Products - PI (Physik Instrumente) L.P.

High-Speed, Low-Profile 6-Axis Nanopositioning System for Precision Automation

Linear Motors and Parallel Kinematics provide High Speed, Precision and Flexibility.

The F-690.S1, is a compact, high-performance 6-axis nanopositioning stage designed for advanced industrial and research applications requiring high speed, precision, and coordinated multi-axis motion in 6 degrees of freedom.

Featuring a parallel-kinematic design with 3-phase linear motor direct drives, the F-690.S1 delivers extremely low friction motion, and dynamic responsiveness in all linear and rotary degrees of freedom freedom—X, Y, Z, pitch, roll, and yaw. With nanometer-level resolution, bidirectional repeatability down to 100 nm, and a compact form factor, the system supports high-throughput processes in fields such as metrology, photonics, semiconductor test, micro-assembly, and optics.

Combined with PI’s advanced ACS motion controller, the system offers precise motion sequencing and real-time optimization for demanding tasks.

Integrated Optimization Routines for Optical Alignment

The system includes a preconfigured ACS motion controller with built-in Fast Multi-Channel Photonics Alignment (FMPA) routines for fast area scans and gradient-based searches, significantly reducing alignment time and cost. An optional PILightning™ module accelerates first-light detection. The platform is also well-suited for fiber array alignment.

Key Features:

  • Compact 6-DOF parallel-kinematic architecture with electro-magnetic direct drives
  • 1 nm resolution with absolute measuring sensors
  • Minimum incremental motion to 10 nanometer / 2µrad
  • Travel ranges up to 50 mm / 30°
  • Payload capacity up to 2kg
  • High-speed motion: up to 500 mm/s linear, 100°/s rotational
  • Max Acceleration: 5m/s2 linear and 2000°/s2 rotary
  • Low-profile design ideal for space-constrained environments
  • Integrated search and alignment routines for photonics, lens alignment, SiPh

The F-690.S1 is a powerful solution for engineers and researchers requiring high-speed, high-precision positioning across multiple axes in a compact, scalable platform.

Application Fields

High-speed alignment and positioning tasks requiring linear and rotational motion with nanometer precision, high dynamics, and payloads up to 2 kg.

Typical applications include:

  • Lens Alignment
  • Metrology
  • Micro-Assembly
  • Wafer probing in silicon photonics
  • PIC manufacturing
  • Fiber array alignment
  • Collimator and lens positioning
  • Optical component alignment
  • Photonic component testing, assembly, and packaging
  • Fiber optic device integration

See detailed specifications