In the case of a beamline, the radiation that is created in certain parts of [the] storage ring is used to perform various experiments in different test setups. The purpose of this system is spectroscopic analysis of material samples, such as ultra-thin layers for the semiconductor industry. In addition, it is intended for medical research to examine highly diluted biological samples.
Q: What is the operating principle?
A: The incident synchrotron or x-ray radiation is focused on to the sample and x-ray lens. The sample in turn emits light in the x-ray range. The spectrometer examines the light according to wavelength and intensity [and] this enables us to find out more about the material composition of the sample.
Q: What is the requirement of a system? It has six degrees-of-freedom, can move in all six axes, why exactly is this necessary?
A: Various points on the sample surfaces need to be illuminated from different angles, but because the sample is coupled to the vacuum chamber, it is necessary to position it in six degrees of freedom initially. The x-ray lens is also coupled to the vacuum chamber mechanically. That’s why a second parallel kinematic machine (hexapod) is necessary to position the x-ray lens in the chamber so that it always remains at the same place with respect to the incident x-ray beam.