor driven actuators, high-speed linear motor types for automation and nanometer precise piezo-motor actuators.
While there are many different types of precision actuators, piezoelectric actuators are the first choice when accuracy, speed, responsiveness, and resolution are essential.
Precision Lead Screw Captive Actuators, Stepper & Servo Motor-Driven
<0.1µm Resolution to 50mm Travel, ~1mm/sec
Classical captive motorized actuators with servo and stepper motors are typically combinations of a rotation-type motor and a screw-type actuator.
Lead-screws provide high forces and self locking capabilities, while ball screws are used for higher speed applications with longer service life. Position feedback is available with linear encoders and motor shaft mounted rotary encoders.
Smaller motors are often equipped with gear heads to provide higher torque and resolution, however at the cost of speed.
Actuators with built-in anti-rotation (non rotating tip) are easier to integrate and when used as pushers, do not generate torque or wear at the contact surface.
Show moreM-230 High Precision Actuator
Servo & Stepper Motors
- 10 and 25mm travel
- 0.05µm min. incremental motion
- 4nm sensor resolution
- 1.2 mm/sec max. velocity
- 70N push/pull force
- Nonrotating tip
Show moreM-232 Servo Motor Actuator
Compact, Servo & Stepper
- 17mm travel
- 0.1µm min. incremental motion
- 7nm sensor resolution
- 1.5 mm/sec max. velocity
- 40N push/pull force
Show moreM-227 High Precision Actuator
Servo & Stepper Motors
- 10, 25, 50mm travel
- 0.05µm min. incremental motion
- 4nm sensor resolution
- 0.75mm/sec max. velocity
- 40N push/pull force
- Nonrotating tip
- Requires external limit switches
Low Cost Lead Screw Captive Actuators, Stepper Motor-Driven
To 25mm Travel, 1µm Resolution, to 5mm/sec
Show moreM-228/9 Low Cost Linear Actuators
Gear & Direct Drive, Stepper
- 10 and 25mm travel
- 1µm min. incremental motion
- 1.5 and 5mm/sec max. velocity
- 20/50/80N push/pull force
Precision Ball Screw Motorized Actuators Servo & Stepper Motor-Driven
To 0.1µm Resolution, Low Friction, To 50mm/sec, Forces to 400N
Recirculating ball screws (RBS) provide lower friction and higher velocity than lead screws by replacing sliding friction with rolling friction. Lower friction also means less heat generation when operated at high duty cycles and high velocities. On the other hand, reduced friction also means lower holding forces when powered off.
Motorized actuators with built-in anti-rotation (non rotating tip) are easier to integrate and when used as pushers, do not generate torque or wear at the contact surface.
Show moreL-220 High Precision Actuators
Servo & Stepper Motors
- 13/26/52/77mm travel
- 0.1µm min. incremental motion
- 20nm sensor resolution
- 3.5mm/sec max. velocity
- 125N push/pull force
- Nonrotating tip
Show moreM-235 High Precision Actuators
Servo & Stepper Motors
- 20/50mm travel
- 0.1 & 0.5µm min. inc. motion
- 16 & 500nm sensor resolution
- 2.6 & 30mm/sec max. velocity
- 120 & 50N push/pull force
- Nonrotating tip
Show moreL-239 High Precision Actuators
Servo & Stepper Motors
- 52mm travel
- 0.2 & 0.1µm min. inc. motion
- 50nm sensor resolution
- 50 & 25mm/sec max. velocity
- 300N push/pull force
- Nonrotating tip
Show moreM-238 High Precision Actuators
Servo Motor / Linear Encoder
- 50mm travel
- 0.1µm min. inc. motion
- 0.1µm linear encoder
- 30mm/sec max. velocity
- 400N push/pull force
- Nonrotating tip
Fast Voice Coil Actuators with Mechanical Bearings
Velocity to 750mm/sec, to 20mm Travel, to 20N Force
Voice Coil Actuators are based on a single-phase electromagnetic linear motor similar to the driver of a loud-speaker. They provide high velocity with zero wear and motion ranges typically up to 1 inch. The V-273/5/7 family actuators below come with a force sensor option, useful in applications such as switch testing or touch surface sensitivity analysis. The C-413 controller allows on-the-fly switching between force and position mode.
Show moreV-273 Voice Coil Actuator
Force Sensor Option
- 20mm travel
- 10nm linear encoder resolution
- 100mm/sec max. velocity
- 6N push/pull force
- 1mN force sensor option
Show moreV-275 Voice Coil Actuator
High-Speed, Force Sensor Option
- 10mm travel
- 10nm linear encoder resolution
- 600mm/sec max. velocity
- 15N push/pull force
- 1mN force sensor option
Show moreV-277 Voice Coil Actuator
High-Speed, Force Sensor Option
- 15mm travel
- 10nm linear encoder resolution
- 750mm/sec max. velocity
- 20N push/pull force
- 1mN force sensor option
Show moreNano-Focusing Stage, Voice Coil Drive
High-Speed Z-Stage
- Standard & custom
- >5mm travel
- >25mm/sec max. velocity
- <300nm repeatability
- <3µm accuracy
- Payload >500g
Fast Voice Coil Actuators with Frictionless Air Bearings / Flexures
Zero Wear, Velocity to 1000mm/sec, to 25mm Travel, to 70N Force
These voice coil actuators uses frictionless bearings – either flexures for short travel, or air bearings for extremely straight guiding. Both drive and guiding systems are wear free and clean room compatible.
Show moreA-131 Voice Coil Positioner
For Fast Scanning/Autofocus
- 1” travel
- Optional bellows
- 1nm resolution
- 8g max. acceleration
Show moreV-900KPIC Mini Vertical Actuator
Zero-Wear Flexures
- 1.5mm travel
- 100nm linear encoder resolution
- Frictionless, zero-wear flexures
- Very compact: 32x44x14mm
PI currently offers several types of long travel piezo linear motors and several types of short travel actuators such as flexure actuators, stack actuators, and bender actuators. The drive principle in piezo ceramic motors / actuators is intrinsically nonmagnetic and vacuum-compatible.
Piezo Motor Actuators
Stick-Slip Ratchet Type Piezo Motor Actuators (Screw Drives) are often used for set & forget type adjustments, replacing manual micrometers. They provide high resolution and holding forces, but low speed typically on the order of a few mm/minute.Stick-Slip Direct-Drive Piezo Motor Actuators (Mini-Rod Drives) are compact ceramic linear motors with forces to 10N and speed to 10 mm/sec.
PiezoWalk® Linear Motors achieve holding forces to 800N and picometer range resolution; however they are more complex and typically used in high-end applications.
For more information on the differences between piezo motors and actuators and their applications, refer to the piezo motion tutorial.
Ultrasonic Piezo Motors are characterized by very high speed of 100's of mm/sec and a very compact design.
Information on vacuum compatible motorized actuators can be found here.
Compact, Low Cost Piezo Ratchet Motor Actuators (Micrometer Replacement)
Set & Forget Applications, to 20nm Steps, to 22N Force
Show moreN-472 Closed-Loop PiezoMike
Piezo Ratchet Drive
- <1nm encoder resolution
- ¼” and 1/2” (13mm) motion range
- Self-clamping: Holding force >100N
- Pushing force 22N
- Variety of mounting options
Show moreN-470 PiezoMike Micrometer
Piezo Ratchet Drive
- ¼” to 1” (26mm) motion range
- Self-clamping: Holding force >100N
- Pushing force 22N
- 30 nanometer step size
- Variety of mounting options
Show moreN-470.V/U Vacuum PiezoMike
Piezo Ratchet Drive
- ¼” to 1” (26mm) motion range
- Self-clamping: Holding force >100N
- Pushing force 22N
- 20 nanometer step Size
- Variety of mounting options
Application Example:
N-480 kinematic mirror mount with N-470 actuatorsThese actuators require some kind external position feedback – the inertia motors provide high resolution, but w/o an internal sensor exact position information is not provided. Unlike conventional stepper motors, the step size in piezo inetia motors is not equidistant.
Captive and Non-captive Versions
The N-422 is a non-captive design with the shaft running through the motor, providing longer travel. The N-412 is a captive design.Show moreN-422 OEM Piezo Motor Actuator
Direct Drive Piezo Inertia Motor
- 35mm travel
- 0.3µm step size
- 5mm/sec max. velocity
- 7N push/pull force
- 10N holding force
Show moreN-412 Piezo Motor Actuato
Direct Drive Piezo Inertia Motor
- 13mm travel
- 0.3µm step size
- 5mm/sec max. velocity
- 7N push/pull force
- 10N holding force
The operating principle of a PiezoWalk® linear motor is similar to the principle of biological walking. Motion is generated through a succession of coordinated lift/forward/drop cycles of two or more “legs”. Each cycle can be controlled to provide steps from a few picometers to a few microns of linear motion. With repetition rates of up to 100’s of steps per second, continuous motion up to 15mm/sec can be achieved. These drives are preloaded, self-clamping and achieve exceptional life times.
Show moreN-381 PiezoWalk® Linear Actuator
Manipulator, Piezo Stepper
- 30mm travel
- 0.03nm open loop resolution
- 10mm/sec max. velocity
- 10N push/pull force
- 20nm encoder integrated
Show moreN-331 V8 PiezoWalk® Actuator
V8 Drive: Higher Force & Speed
- 25 to 100mm travel
- 0.02nm open loop resolution
- 15mm/sec max. velocity
- 50N push/pull force
- 5nm encoder integrated
Show moreN-310 PiezoWalk® Linear Actuator
Miniature OEM Actuator
- 31010 to 125mm travel
- 0.03nm open loop resolution
- 10mm/sec max. velocity
- 10N push/pull force
- Use w/external position feedback
Show moreN-111 PiezoWalk® Linear Actuator
Medium Force, Encoder Option
- 10mm travel
- 0.03nm open loop resolution
- 1mm/sec max. velocity
- 50N push/pull force
- 5nm encoder integrated
Show moreN-216 PiezoWalk® Linear Actuator
High Force, Encoder Option
- 20mm travel
- 0.03nm open loop resolution
- 1mm/sec max. velocity
- 600N push/pull force
- 5nm encoder integrated
Ultra-High Resolution Piezo Flexure / Micrometer Actuators & Flexure Actuators
For Fast Step & Settle or Dynamic Scanning Applications, Sub-nm Resolution, up to 1mm Travel
Show moreP-853 Piezo-Micrometer
Piezo Flexure + Micrometer
- Sub-nanometer resolution
- 18mm manual / 25µm fine motion
- Combines piezo-flexure-class fine
- Travel with manual micrometer
- Dynamic operation to 10 Hz
Show moreP-601 Piezo Flexure Actuator
Closed-Loop Option
- 100, 250 and 400µm travel
- Position sensor option for closed-loop operation
- Flexure guided = Frictionless & straight motion
- High dynamics and stiffness
- PICMA® long-life piezo actuator
Show moreP-602 Piezo Flexure Actuator
Motion to 1mm, High Force
- Up to 1mm travel
- Position sensor option for closed-loop operation
- Flexure guided = Frictionless & straight motion
- To 400N force, high stiffness & dynamics
- PICMA® long-life piezo actuator
Show moreP-603 Piezo Flexure Actuator
Motion to 500µm
- 100, 300 and 500µm travel
- Position sensor option for closed-loop operation
- Compact, cost-effective design
- Flexure guided = Frictionless & straight motion
- High dynamics and stiffness
- PICMA® long-life piezo actuator
Show moreP-604 Low-Cost, Piezo Flexure Actuator
300µm Motion, Flexure Guided
- 300µm travel
- Cost-optimized for large quantities
- Lightweight construction, only 4 grams
- Flexure guided = Frictionless & straight motion
- Small footprint of 13x20mm
- PICMA® long-life piezo actuator
- For OEM instrumentation
Ultra-High Resolution Piezo Stack Actuators (Short Travel 15 to 180µm)
Forces to 30kN+, Sub-millisec Response, Sub-nm Resolution
Piezo stack actuators provide high forces, high stiffness, and very fast response in the sub-millisecond range, with displacement typically in the 100µm range.
Applications: Biotechnology, nano-dispensing, microfluidics, valve control, fast switching and nanopositioning, optics, medical-devices, life-sciences
Show morePiezo Stack Actuators
- Very high force & stiffness
- Sub-millisec response
- Many different designs
- Sub-nanometer resolution
- Learn more….
Precision actuators can be customized for force, speed, resolution and travel length to suit varying applications - like adjusting 798 quarter ton segments in the primary mirror of the Extremely Large Telescope (ELT) with nanometer accuracy in the extreme environment of the Chilean Atacama Desert, with a hybrid actuator design. More information
- Resources