Integrated XY stages (often wrongly called planar XY stages) can be manufactured with a lower profile, because the central plate serves both as the moving top plate of the lower axis and bottom plate of the upper axes. Integrated XY stages typically have a square footprint and the wider base for the bearings reduces the above-mentioned geometric errors caused by the cantilever effect. Like stacked linear stages, they do remain within their own neutral position footprint.
The same type of bearings (crossed roller bearings, recirculating ball bearings, etc.) and drive mechanisms (lead screws, ball screws, linear motors) are available as with stacked linear stages.
If motion outside the XY table footprint is not acceptable and / or the highest geometric performance is required, planar XY stages are available. Planar XY stages are usually based on air bearings, magnetic levitation or – very popular for short travel ranges – flexure guides.