Miniature Positioning Stages / Linear & Rotary Stages

Compact positioning stages are crucial for the miniaturization process in cutting-edge research and industrial applications, for test & measurement, optical and opto-mechanical alignment, and component assembly. PI provides the largest portfolio of miniature stages, including high-speed linear motor stages, economical stepper motor units, and ultra-compact piezo motor positioners.


These highly engineered mini positioners are available in different sizes and motion ranges. Open and closed-loop versions with precision ranges from 1 micron to sub-nanometer resolution are offered. The selection includes linear and rotary stages in single and multi-axis combinations, for ambient and vacuum environments, custom designs and non-magnetic units are also available.

The smallest motorized stages offered are the finger-tip-sized, inertia motor-driven Q-Motion positioners. For the highest performance, the flexure guided PIhera series is recommended.

Custom Stages for OEMs: Since one design can NOT fit all applications, please contact a PI engineer and they will work with you on the best standard or custom solution for your motion application.

Choose from a Product Group below, or scroll to see all Product Groups

Servo/Stepper Motor Driven Miniature Linear Stages

Travel to 5 - 25mm

Servo and stepper motor driven compact positioning stages with lead screw / ball screw drives are mostly employed when relatively high forces are required, speed requirements are moderate, and controls need to be very simple.

PI offers positioners with lead screws (typically higher resolution and holding forces) and ball screws (higher speed, lower friction). Both are available with closed-loop servo motors and stepper motors.

The L-402 is a cost-effective motorized miniature stage equipped with crossed roller bearings for smooth and precise motion. The mini stage is equipped with a direct drive stepper motor or a DC-servo / gearhead and rotary encoder for closed-loop operation with design resolution to 0.12µm and repeatability of 0.5µm, which makes it ideal for micro-manipulation and alignment applications. Optical limit and home switches are also integrated. Backlash-compensated lead screws are standard, ball screws and vacuum versions to 10-6 hPa are available on request. Compact XY and XYZ combinations of the L-402 can be assembled quickly without additional adapter plates.
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L-402 Low-Cost Miniature Stage

Leadscrew, Servo & Stepper Motors

  • 0.5” travel
  • 0.5µm min. incremental motion
  • 100nm sensor resolution
  • 5mm/sec max. velocity
  • 10N push/pull force
  • Direct-drive stepper & DC gearbox motor
The M-110, M-111 and M-112 series is is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball screws (higher speed, lower friction). The DC-servo motor versions come with motor mounted encoders (calculated resolution as low as 7 nanometers); the stepper motor driven versions are run open loop. Guidance is with linear ball bearings. X, XY and XYZ combinations are available.
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M-110/1/2 Miniature Stages

Lead/Ballscrew, Servo & Stepper

  • 5/15/25mm travel
  • 0.05µm min. incremental motion
  • 7nm sensor resolution
  • 1-2mm/sec max. velocity
  • 10N push/pull force
  • DC & stepper gearbox motors
The M-122 is a compact, high precision linear stage with integrated linear encoder providing 100 nanometers resolution. It is a bit larger than the M-112 lead screw-driven stage (with motor/gearhead combination), but provides higher speed and precision.
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M-122 Miniature Stages

Linear Encoder, 20mm/sec

  • 25mm travel
  • 0.1µm linear encoder
  • 20mm/sec max. velocity
  • 20N push/pull force
  • DC motor

Folded Drive Trains:  M-11x and M-12x Stages are especially compact through the use of a folded drive train. The M-110, M-111 and M-112 series is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball screws (higher speed, lower friction). The DC-servo motor versions come with motor mounted encoders (calculated resolution as low as 7 nanometers); the stepper motor driven versions are run open loop. Guidance is with linear ball bearings. X, XY, and XYZ combinations are available.

The M-122 is a compact, high precision linear stage with integrated linear encoder, providing 100 nanometers resolution. It is a bit larger than the M-112, 25mm stage (with motor/gearhead combination), but provides higher speed and precision. Cross roller bearings with anti creep cage assist replace the linear ball bearings in the M-11x stage series. 

More Compact Linear Stages

Servo/Stepper Motor Driven Miniature Z-Stages

13mm Vertical Travel

The L-306 precision vertical stage can be combined with the L-406 linear stage to form compact XZ or XYZ positioning systems.

L-306 Precision Vertical Stage
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L-306 Compact Vertical Stage

Combines with L-406 Linear Stages

  • 13mm travel
  • 0.1µm min. inc. motion
  • 5nm linear encoder resolution
  • 5mm/sec max. velocity
  • 2kg load
  • 63x63mm footprint, combines with L-406 compact linear stages

Servo/Stepper Motor Driven Miniature Rotation Stages

These compact motorized rotation stages provide unlimited rotation ranges. The use of a worm gear reduction mechanism converts high speed input from the servo or stepper motor into high resolution motion at the turn table. Open loop stepper/gear motor and closed-loop servo gear motor versions with motor shaft mounted encoders are available.  

DT-34 Small Rotation Stage
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DT-34 Small Rotation Stage

Worm Gear, Servo & Stepper

  • 10mm aperture, 20mm turn table
  • 700µrad min. inc. motion
  • 195-675°/sec max. velocity
  • 1.5kg load 
The RS-40 miniature rotation stage provides a 20mm aperture. Its preloaded anti-backlash worm drive is available with small DC servo/gear and stepper/gear motors.
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RS-40 Small Rotation Stage

Worm Gear, Servo & Stepper

  • 20mm aperture, 34mm turn table
  • 87µrad min. inc. motion
  • 7°/sec max. velocity
  • 2kg load 
DT-80 Small Rotation Stage
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DT-80 Small Rotation Stage

Worm Gear, Servo & Stepper

  • 40mm aperture, 64mm turn table
  • 70µrad min. inc. motion
  • 40°/sec max. velocity
  • 2kg load 
The M-116 compact rotary positioner is designed to fit the M-110, M-111 and M-112 series of linear positioning stages. Its preloaded anti-backlash worm drive is available with an open loop stepper/gear motor and closed-loop servo/gear motor.
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M-116 Small Rotation Stage

Worm Gear, Servo Motor

  • 8mm aperture, 21mm turn table
  • 50µrad min. inc. motion
  • 20°/sec max. velocity
  • 1.5kg load
  • For M-110/1/12 linear stage

Piezo Inertia Motors: Sub-Miniature Linear Stages

Ultra-Compact, Velocity to 10mm/sec

Stick-slip piezo motors (inertia motors) permit the design of the smallest class of precision motorized positioners. The direct drive motors are only a few millimeters in size, there are no gears, or other conventional power transmission components involved that add size, complexity, play or backlash.

Inertia piezo motors make use of the difference in the static and dynamic friction coefficients between two surfaces; their controllers provide a quasi sawtooth output voltage, with a slow expansion phase and a fast contraction phase. In the expansion phase, the piezo actuator moves the slider; in the contraction phase, its inertia prevents the slider from following the quick motion of the actuator, and it remains at its position.

Piezo inertia motors can be operated in open loop, but for high accuracy and repeatability, a position encoder is integrated in the stage. Vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. 

The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions. Two linear encoder options for 1 and 4 namometer resolution are offered, both integrated in the stage body, for minimized dimensions.
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Q-521 Sub-Miniature Linear Stage

Piezo Inertia Direct Drive Motor

  • 12, 22, 32mm motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 21mm width, 10mm height
  • Self clamping motor, 1N
  • Vacuum options
The Q-522 series of economical mini positioning stages are driven by a compact piezo inertia motor. They are offered with travel ranges of 1/4", 1/2", and 1". Featuring dimensions as small as 22x22x10mm, the Q-522 is one of the smallest precision linear stages available on the market. Q-522 stages can be combined with the Q-622 miniature rotary positioners to form very compact multi-axis positioning systems.
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Q-522 Sub-Miniature Linear Stage

Piezo Inertia Direct Drive Motor

  • ¼”, ½”, 1” motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 22mm width, 10mm height
  • Self clamping motor, 1N
  • Vacuum options
The Q-545 mini positioning stage is driven by a high-force stick slip motor, based on a slightly different design compared to the Q-521 and Q-522 stages. A linear encoder is integrated for nanometer-scale precision. Vacuum versions, and non-magnetic versions are also offered. The piezo inertia drive runs at inaudible frequencies and is self-clamping at rest with position holding forces around 2 lbs.
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Q-545 Miniature Linear Stage

Piezo Inertia Direct Drive Motor

  • ½” &  1” motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 45mm width, 15mm height
  • Self clamping motor, 8N
  • Vacuum options

The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions are available. Two linear encoder options for 1 and 4 namometer resolution are offered, both integrated in the stage body, for minimized dimension.

The Q-522 series uses the same motor as the Q-521 series and provide travel ranges of 1/4", 1/2", and 1". Q-522 stages can be combined with the Q-622 miniature rotary positioners to form very compact multi-axis positioning systems.

The Q-545 mini positioning stage is driven by a higher force stick slip motor, based on a slightly different design compared to the Q-521 and Q-522 stages. A linear encoder is integrated for nanometer-scale precision. Vacuum versions, and non-magnetic versions are also offered. The piezo inertia drive runs at inaudible frequencies and is self-clamping at rest with position holding forces around 2 lbs.

Piezo Inertia Motors: Sub-Miniature Rotary Stages

Ultra-Compact, Velocity to 70°/sec

The Q-600 series of miniature rotary stages are based on the stick-slip motor principle. The Q-622 rotation features a diameter of 22mm and is designed to mount on the Q-522 linear stage.
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Q-622 Q-Motion® Miniature Rotation Stage

Inertia Motor, Direct Encoder

  • 22mm turn table, 10mm height
  • 2.2µrad min. inc. motion
  • 70°/sec max. velocity
  • 0.1kg load
  • Piezo inertia motor, self locking
The Q-600 series of miniature rotary stages are based on the stick-slip motor principle. The Q-632, a 32mm stage, boasts an ultra-low profile of only 7mm.
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Q-632 Q-Motion® Miniature Rotation Stage

Inertia Motor, Direct Encoder

  • 30mm turn table, 10mm height
  • 3µrad min. inc. motion
  • 45°/sec max. velocity
  • 0.1kg load
  • Piezo inertia motor, self locking
With 14mm table diameter, the Q-614 is the smallest linear stage currently available from PI. The Q-600 series of miniature rotary stages are based on the stick-slip motor principle.
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Q-614 Sub-Miniature Rotation Stage

Inertia Motor, Open Loop

  • 14mm turn table, 10mm height
  • 100µrad min. inc. motion
  • 70°/sec max. velocity
  • 0.1kg load
  • Piezo inertia motor, self locking

High-Speed Linear Translation / Rotation Stages

Ultrasonic Motors, Wide Dynamic Range, Velocity to 200mm/sec

Ultrasonic motor direct drives are based on the piezo effect. A compact piezoceramic actuator is driven at inaudible frequencies of 100’s of kHz (hence the ultrasonic designation), and with each cycle transfers nanoscopic motion to a linear or rotary ceramic surface bonded to a linear runner or rotary platform. Ultrasonic motors provide very fast start/stop behavior, smooth motion with a very wide dynamic range from microns/second to 100’s of millimeters/second.

Ultrasonic motors are self-clamping at rest, provide excellent long-term stability, there is no servo dither, or energy consumption once a position has been reached. While high velocities can be achieved with ultrasonic motors, when continuous scanning is required, magnetic linear motors and voice-coil drives, such as in the V-522 miniature stage, are recommended. Ultrasonic drives permit the design of very compact positioners; the motor design is intrinsically non-magnetic and vacuum compatible.

The U-521 miniature piezo-motor stage is designed for fast, quiet motion and positioning applications with high resolution and excellent step and settle behavior. Equipped with direct position feedback, two versions are offered, a lower-cost 0.4 micron linear encoder and 0.1 micron version for higher precision applications.
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U-521 Miniature Linear Stage

Silent Ultrasonic Linear Motor

  • 18mm motion range
  • 0.1µm encoder resolution 
  • 200mm/sec velocity
  • 35x35mm footprint
  • Self clamping motor design
  • Vacuum options
Designed with patented technology, the U-523 is a quiet, space-saving, light positioner. As a single axis mini piezo-motor stage, it delivers fast motion and accurate positioning with high resolution and excellent step and settle behavior and is equipped with a high sensor resolution of 10nm.
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U-523 Miniature Linear Stage

Silent Ultrasonic Linear Motor

  • 22mm motion range
  • 10nm encoder resolution 
  • 200mm/sec velocity
  • 42x42mm footprint
  • Self clamping motor design
  • Vacuum options
The U-723 mini piezo-motor stage is designed for fast, quiet, motion and positioning applications with high resolution and excellent step and settle behavior. With patented technology, it's a space-saving and light positioner with sensor resolution of 10nm.
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U-723 Miniature XY Linear Stage

Silent Ultrasonic Linear Motor

  • 22x22mm XY motion range
  • 10nm encoder resolution 
  • 200mm/sec velocity
  • 42x42mm footprint
  • Self clamping motor design
  • Vacuum options

The U-521 is the smallest member of the ultrasonic miniature stage family. It is designed for fast, quiet motion and positioning applications with high resolution and excellent step and settle behavior. Equipped with direct position feedback, two versions are offered; a lower-cost 0.4 micron linear encoder and 0.1 micron version for higher precision applications.

The U-523 is slightly larger, providing 22mm travel and a linear encoder with 10nm resolution.

The U-723 is an integrated, space saving XY version of the U-523.

High Speed Miniature Rotary Stages

Ultrasonic Motors, Wide Dynamic Range, Velocity to 720°/sec

These ultrasonic motor driven rotation stages provide high velocity to 720°/second and compact dimensions. They are equipped with optical, direct metrology encoders, and due to the self-clamping motor design, boast excellent position stability. The U-628 is the largest example featuring a table diameter of just under 2”. With Ø30mm and Ø20mm, respectively, the U-624 and U-622 are even more compact versions of the U-628 rotary stage.

With Ø30mm and Ø20mm, respectively the U-624 and U-622 are even more compact versions of the U-628 rotary stage.
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U-622 Miniature Ultrasonic Motor Stage

Direct Drive, Direct Encoder

  • 18.5mm turn table, 10mm height
  • 525µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.03kg load
  • Ultrasonic motor, self locking
With Ø30mm and Ø20mm, respectively the U-624 and U-622 are even more compact versions of the U-628 rotary stage.
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U-624 Miniature Ultrasonic Motor Stage

Direct Drive, Direct Encoder

  • 28.5mm turn table, 12mm height
  • 105µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.1kg load
  • Ultrasonic motor, self locking
The U-628 ultrasonic-motor-driven small rotation stage provides high velocity to 720°/second. It is equipped with an optical, direct metrology encoder, and due to its self-clamping motor design, boasts very high position stability.
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U-628 Miniature Ultrasonic Motor Stage

Direct Drive, Direct Encoder

  • 7mm aperture, 50mm turn table, 19mm height
  • 51µrad min. inc. motion
  • 720°/sec max. velocity
  • 0.5kg load
  • Ultrasonic motor, self locking

Miniature Linear Stages with PiezoWalk Motors (NEXACT® Motors)

High-End Piezo Motor, 0.5nm Encoder Resolution

PiezoWalk is a more powerful and complex drive than stick-slip and ultrasonic motors. PiezoWalk motors combine long travel with high stiffness and force, providing virtually unlimited travel ranges. PI’s NEXACT® motor technology integrates these advantages into a small package. Piezo-class resolution, millisecond responsiveness with low operating voltages, and a self-clamping design are other features.

The motors offer multiple operating modes including a high-dynamics, short-range dither mode with 100’s of Hertz bandwidth and picometer resolution, and several long distance modes optimized for highest force, highest speed, and constant velocity.

Driven by PiezoWalk® technology, which combines piezo class resolution with long travel ranges, subnanometer resolution, high forces and stiffness, these stepping drives are not subject to sliding friction or wear as motion is achieved when the “legs” lift off for each step. Designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology and scientific research in beamlines and laser labs.
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N-565 Nanometer-Precision Stage

PiezoWalk Direct Drive Motor

  • ½”, 1” and 2” motion range
  • 0.5nm encoder resolution
  • 10mm/sec velocity
  • 65mm width, 20mm height
  • Self clamping motor, 10N
  • Vacuum options
N-603 Ultra-Low Profile Stage
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N-603 Ultra-Low Profile Stage

Non-Magnetic, Vacuum-Compatible

  • 2mm motion range
  • 0.1µm sensor resolution
  • 8mm/sec velocity
  • 7.4mm low profile for serial mounting
  • Self clamping motor, 5N
  • For operation in strong magnetic fields
N-765 Nanometer-Precision Z-Stage
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N-765 Nanometer-Precision Z-Stage

PiezoWalk Direct Drive Motor

  • ¼” vertical motion range
  • 0.5nm encoder resolution
  • 2.5mm/sec velocity
  • 65x110mm footprint
  • Self clamping motor, 20N
  • Vacuum options
N-865 Ultra-Precise 6-Axis Platform
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N-865 Ultra-Precise 6-Axis Platform

2nm Min. Incremental Motion

  • 13x13x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1.5kg load
  • <0.5nm sensor resolution
  • 5mm/sec max. velocity
  • For ultra-precision requirements

Electrodynamic Linear Motor Stages - Voice Coil & 3-Phase Motors

PIMag® Technology - Zero Fricton Motors, High Speed

Electromagnetic linear motor-driven stages are used in high-speed positioning, scanning, and automation applications. They have lower holding forces compared to classical motor /screw driven stages, but no wear in the drive train, and are ideal for fast, high-duty cycle motion and positioning applications. .

Voice Coil Actuators use a one-phase electromagnetic linear motor similar to the driver of a loud-speaker. They provide high velocity with zero wear and motion ranges typically up to 1 inch.

Three phase linear motors can be used for longer travel ranges and provide higher forces.

The V-408 features high load capacity precision crossed roller elements with anti-creep cage assist, preventing roller creep, and a zero-wear, non-contact linear motor – ideal prerequisites for long lifetime in high duty cycle industrial applications. The high-force linear motor achieves velocities up to 1.5m/sec. An integrated optical linear encoder provides 10 nanometers resolution. The stage achieves 20nm minimum incremental motion and excellent geometric performance with 4µm straightness and flatness.
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V-408 Low Cost Linear Motor Stage

Compact, High Force

  • 25 and 50mm travel
  • 20nm min. incremental motion
  • 10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force
The V-52x series of voice-coil-driven linear stages come in 3 sizes and provide high-dynamics over travel ranges of 5mm, 10mm, and 20mm. Applications include optics scanning, fiber alignment, biotechnology, and laser technology. These compact linear scanning stages achieve significantly higher dynamics and speed than conventional screw-type positioners with stepper and servo motors; scanning frequencies of several 10Hz with velocities up to 250mm/sec can be achieved with the recommended C-413 compact controller. The design uses no moving cables and the frictionless voice-coil drive is not subject to wear & tear and generates no particles.
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V-522/4/8 Voice Coil Stage

Ideal for Scanning

  • 5/10/25mm travel
  • 20nm min. incremental motion
  • 10nm linear encoder resolution
  • 10’s of Hz scanning frequency
  • 4N push/pull force
V-508 Linear Motor Stage
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V-508 Linear Motor Stage

Compact, High End Sensor Option

  • 80/170/250mm travel
  • 1 to 20nm min. inc. motion
  • 0.2-10nm linear encoder resolution
  • 0.7m/sec max. velocity
  • 14N push/pull force

The V-52x series of voice-coil-driven linear stages come in 3 sizes and provide high-dynamics over travel ranges of 5mm, 10mm, and 20mm. Applications include optics scanning, fiber alignment, biotechnology, and laser technology. These compact linear scanning stages achieve significantly higher dynamics and speed than conventional screw-type positioners with stepper and servo motors; scanning frequencies of several 10Hz with velocities up to 250mm/sec can be achieved with the recommended C-413 compact controller. The design uses no moving cables and the frictionless voice-coil drive is not subject to wear & tear and generates no particles.

The V-408 features high load capacity precision crossed roller elements with anti-creep cage assist, preventing roller creep, and a zero-wear, non-contact linear motor – ideal prerequisites for long lifetime in high duty cycle industrial applications. The high-force linear motor achieves velocities up to 0.7m/sec. An integrated optical linear encoder provides 10 nanometers resolution. The stage achieves 20nm minimum incremental motion and excellent geometric performance with 4µm straightness and flatness.

The V-508 provides absolute measuring encoders and longer travel ranges to 170mm.

 

Wear and Friction Free Bearings, No Particle Generation
Flexures and air bearings provide friction free and wear free precision guidance.

The A-141 miniature Air Bearing Stage is equipped with a 3-phase motor, fully preloaded air bearings, and an integral high-resolution optical linear encoder. A locking design provides the ultimate in position stability. This stage offers ultra-precision in a very compact package. 

The V-900KPIC is an example of a miniaturized voice-coil driven stage with flexure guidance. Low inertia allows for very high dynamics. Closed and open-loop operation is possible, and the integrated 100 nanometer linear encoder provides reliable position control and repeatable accuracy. PI's C-413 motion controller features 10kHz servo update rate.

A-141 Miniature Air Bearing Stage
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A-141 Miniature Air Bearing Stage

Friction Free, No Particle Generation

  • 40mm travel
  • 20nm min. inc. motion
  • 0.25m/sec max. velocity, 0.35g max. acceleration
  • 2.3N push/pull force
  • 3-Phase table size 57mm x 83mm
This miniature positioner is driven by a single phase linear motor (voice-coil) and guided by flexures for long service life. Closed and open-loop operation is possible, and the integrated 100 nanometer linear encoder provides reliable position control and repeatable accuracy. PI's C-413 motion controller features 10kHz servo update rate.
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Custom Example: V-900KPIC Concept Mini Vertical Positioner

Voice Coil and Flexures

  • 1.5mm travel range
  • 0.1µm resolution linear encoder
  • Flexure guides for zero wear
  • 250/45mm/sec max. velocity (open/closed loop)

Piezo Flexure Stages

Ultra-High Performance, Short Travel 0.1 to 1.8mm

Piezo flexure-guided positioning stages provide several advantages over classical motorized positioning systems with mechanical bearings. They are completely free of backlash and friction and can position and settle in milliseconds or even microseconds. Driven by a piezo ceramic (with optional flexure motion amplifier), the response time is based on the sound propagation in the ceramics.

Piezo flexure stages are used when extremely smooth motion, fast response, high force or continuous scanning is required, with travel ranges typically below 1 millimeter. PI flexure stages are driven with PI’s exclusive PICMA piezo elements that have been life tested for 100 billion cycles and were selected by NASA /JPL for the Mars mission due to their extremely high performance and reliability.

	These miniature positioning stages are piezo-actuator driven and flexure guided for ultra-smooth, fast and high-precision motion and positioning applications. High precision capacitance positioning sensors provide feedback to a closed-loop controller. PIHera flexure stages are available in X, XY, and Z configurations and can be assembled to form compact XYZ positioning systems.
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PIHera Family of Piezo Flexure Stages

0.05 to 1.8mm Travel

  • 50 to 1800µm travel ranges
  • <1 nanometer resolution
  • Backlash-free precision flexure guiding system
  • X, XY, Z, XYZ versions
  • Vacuum option
P-616 Compact XYZ Piezo Scanner
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P-616 Compact XYZ Piezo Scanner

PKM = Higher Performance

  • 100µm XYZ motion
  • Parallel-kinematics (PKM)
  • Compact (40x40x40mm)
  • <1 nanometer resolution
  • Ideal for fast scanning
P-733.3DD High-Dynamics Scanners
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P-733.3DD High-Dynamics Scanners

Fastest XYZ Piezo Stages

  • 30x30x10µm motion
  • Direct drive = Higher dynamics
  • Up to 2.2 kHz resonant frequency
  • 100 picometers resolution
  • Frictionless precision flexure guides

Miniature Hexapod & 6-Axis Parallel Positioning Systems

A hexapod is based on a 6-axis (XYZ, Pitch, Roll, Yaw) actuator system arranged between a top and bottom platform.  Hexapods are also referred to as Gough-Stewart platforms and offer many advantages over serial kinematics stages, such as lower inertia, improved dynamics, smaller package size, and higher stiffness. In addition, hexapods are more flexible than conventional 6 axis positioners.

PI's miniature hexapods are available with different configurations: standard, high-speed, vacuum, and high resolution.

In addition to hexapods, PI offers a second class of planar 6-axis parallel manipulators. These piezo motor driven units are even smaller and fit inside the palm of a hand.

H-811 Miniature Hexapod
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H-811 Miniature Hexapod

Brushless DC Motors

  • 34x32x13mm XYZ travel
  • 20x20x41° rotary travel
  • 5kg load
  • 5nm actuator resolution
  • 20mm/sec max. velocity
  • Ø136mm base, 114mm height
Q-821 Sub-Mini 6-Axis Platform
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Q-821 Sub-Mini 6-Axis Platform

Ultra-Compact, Piezo Inertia Motors

  • 12x12x6mm XYZ travel
  • 12x12x33° rotary travel
  • 0.2kg load
  • 1nm sensor resolution
  • 5mm/sec max. velocity
  • Ø80mm base, 48mm height
N-865 Ultra-Precise 6-Axis Platform
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N-865 Ultra-Precise 6-Axis Platform

2nm Min. Incremental Motion

  • 13x13x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1.5kg load
  • <0.5nm sensor resolution
  • 5mm/sec max. velocity
  • For ultra-precision requirements