A-311 PIglide IS Planar Scanner with Air Bearing

High-Performance, Compact XY Nanopositioning System

  • Ideal for scanning applications or high-precision positioning
  • Cleanroom compatible
  • Travel ranges to 300 mm × 400 mm
  • Load capacity to 147 N
  • Low profile
  • Resolution to 1 nm
A-311 PIglide IS Planar Scanner with Air Bearing
Product Description Specifications Downloads Quote / Order

Product overview

The high-precision PIglide IS XY planar scanner with air bearing has a flat design and is an alternative to the stacked XY stages. The efficient, compact design saves space in machines with limited installation space.

PIMag® magnetic direct drive

3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Operation with digital controllers from leading manufacturers offers advanced control algorithms for improving the dynamics and error compensation.

Accessories and options

  • Encoder
  • PIglide filter and air preparation kit
  • Multi-axis motion controller and direct drives
  • Machine bases
  • Base plates made of granite and systems for reducing vibration

Application fields

PIglide positioning systems are ideally suited for high-precision applications, such as inspection systems, laser marking, microscopy or scanning.

Specifications

Datasheet

Datasheet A-311

Version / Date
2023-11-17
pdf - 2 MB
Version / Date
2023-11-17
pdf - 2 MB
Version / Date
2018-08-16
pdf - 800 KB

Downloads

Datasheet

Datasheet

Datasheet A-311

Version / Date
2023-11-17
pdf - 2 MB
Version / Date
2023-11-17
pdf - 2 MB
Version / Date
2018-08-16
pdf - 800 KB

Documentation

Documentation

User Manual A311D0002

A-311.FXx/.GXx PIglide: XY Planar Scanner with Air Bearings

Version / Date
2.0 2021-11-11
pdf - 955 KB
English
Documentation

User Manual A311D0001

A-311 PIglide IS: Planar XY Air Bearing Stage

Version / Date
1.5 2019-01-28
pdf - 1 MB
English

3-D Models

3-D Models

3-D model A-311

Version / Date
2021-11-12
zip - 15 MB

White Paper

White Paper

Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI

Version / Date
WP4003 2015-09
pdf - 3 MB
English

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

A-311.DA1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 50 mm × 50 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-311.DB1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 50 mm × 50 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-311.AA1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 100 mm × 100 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-311.AB1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 100 mm × 100 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-311.BA1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 150 mm × 150 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-311.BB1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 150 mm × 150 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-311.CA1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 200 mm × 200 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

A-311.CB1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 200 mm × 200 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-311.FB1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 300 mm × 300 mm travel range (X × Y); 147 N load capacity; 1000 mm/s × 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

A-311.GB1

PIglide IS planar scanner with air bearing; ironless 3-phase linear motor; 300 mm × 400 mm travel range (X × Y); 147 N load capacity; 1000 mm/s × 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

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