Integrated Spectrum of Precision Technologies – Standard & Custom
In addition to integrating and networking standard components, the challenging specifications required customized developments, such as an oval hexapod 6-axis parallel positioner, with 6 additional measuring legs for the highest levels of precision.
The detector stage is a custom kinematic motion system capable of moving payload of larger than 100kg in 3 DoF with less than 500nm resolution.
During experiments, the sample is fixed on top of the center stage. For sample characterization, it is essentially important to achieve the highest positioning stability in space.
Tomography Mode: Sphere of Confusion as Small as 85 Nanometers
When operated in “Tomography Mode” the samples point of interest stays inside a spherical space with the diameter of 85 nanometers while the rotation stage turns over 360-degrees.