Vacuum Precision Positioning Stages & Actuators

Vacuum Optomechanical Positioning Systems:
Things to Consider

Catalog: 2015 Beamline Instrumentation

Whitepaper: Motion Control and Precision Positioning in Vacuum Environments

UHV Positioning Blog

 

PI miCos has extensive experience in the design and manufacturing of vacuum and high vacuum compatible precision optomechanical positioning equipment for low temperature and wide temperature ranges. We provide translation stages, vertical linear stages, rotation stages, XY stages and complex multi-axis positioning systems in vacuum spec.

Vacuum applications are increasingly more important for many fields of research and industrial manufacturing. PI miCos supplies positioning components and systems for vacuum levels from 10-3 mbar to 10-9 mbar (see conversion to Torr below). When we design standard products for ambient, we already plan for vacuum adaptability, which is why we can offer a broad range of vacuum compatible systems. In addition to components, PI miCos also offers complete turnkey system solutions for vacuum.

 

 

Wide Temperature Range / Low Temperature / Cryogenic Applications

PI miCos not only specializes in vacuum compatible optomech positioning equipment but also stages that can be operated in a wide temperature range such as -40C° to +150C°.

When we look at the required vacuum modifications / preparations we start at the application. For the coating of optics different vacuum levels are necessary as for X-ray crystallography for example. The absolute vacuum pressure is often less critical than the partial pressure of hydrocarbons. The use of plastics in encoders, cables, limit switches or lubricants with the wrong specifications can result in the excessive contamination of surfaces with hydrocarbons. UV laser light can break down hydrocarbons and destroy optics. Experience in the choosing the right of materials and handling processes is critical for delivering a solution that will satisfy the requirements of the individual application.

Vacuum Compatible Piezo Positioning Systems PDF Datasheet

Preparation 

Many PI miCos stages can be prepared for FV, HV and ultra high vacuum. For UHV all components are made for 10-9 mbar. Special UHV motors, grease, cables, and coatings are used.

Vacuum Definition / Units
Vacuum is defined as pressure lower than nomal atmospherical air pressure. PI miCos specifies vacuum products in mbar (millibar).

1 mbar ∼ 0.75 Torr.
1 mbar = 100 Pa 

Considerations for Vacuum Operation When stages are used in vacuum please consider the following:

  • Low speed operation, max. motor speed 10 revolutions/sec
  • For UHV w/o lubrication: max motor speed 2 revolutions/sec
  • Stages can only be run in vacuum or flowbox
  • Stages are delivered with test plugs, not designed for vacuum (see vacuum options)
  • Outbakeing temperature for High Vacuum 80°C
  • Outbakeing temperature for Ultra High Vacuum +125°C ∼ 235°C


Prefered materials for vacuum & cryogenic positioning systems by PI miCos
Stainless steel; Titanium; Bronze; Aluminium; Ceramic; Sapphiere; Viton; Teflon; PEEK; Kapton; Macor

Inititial operation / test in atmospheric conditions:
PI miCos supplies vacuum-prepared stages with test connectors for ambient pressure. These cannot be used in vacuum! The connectors have to be removed and replaced by a vacuum compatible connector by the customer. Vacuum feedthroughs, connectors and other accessories are available from PI miCos.

Vacuum Precision Positioning Stages & Actuators

Ultra-High-Vacuum Rotation Stage
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Ultra-High-Vacuum Rotation Stage

With High Precision

  • Reproducibility to 0.0002 deg (bidirectional)
  • Payload to 50 kg
  • Optional high resolution encoder
  • Clear aperture up to 120 millimeters
Vacuum Compatible Motorized Z Stage ES-100
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Vacuum Compatible Motorized Z Stage ES-100

  • Vacuum compatible to 10-6 torr
  • ½" and 1" travel
  • Repeatability to 0.05µm
  • 5.5kg load capacity
  • Integrated limit switches
  • Center mounted linear scale optional
High-Vacuum Positioning Table LS-110-UHV
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High-Vacuum Positioning Table LS-110-UHV

  • Unidirectional position reproducibility to ±0.05 microns
  • Payload to 10kg
  • Precision limit switches
  • Available linear scale encoder (center-mount)
High-Vacuum Precision Positioning Table PLS-85-HV
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High-Vacuum Precision Positioning Table PLS-85-HV

  • Unidirectional position reproducibility to ±0.05 microns
  • Payload to 10kg
  • Precision limit switches
  • Available linear scale encoder
High-Vacuum Micropositioning Stage MTS-65 HV
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High-Vacuum Micropositioning Stage MTS-65 HV

  • Unidirectional position reproducibility to ±0.1 microns
  • Payload to 2kg
  • Precision limit switches
  • Available linear scale encoder
Ultra-High-Vacuum Positioning Table VT-80-FV-HV-UHV
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Ultra-High-Vacuum Positioning Table VT-80-FV-HV-UHV

  • Unidirectional position reproducibility to ±0.2 microns
  • Payload to 5kg
  • Precision limit switches