Vaccum / UHV Compatible Stages - Linear & Rotary Positioners for Vacuum, Wide Temperature Ranges

Learn more about Standard Optomech Stages (atmospheric)

Catalog: 2015 Beamline Instrumentation

Whitepaper: Motion Control and Precision Positioning in Vacuum Environments

PI miCos has extensive experience in the design and manufacturing of vacuum and high vacuum compatible precision optomechanical positioning equipment for low temperature and wide temperature ranges. We provide translation stages, vertical linear stages, rotation stages, XY stages and complex multi-axis positioning systems in vacuum spec.

Vacuum applications are increasingly more important for many fields of research and industrial manufacturing. PI miCos supplies positioning components and systems for vacuum levels from 10-3 mbar to 10-9 mbar (see conversion to Torr below). When we design standard products for ambient, we already plan for vacuum adaptability, which is why we can offer a broad range of vacuum compatible systems. In addition to components, PI miCos also offers complete turnkey system solutions for vacuum.

PI miCos not only specializes in vacuum compatible optomech positioning equipment but also stages that can be operated in a wide temperature range such as -40C° to +150C°.

When we look at the required vacuum modifications / preparations we start at the application. For the coating of optics different vacuum levels are necessary as for X-ray crystallography for example. The absolute vacuum pressure is often less critical than the partial pressure of hydrocarbons. The use of plastics in encoders, cables, limit switches or lubricants with the wrong specifications can result in the excessive contamination of surfaces with hydrocarbons. UV laser light can break down hydrocarbons and destroy optics. Experience in the choosing the right of materials and handling processes is critical for delivering a solution that will satisfy the requirements of the individual application.

Vacuum Compatible Piezo Positioning Systems PDF Datasheet

Preparation

Many PI miCos stages can be prepared for FV, HV and ultra high vacuum. For UHV all components are made for 10-9 mbar. Special UHV motors, grease, cables, and coatings are used.

Vacuum Definition / Units
Vacuum is defined as pressure lower than nomal atmospherical air pressure. PI miCos specifies vacuum products in mbar (millibar).

1 mbar ∼ 0.75 Torr.
1 mbar = 100 Pa

Considerations for Vacuum Operation When stages are used in vacuum please consider the following:

Low speed operation, max. motor speed 10 revolutions/sec
For UHV w/o lubrication: max motor speed 2 revolutions/sec
Stages can only be run in vacuum or flowbox
Stages are delivered with test plugs, not designed for vacuum (see vacuum options)
Outbakeing temperature for High Vacuum 80°C
Outbakeing temperature for Ultra High Vacuum +125°C ∼ 235°C

Prefered materials for vacuum & cryogenic positioning systems by PI miCos
Stainless steel; Titanium; Bronze; Aluminium; Ceramic; Sapphiere; Viton; Teflon; PEEK; Kapton; Macor

Inititial operation / test in atmospheric conditions:
PI miCos supplies vacuum-prepared stages with test connectors for ambient pressure. These cannot be used in vacuum! The connectors have to be removed and replaced by a vacuum compatible connector by the customer. Vacuum feedthroughs, connectors and other accessories are available from PI miCos.