A-110 PIglide LC Linear Stage with Air Bearings

Inexpensive High Performance Nanopositioning Stage

  • Ideal for scanning applications or high-precision positioning
  • Cleanroom compatible
  • Size of the motion platform 160 mm × 200 mm
  • Travel ranges to 400 mm
  • Load capacity to 100 N
A-110 PIglide LC Linear Stage with Air Bearings
Product Description Specifications Downloads Quote / Order

Product overview

PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and friction-free motion for the highest accuracy and reliability

Accessories and options

  • Encoder
  • PIglide filter and air preparation kits
  • Single and multi-axis motion controller
  • XY setups and individual configurations
  • Base plates made of granite and systems for reducing vibration

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet

Datasheet A-110

Version / Date
2021-07-07
pdf - 1 MB
Version / Date
2021-07-07
pdf - 1 MB
Version / Date
2018-08-15
pdf - 850 KB

Downloads

Datasheet

Datasheet

Datasheet A-110

Version / Date
2021-07-07
pdf - 1 MB
Version / Date
2021-07-07
pdf - 1 MB
Version / Date
2018-08-15
pdf - 850 KB

Documentation

Documentation

User Manual A110D0001

A-110 PIglide LC Linear Air Bearing Stages

Version / Date
2021-05-11
pdf - 1 MB
English

3-D Models

3-D Models

A-110 3-D model

zip - 9 MB

White Paper

White Paper

Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI

Version / Date
WP4003 2015-09
pdf - 3 MB
English

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

A-110.050A1

PIglide LC linear stage, air bearings, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

A-110.050B1

PIglide LC linear stage, air bearings, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

A-110.100A1

PIglide LC linear stage, air bearings, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

A-110.100B1

PIglide LC linear stage, air bearings, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

A-110.200A1

PIglide LC linear stage, air bearings, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

A-110.200B1

PIglide LC linear stage, air bearings, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

A-110.300A1

PIglide LC linear stage, air bearings, 300 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

A-110.300B1

PIglide LC linear stage, air bearings, 300 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

A-110.400A1

PIglide LC linear stage, air bearings, 400 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

A-110.400B1

PIglide LC linear stage, air bearings, 400 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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