Linear Motor Stages - High Speed & High Precision - Linear Motor Actuators

Linear motors based on electrodynamic (magnetic) direct drives provide high speed and acceleration over large travel ranges. Due to the lack of friction, very good resolution and repeatability is feasible and the lifetime of the motor is not limited by wear and tear. Linear motor stages are often used in industrial automation applications where throughput and speed are crucial. PI linear motor stages are available with ironless (no cogging) and ironcore (higher force) 3-phase motors and voice coil drives (shorter travel ranges). Optical linear incremental encoders or optical linear absolute encoders are integrated to provide position feedback. Mechanical bearings and air bearings for ultra-high precision applications are available.

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When the highest geometrical performance is required, linear motor stages with air bearings are recommended.

Read article on performance of linear motor stages.

Voice-Coil Linear Motor Actuators with Mechanical Bearings and Flexure Guides

V-273 Voice Coil Actuator
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V-273 Voice Coil Actuator

Force Sensor Option

  • 20mm travel
  • 10nm linear encoder resolution
  • 100mm/sec max. velocity
  • 6N push/pull force
  • 1mN force sensor option
V-277 Voice Coil Actuator
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V-277 Voice Coil Actuator

High-Speed, Force Sensor Option

  • 15mm travel
  • 10nm linear encoder resolution
  • 750mm/sec max. velocity
  • 20N push/pull force
  • 1mN force sensor option
V-900KPIC Mini Vertical Actuator
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V-900KPIC Mini Vertical Actuator

Zero-Wear Flexures

  • 1.5mm travel
  • 100nm linear encoder resolution
  • Frictionless, zero-wear flexures
  • Very compact: 32x44x14mm

Small and Medium Sized Linear Motor Stages

V-408 Low Cost Linear Motor Stage
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V-408 Low Cost Linear Motor Stage

Compact, High Force

  • 25 and 50mm travel
  • 20nm min. incremental motion
  • 10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force
V-522/4/8 Voice Coil Stage
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V-522/4/8 Voice Coil Stage

Ideal for Scanning

  • 5/10/25mm travel
  • 20nm min. incremental motion
  • 10nm linear encoder resolution
  • 10’s of Hz scanning frequency
  • 4N push/pull force
V-508 Linear Motor Stage
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V-508 Linear Motor Stage

Compact, High End Sensor Option

  • 80/170/250mm travel
  • 1 to 20nm min. inc. motion
  • 0.2-10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force

Linear Motor Stages up to 1m Travel, Load to 450N, Speed up to 2m/sec

V-551 Linear Motor Stage
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V-551 Linear Motor Stage

Absolute Encoder Option

  • 60/130/230mm travel
  • 0.5 to 2nm min. incremental motion
  • 0.2 to 1nm linear encoder res.
  • 0.5m/sec max. velocity
  • 180N push/pull force
V-412 High Speed Linear Stage
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V-412 High Speed Linear Stage

Linear Motor 400N Load

  • 102 - 610mm (4”-24”) travel
  • 5nm to 10nm min. inc. motion
  • 1nm encoder res.
  • 2m/sec max. velocity
  • 151N peak force
  • Absolute encoder option
V-417 High Speed Linear Stage
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V-417 High Speed Linear Stage

Linear Motor, 450N Load

  • 102 - 813mm (4”-32”) travel
  • 5nm to 10nm min. inc. motion
  • 1nm encoder res.
  • 2m/sec max. velocity
  • 300N peak force
  • Absolute encoder option
LMS-180 Linear Motor Stage
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LMS-180 Linear Motor Stage

Long Travel to 508mm

  • 155/205/305/408/508mm travel
  • 40nm min. incremental motion
  • 15nm linear encoder res.
  • 0.5m/sec max. velocity
  • 150N push/pull force
LMS-270 Linear Motor Stage
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LMS-270 Linear Motor Stage

Long Travel to 1m

  • 300/500/800/1000mm travel
  • 50nm min. incremental motion
  • 15nm linear encoder res.
  • 0.8m/sec max. velocity
  • 480N push/pull force

Ultra-High Precision Stages with Linear Motors and Air Bearings

The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra-precision in a miniature package. The combination of non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. This stage is ideally suited for many high precision applications, such as metrology, photonics alignment, optics positioning, and scanning. The non-contact design also makes these stages ideal for cleanroom applications. There are no moving electrical cables to manage. The air bearing offers a locking design for the ultimate in position stability.
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A-141 Miniature Air Bearing Stage

Ultra-Compact Air Bearing Stage

  • 40mm travel
  • 3.5kg load
  • 20nm resolution
  • 57x83mm table; 38mm height
  • 0.25m/sec max. velocity
  • 0.35g max. acceleration
PIglide LC air bearing positioning stages are linear servo motor driven with fully preloaded air bearings and optical linear encoders. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor, flat panel display and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications.
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A-110 PIglide Air Bearing Stage

Affordable Design, Travel to 16”

  • 2/4/8/12/16” travel
  • 10kg load
  • 1nm resolution, abs/enc option
  • 160x200mm table; 60mm height
  • 1m/sec max. velocity
  • 3g max. acceleration
The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. A high-force linear motor can drive the stage to top speed within a few milliseconds, and the large capacity bearings can support payloads up to 35 kg. The laterally opposed, actively preloaded air bearing design in this model will support normal, vertical, and side-mounted orientations.
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A-123 PIglide Air Bearing Stage

Large, Travel to 30”

  • 2/4/6/10/14/20/30” travel
  • 10kg load
  • 1nm resolution, abs/enc option
  • 210x210mm table; 85mm height
  • 1m/sec max. velocity
  • 3g max. acceleration
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Video: Precision Automation Drive Principles

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