- Compact design: Surface 44 × 44 mm
- Travel range 120 µm
- Resolution to 0.2 nm
- Particularly inexpensive systems (mechanics and controller)
- Outstanding lifetime due to PICMA® piezo actuators
- Z stage, XY, XZ, and XYZ versions available
Fields of application
- Test applications
- Semiconductor technology
- Fiber positioning
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Product Change Notification Piezo Actuator Driven Products
User Manual PZ253
P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor
Unpacking Instructions P611T0006
Unpacking and Handling of P-611 Positioners
Short Instructions PZ240
Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
P-611.1x 3-D model
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