Direct Drive Rotary Stages & Worm Gear Rotation Stages / Goniometers | Motorized, High Performance

Different Direct Drive Principles with 3-Phase and Piezo-Electric Motors

High Performance Rotation Stages for Industry and Research
The PI Group provides a variety of direct drive rotation stages and worm-gear driven goniometers and rotary stages, designed for a large spectrum of automation and research applications. High speed, high performance rotation stages are equipped with 3-phase electromagnetic motors and mechanical bearings or air bearings – for frictionless and maintenance free operation with the highest accuracy and geometric precision. Our extensive knowledge in the design and manufacture of highly precise rotation stages and multi-axis positioning systems has helped many customers solve precision motion control problems in variety of applications, including optical metrology, precision automation, beamline instrumentation, fiber-optical alignment, semiconductor inspection, bio-medical instrumentation, and X-ray crystallography.

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The advantage of working with PI is the access to a large variety of different drive and guiding technologies.

Highest performance is guaranteed through the complete control of the design and machining process, the selection of components and assembly. Our air-bearing rotary stage selection is the most accurate in the industry with minimized eccentricity and wobble, while providing the highest repeatability and accuracy. A variety of motors and drive principles are available from stepper-motor driven worm gear designs to direct drive closed-loop torque motors. Low profile piezo motor stages provide self-locking capabilities with zero jitter, drift and no holding current at rest. 

Miniature Rotation Stages with Mechanical Bearings, Worm Gears and Servo / Stepper Motors

DT-34 Small Rotation Stage
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DT-34 Small Rotation Stage

Worm Gear, Servo & Stepper

  • 10mm aperture, 20mm turn table
  • 700µrad min. inc. motion
  • 195-675°/sec max. velocity
  • 1.5kg load 
RS-40 Small Rotation Stage
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RS-40 Small Rotation Stage

Worm Gear, Servo & Stepper

  • 20mm aperture, 34mm turn table
  • 87µrad min. inc. motion
  • 7°/sec max. velocity
  • 2kg load 
DT-80 Small Rotation Stage
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DT-80 Small Rotation Stage

Worm Gear, Servo & Stepper

  • 40mm aperture, 64mm turn table
  • 70µrad min. inc. motion
  • 40°/sec max. velocity
  • 2kg load 

Rotation Stages with Mechanical Bearings, Worm Gears and Servo / Stepper Motors

L-611 Precision Rotary Stage
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L-611 Precision Rotary Stage

Worm Gear, Servo / Stepper

  • 35mm aperture, 80mm turn table
  • 0.7µrad min. inc. motion
  • 50-200°/sec max. velocity
  • 10kg load
  • Direct encoder option
PRS-200 Precision Rotary Stage
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PRS-200 Precision Rotary Stage

Worm Gear, Servo / Stepper

  • 120mm aperture, 200mm turn table
  • 0.5 – 8.7µrad min. inc. motion
  • 35-75°/sec max. velocity
  • 50kg load
  • Direct encoder option
M-060/1/2 Precision Rotary Stage
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M-060/1/2 Precision Rotary Stage

Worm Gear, Servo / Stepper

  • 20/35/45mm aperture, 60/100/120mm turn table
  • 5 – 32µrad min. inc. motion
  • 7.5-90°/sec max. velocity
  • 50kg load
  • Rotary encoder 

Direct Drive Rotation Stages with High Performance Torque Motors for High Speed. Direct Metrology Closed-Loop Encoder. Mechanical Bearings.

V-610 High Precision Rotation Stage
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V-610 High Precision Rotation Stage

Direct Drive, Direct Encoder

  • 25mm aperture, 100mm turn table
  • 27µrad min. inc. motion
  • 540°/sec max. velocity
  • 2kg load
  • Torque motor, sine/cosine encoder
  • Optional brake
V-611 High Precision Rotation Stage
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V-611 High Precision Rotation Stage

Direct Drive, Absolute Encoder Option

  • 35mm aperture, 100mm turn table
  • 1µrad min. inc. motion
  • 2880°/sec max. velocity
  • 10kg load
  • Torque motor
  • Sine/cosine or absolute encoder

Direct Drive Rotation Stages, Ultra-High Precision Air Bearings. High Performance Direct Drive Torque Motor, Direct Metrology Closed-Loop Encoder

The PIglide RM series of motorized rotary air bearing stages are a complete positioning solution designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation. These stages feature high performance, low-cogging frameless slotless torque motors, and optical encoders. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RM stages offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” or drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life.
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A-621 - A-627 Air Bearing Rotary Stages

Direct Drive, High Load

  • 2/4/6/12” table diameter
  • 13 to 420kg load
  • 0.008µrad max. resolution
  • 40 to 100nm flatness
  • 500 to 2500 RPM max.
A-635/37 PIglide Rotary Stages
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A-634 – A-638 Air Bearing Rotary Stages

Low Profile, Large Diameter

  • 6/8/12/14” table diameter
  • 20/32/60/120kg load capacity
  • 0.03µrad max. resolution
  • <100nm eccentricity & flatness
  • 500  RPM max.
  • Self-locking option at rest
Rotary Air Bearing Stage with Aperture
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A-688 Air Bearing Rotary Stage

Large Clear Aperture

  • ⌀260mm clear aperture
  • 77kg load capacity
  • 0.0015µrad max. resolution
  • 500 RPM max.
  • Flatness/Eccentricity <175/300nm
  • Wobble:  < 1µrad
  • Direct drive
Z-Tip-Tilt Air Bearing Stage
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A-523 Z-Tip-Tilt Air Bearing Stage

Low Profile

  • ⌀250mm table
  • 8 kg load capacity
  • 5mm Z-stroke, to 2° tip/tilt
  • 10nm/0.06µrad incremental motion
  • 1nm sensor resolution
  • 5mm x 5mm x 2° Travel
  • 40mm height, ø200mm
  • Air Bearings & Voice Coils
  • Parallel Kinematics
  • Lock-down Capable
  • 6-DOF Option

Non-motorized Rotary Air Bearings

he PIglide RT series of non-motorized passive rotary air bearings are designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation and are easy to integrate with motors and encoders for complete positioning solutions. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RT series bearings offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” o r drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life.   An optional high resolution optical encoder can be added to allow precision table angle recording during manual operation. Applications include parts inspection, optical alignment and drag torque measurement.
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A-601 – A-607 Rotary Air Bearings

Non Motorized, Encoder Options

  • Ideal for optics testing
  • 2/3/4/6/8/12” table diameter
  • 13 to 420kg axial load
  • 5 to 270kg radial load
  • 75 to 300nm eccentricity
  • Optional high resolution encoder
The PIglide HB series spherical air bearing enables unique positioning and simulation applications in both research and industrial fields. These bearings provide excellent load capacity and stiffness while allowing three axes of inherently frictionless rotational motion. Commonly used for zero-g satellite research, spherical bearings are also used in systems for precision chip bonding and optical alignment. Extremely rigid spindles can be made using a spherical bearing at each end of the spindle shaft. This arrangement also allows precision alignment of the spindle shaft on the fly by moving one spherical bearing relative to the other.
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A-651 - A-657 Spherical Air Bearings

3 Degrees of Freedom

  • Ideal for zero gravity simulation
  • 2/3/4/6/8/10/12” sphere diameter
  • 15 to 635kg load
  • ±45 degrees rotation range

Direct-Drive Rotation Stages, Ultrasonic Motor, Low Profile, Self Locking Drive, Wide Dynamic Range, Direct Metrology Encoder

U-651 Low Profile Ultrasonic Motor Stage
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U-651 Low Profile Ultrasonic Motor Stage

Direct Drive, Direct Encoder

  • 36mm aperture, 110mm turn table, 14mm height
  • 12-27µrad min. inc. motion
  • 540°/sec max. velocity
  • 2kg load
  • Ultrasonic motor, self locking
U-628 Miniature Ultrasonic Motor Stage
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U-628 Miniature Ultrasonic Motor Stage

Direct Drive, Direct Encoder

  • 7mm aperture, 50mm turn table, 19mm height
  • 51µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.5kg load
  • Ultrasonic motor, self locking
U-624 Miniature Ultrasonic Motor Stage
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U-624 Miniature Ultrasonic Motor Stage

Direct Drive, Direct Encoder

  • 28.5mm turn Table, 12mm height
  • 105µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.1kg load
  • Ultrasonic motor, self locking
The U-622 is the smallest brother of the U-624 and U-628 rotary stages. It provides highly dynamic motion and excellent position stability due to its direct-driven piezoceramic ring-shaped motor with self-locking properties. Very quiet operation with velocity up to 720°/sec.
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U-622 Miniature Ultrasonic Motor Stage

Direct Drive, Direct Encoder

  • 18.5mm turn table, 10mm height
  • 525µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.03kg load
  • Ultrasonic motor, self locking

Sub-Miniature Rotation Stages with Piezo Inertia Motor, Self Locking

Q-632 Q-Motion® Miniature Rotation Stage
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Q-632 Q-Motion® Miniature Rotation Stage

Inertia Motor, Direct Encoder

  • 30mm turn table, 10mm height
  • 3µrad min. inc. motion
  • 45°/sec max. velocity
  • 0.1kg load
  • Piezo inertia motor, self locking

Goniometer Cradle Stages with Mechanical Bearings, Worm Gears and Servo / Stepper Motors

WT-90 Motorized Precision Goniometer
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WT-90 Motorized Precision Goniometer

Servo / Stepper, 8kg Load

  • 90° rotation range
  • 2.7 - 50µrad min. inc. motion
  • 10 - 15°/sec max. velocity
  • 8kg load
  • Direct encoder option
WT-120 Motorized Precision Goniometer
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WT-120 Motorized Precision Goniometer

Servo / Stepper, 20kg Load

  • 90° rotation range
  • 17.5 - 70µrad min. inc. motion
  • 25 - 30°/sec max. velocity
  • 20kg load
  • Direct encoder option
WT-85 Motorized Precision Goniometer
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WT-85 Motorized Precision Goniometer

Aperture, Servo / Stepper

  • 10° rotation range
  • 2 - 17.5µrad min. inc. motion
  • 7 - 15°/sec max. velocity
  • 2kg load
  • 30mm aperture
  • Direct encoder option
WT-100 Motorized Precision Goniometer
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WT-100 Motorized Precision Goniometer

Aperture, Servo / Stepper

  • 10° rotation range
  • 8.7 - 17µrad min. inc. motion
  • 7-15°/sec max. velocity
  • 2kg load
  • 50mm aperture
  • Direct encoder option