This system has been built with a pneumatic counterbalance that supports the gravity load of the Theta stage and the user payload, so that the Z axis stage motor does not need to lift the payload against gravity; it only needs to overcome the inertia. Without such a counterbalance, the Z stage motor would overheat.
The counterbalance system features an auto-calibration control algorithm. The system, when active, will automatically detect the payload applied to the Z-Theta stage and compensate accordingly. There are no manual user adjustments required to accommodate varying payload masses.
- Sample payload: Up to 10 kg; limited to 1 kg if XY stage option is used
- Z Travel: 200mm
- (Optional) XY Travel: 26x26mm
- Z Position Accuracy, Repeatability: ±200nm, ±50nm
- Theta Axis Error Motion Axial, Radial, Wobble: 50nm, 100nm, 1.5µrad
Details of System Components: