Hexapod Precision Motion Platforms & 6 Axis Parallel Positioners

Hexapod 6-axis parallel positioners are often referred to as Stewart Platforms. A hexapod is based on a 6-axis (XYZ, Pitch, Roll, Yaw) actuator system arranged in parallel between a top and bottom platform. PI's parallel kinematics (PKM) precision positioning systems have many advantages over conventional serial kinematics stages, including lower inertia, improved dynamics, smaller package size and higher stiffness. The user-programmable pivot point – integral to PI hexapod motion controllers provides additional benefits, especially in alignment applications of lenses, optics and fiber optic components.  Watch short pivot-point demo video 

Hexapod TECH BLOG

Hexapod Videos

 

With three decades of Hexapod design and manufacturing experience, PI electro-mechanical hexapods and piezo hexapod positioners are the most advanced multi- axis precision positioning systems in the world, providing significantly higher precision than hydraulically driven systems. They are available in many sizes, and configurations for loads from 2 kg to more than 2000 kg, and most are self locking.

In addition to classical "Stewart Platform" type hexapods, PI also offers alternative parallel positioners, such as the SpaceFAB 6DOF Motion Platform design, which allows for longer linear travel ranges with a lower profile.

Hexapod FAQs

 

Controller and Software
PI hexapods are operated by dedicated, state-of-the-art vector motion controllers with virtual pivot point capability. An extensive software package including alignment algorithms e.g. for fiber optics etc, as well as simulation tools are included.

More information on hexapod controllers and software

 

Vacuum and Atmospheric Version
Many of our hexapods and parallel positioners are available in vacuum versions, some for UHV levels to 10-9 Torr.

 

High-Speed / Dynamics Hexapod Platforms for Motion & Vibration Simulation
PI provides several solutions, with brushless motors and voice-coil linear motor direct drives. Watch video of highly dynamic, linear-motor hexapod platform

 

 

Choose from a Product Group below, or scroll to see all Product Groups

Miniature Hexapods with Electromagnetic Motors and Precision Screw Drives

The H-811 miniature hexapod strikes a perfect balance of size, load and performance. It has many applications in micro-assembly, silicon photonics alignment and also comes in a high-dynamics version for image stabilization. A vacuum-compatible version to 10-6 hPa is also available. The H-810 is similar, with a smaller base plate diameter.

Special Systems for Photonics Alignment
For fiber alignment and photonics alignment, a special
F-712.HU1 system based on the H-811 is also available.

H-811 Miniature Hexapod
Show more

H-811 Miniature Hexapod

Brushless DC Motors

  • 34x32x13mm XYZ travel
  • 20x20x41° rotary travel
  • 5kg load
  • 5nm actuator resolution
  • 20mm/sec max. velocity
  • Ø136mm base, 114mm height
H-810 Miniature Hexapod
Show more

H-810 Miniature Hexapod

Smallest Hexapod w/ BLDC Motors

  • 40x40x13mm XYZ travel
  • 20x20x60° rotary travel
  • 5kg load
  • 40nm actuator resolution
  • 2.5mm/sec max. velocity
  • Ø100mm base, 118mm height
H-811.S High Dynamics Hexapod
Show more

H-811.S High Dynamics Hexapod

Motion Simulation / Stabilization

  • CIPA certified for camera testing
  • Dynamics to 25Hz / 0.1°
  • 25mm/sec
  • 80nm actuator resolution
  • Controller with wave generator
  • Ø136mm base, 114mm height

Sub-Miniaturized and Miniaturized 6-Axis Platforms with Piezo Motor Drives

Low Profile Parallel/Serial Kinematics Systems
These 6 axis positioning systems are based on three XY linear stages, with integrated linear encoders, driven by piezo linear motors. The three stage pairs actuate a tripod, in a way to provide highly precise motion in all 6 degrees of freedom. The Q-821 and Q-845 models are driven by inertia piezo motors, the N-865 low profile version uses a higher force PiezoWalk motor.


N-865 High End Version
N-865 is based on the higher performing PiezoWalk drives and high-end PIone linear encoders. These special encoders manufactured by PI have been tested to provide resolution down to the picometer range. With an extremely high pitch grid period of only 0.5µm, and a read head based on a Mach-Zehnder interferometer, they can deliver exceptional linearity.

Q-821 Sub-Mini 6-Axis Platform
Show more

Q-821 Sub-Mini 6-Axis Platform

Ultra-Compact, Piezo Inertia Motors

  • 12x12x6mm XYZ travel
  • 12x12x33° rotary travel
  • 0.2kg load
  • 1nm sensor resolution
  • 5mm/sec max. velocity
  • Ø80mm base, 48mm height
Q-845 Miniature 6-Axis Platform
Show more

Q-845 Miniature 6-Axis Platform

Compact, Piezo Inertia Motors

  • 14x14x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1kg load
  • 1nm sensor resolution
  • 5mm/sec max. velocity
  • Ø174mm base, 77mm height
N-865 Ultra-Precise 6-Axis Platform
Show more

N-865 Ultra-Precise 6-Axis Platform

2nm Min. Incremental Motion

  • 13x13x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1.5kg load
  • <0.5nm sensor resolution
  • 5mm/sec max. velocity
  • For ultra-precision requirements

Mid Size / Mid Load Hexapods

Up to 30kg (66lb)

Most of these hexapods are available with brushless motors for long life operation.  Some provide absolute measuring encoders – no referencing required after power up.  The H-824 and H-825 models use a folded drive train for reduced height. The H-206 uses frictionless and backlash-free flexure joints.

H-824 Compact Hexapod
Show more

H-824 Compact Hexapod

Low Cost, Low Profile

  • 45x45x25mm XYZ travel
  • 15x15x25° rotary travel
  • 10kg & 5kg load
  • 7nm & 500nm actuator resolution
  • 1mm/sec & 25mm/sec max. velocity
  • Ø281mm base, 190mm height
H-825 Compact Hexapod
Show more

H-825 Compact Hexapod

BLDC Motors, Absolute Encoders

  • 55x50x28mm XYZ travel
  • 23x28x38° rotary travel
  • 30kg & 5kg load
  • 8nm & 250nm actuator resolution
  • 2mm/sec & 20mm/sec max. velocity
  • Ø281mm base, 190mm height
H-840 Hexapod w/Absolute Encoder
Show more

H-840 Hexapod w/Absolute Encoder

BLDC, High Dynamics Version

  • 100x100x50mm XYZ travel
  • 30x30x60° rotary travel
  • 30kg & 10kg load
  • 8nm & 250nm actuator resolution
  • 2mm/sec & 60mm/sec max. velocity
  • Ø348mm base, 328mm height
H-820 Low-Cost Hexapod
Show more

H-820 Low-Cost Hexapod

BLDC Motors

  • 100x100x50mm XYZ travel
  • 30x30x60° rotary travel
  • 20kg load
  • 200nm actuator resolution
  • 20mm/sec max. velocity
  • Ø350mm base, 308mm height
H-206 Fiber Alignment Hexapod
Show more

H-206 Fiber Alignment Hexapod

Flexure Joints for Zero Backlash

  • Up to 13mm linear travel
  • Up to 13° rotary travel
  • 1.5kg load
  • 33nm actuator resolution
  • 8mm/sec max. velocity
  • 220x228mm base, 158mm height

High Load Hexapods

250kg to 1000kg (550lb to 2200lb)

These hexapods are designed for standard loads up to 1000kg (higher load custom versions can also be offered). Despite the high load capacity, they deliver sub-micron resolution. PI’s special cardanic joints with Z-offset provide the highest stiffness and best orientation-independent performance. Learn more here.

H-850 250kg Hexapod
Show more

H-850 250kg Hexapod

Gear & Direct Drive, BLDC

  • 100x100x50mm XYZ travel
  • 30x30x60° rotary travel
  • 250kg & 50kg load
  • 2nm & 50nm actuator resolution
  • .5mm/sec & 8mm/sec max. velocity
  • Ø348mm base, 328mm height
H-855 500kg Hexapod Family
Show more

H-855 500kg Hexapod Family

Self Locking to 5000N

  • 20 to 150mm linear travel
  • 20 to 70° rotary travel
  • 260 to 500kg load
  • 2.8 to 25mm/sec max. velocity
  • Ø450mm base, 380mm height
H-845 1000kg Hexapod
Show more

H-845 1000kg Hexapod

6 Different Models

  • To 340x340x210mm XYZ travel
  • To 40x40x60° rotary travel
  • To 1000kg load
  • 40nm actuator resolution
  • 20 to 50mm/sec max. velocity
  • Ø750mm base, 663mm height

High Dynamics Hexapods / Motion Hexapods

For 6-Axis Motion Simulation, Image Stabilization

Highest Dynamics
The H-860 is designed for highest acceleration. Its frictionless design is based on voice coil drives, flexure guides and carbon fiber struts for minimized mass and inertia – ideal for image stabilization / simulation applications.

Smallest Size
The H-811 is a CIPA certified miniature hexapod with brushless motors and ball screw struts.

Highest Load
The H-900KSCO is designed for high loads in precision industrial automation, machine tools, automotive manufacturing, and simulation of motion on vessels.

H-860 Fast “Shaker Hexapod”
Show more

H-860 Fast “Shaker Hexapod”

Voice Coils, Flexures, Carbon Fiber

  • 15mm XYZ travel
  • 8° rotary travel
  • 1kg load
  • 5nm actuator resolution
  • 250mm/sec / 4g acceleration
  • Frictionless flexure guides
H-811.S High Dynamics Hexapod
Show more

H-811.S High Dynamics Hexapod

Motion Simulation / Stabilization

  • CIPA certified for camera testing
  • Dynamics to 25Hz / 0.1°
  • 25mm/sec
  • 80nm actuator resolution
  • Controller with wave generator
  • Ø136mm base, 114mm height
H-900KSCO Dynamics Hexapod
Show more

H-900KSCO Dynamics Hexapod

60kg, 80mm/sec BLDC

  • 200x200x170mm XYZ travel
  • 66x66x66° rotary travel
  • 60kg load
  • 580nm actuator resolution
  • 80mm/sec max. velocity
  • Motion simulation: ISO20672, ISO8728, ISO 16328

Custom Hexapods

These custom hexapods show the enormous bandwidth of PI‘s design capabilities.

M-850KWAH Astronomy Hexapod
Show more

M-850KWAH Astronomy Hexapod

Weather-Resistant, Ø420mm Apt.

  • 20x22x32mm XYZ travel
  • 75kg load, any orientation
  • Rubber boots
  • IP64 level protection
  • Ø580mm base, 357mm height
  • 400x400x200mm XYZ travel
  • 40x40x10° rotary travel  
  • 1000kg load, any orientation
  • 0.8µm / 0.5µrad resolution
  • 1mm/sec max. velocity
  • Ø900mm base, 714mm height
M-850.K102 High Load Hexapod
Show more

M-850.K102 High Load Hexapod

Vacuum Compatible, 1000kg

  • 24x24x24mm XYZ travel
  • 6x6x8° rotary travel  
  • 1000kg load
  • 2µm repeatability
  • .5mm/sec max. velocity
  • Ø1000mm base, 500mm height
H-850KMLx 500kg Hexapod
Show more

H-850KMLx 500kg Hexapod

Self Locking to 4000N

  • 100x10x50mm XYZ travel
  • 30x30x60° rotary travel
  • 500kg load
  • Absolute encoder option
  • .5mm/sec max. velocity
  • Ø410mm base, 362mm height
M-850KLAH Large Aperture Hexapod
Show more

M-850KLAH Large Aperture Hexapod

640x820mm Aperture

  • 50x50x50mm XYZ travel
  • 10x10x10° rotary travel
  • 200kg load
  • 2mm/sec max. velocity
  • 1000x840x400mm
P-911KNMV UHV Hexapod
Show more

P-911KNMV UHV Hexapod

Piezo Motor, Non Magnetic

  • 3x3x3mm XYZ travel
  • 2x2x2° rotary travel
  • UHV-compatible to 10-9 hPa
  • 1.5kg load
  • Ø100mm base, 90mm height

Piezo Flexure Hexapods / 6-Axis Nanopositioning Stages, Short Travel

These piezo-stack driven systems provide faster response than conventional stages, in the low millisecond range, however with positioning ranges limited to <1mm. The P-915KWEF can be used in combination with motorized stages to correct for geometrical errors in 6 degrees of freedom in real-time.

P-587 and P-562 are flexure guided, piezo driven stages with capacitive feedback for application, such as ultra-resolution microscopy and optical lithography, etc.

This miniature hexapod was designed for dynamic error correction in all degrees of freedom. It can be added or integrated into long travel positioning systems to improve motion accuracy limited by guiding errors or external forces, such as those found in machining processes.   Due to its very stiff design with piezo direct drives and capacitance direct metrology feedback, it is capable of delivering repeatable motion with the identical dynamics and accuracy in all linear and rotary axes and with its sophisticated vector controller can run high-precision trajectories with the very high dynamics.
Show more

P-915KWEF Piezo Hexapod

Direct Drive, Stiff, Ultra-Fast

  • 70µm XYZ travel
  • 0.08x0.08x0.08° rotary travel
  • 0.2nm repeatability
  • Up to 1.7kHz resonant frequency
  • Ø135mm base, 50mm height
P-587 Nano-Positioning Stage
Show more

P-587 Nano-Positioning Stage

6-Axis, Parallel Metrology

  • 800x800x200µm XYZ travel
  • 1x1x1mrad rotary Travel
  • Flexure guided
  • 0.7nm sensor resolution
  • Up to 235Hz resonant frequency
  • 240x240x50mm
P-562 Nano-Positioning Stage
Show more

P-562 Nano-Positioning Stage

6-Axis, Parallel Metrology

  • 200x200x200µm XYZ travel
  • 1x1x1mrad rotary travel
  • Flexure guided
  • 1nm sensor resolution
  • Up to 190Hz resonant frequency
  • 150x150x30mm, 66mm Aperture

Hexapod Controllers / 6 Axis Controllers / Accessories

  • Coordinate transformation built-in
  • Vector algorithms
  • Extensive software support
  • Programmable pivot point
  • User-defined coordinate system
  • 2 add‘l motor outputs
  • Optional analog input
C-886 For Piezo Inertia Drives
Show more

C-886 For Piezo Inertia Drives

Modular, for Q-821 and Q-845

  • Coordinate transformation built-in
  • Vector algorithms
  • Extensive software support
  • Programmable pivot point
  • User-defined coordinate system
  • 2 additional motor outputs
E-712 6-Axis Piezo Controller Family
Show more

E-712 6-Axis Piezo Controller Family

For N-865, P-587, P-915KWEF

  • Coordinate transformation built-in
  • Modular design
  • For capacitive sensors and incremental sensors
  • For direct drives and PiezoWalk motors
C-887.MC Manual Control Unit
Show more

C-887.MC Manual Control Unit

For C-887 Hexapod Controllers

  • 1 knob per Cartesian axis
  • LCD display for all Cartesian axes
  • Programmable step size

Software Tools: Simulation / Collision Avoidance