P-620.1 – P-629.1 PIHera Piezo Linear Precision Positioner

Variable Travel Ranges and Axis Configuration

  • Travel ranges 50 to 1800 µm
  • Resolution to 0.1 nm
  • Linearity error 0.02 %
  • X, XY, Z versions; XYZ combination possible
  • Vacuum-compatible versions to 10-9 hPa
P-620.1 – P-629.1 PIHera Piezo Linear Precision Positioner
Product Description Specifications Downloads Quote / Order

Application fields

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology
  • Photonics
  • Fiber positioning

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

Datasheet

Datasheet P-620.1 – P-629.1

Version / Date
2018-04-16
pdf - 2 MB
Version / Date
2018-04-13
pdf - 2 MB
Version / Date
2018-06-06
pdf - 891 KB
Version / Date
2018-06-08
pdf - 969 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date
2021-04-19
pdf - 377 KB
English

Datasheet

Datasheet

Datasheet P-620.1 – P-629.1

Version / Date
2018-04-16
pdf - 2 MB
Version / Date
2018-04-13
pdf - 2 MB
Version / Date
2018-06-06
pdf - 891 KB
Version / Date
2018-06-08
pdf - 969 KB

Documentation

Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date
6.1.0 10/2019
pdf - 1 MB
Version / Date
6.1.0 10/2019
pdf - 1 MB
Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

Version / Date
1.3.0 2021-11-03
pdf - 3 MB
Version / Date
1.3.0 2021-11-03
pdf - 3 MB

3-D Models

3-D Models

P-62x.1 STEP

Version / Date
---
zip - 954 KB

Success Story

Success Story

Optical 3D Surface Measuring Technology

Accurate Profile Reproduction of the Finest Structures Thanks to Piezo Technology and Confocal Technology. Author: Gernot Hamann

Version / Date
pi1135E
pdf - 709 KB
Version / Date
pi1135D
pdf - 709 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Versions with D-sub connector (m)

Versions with LEMO connector

Linear positioners without position sensor

Linear positioners, vacuum compatible to 10-9 hPa

Compatible Electronics Compatible Accessories Related Products