Nanopositioning Stages – Compact

Piezo Nanopositioning Stages with Flexures, Travel Range to 1800µm

PI has extended its PIHera®  nanopositioning stage family - compact flexure-guided piezo stage    systems - now offering record travel ranges to 1800 microns.

X, XY, Z and XYZ Stage Versions
PIHera® piezo stages come in X, XY, Z and XYZ versions featuring travel ranges from 50 microns to 1800 microns for X and XY motion und up to 400 microns for vertical motion in Z.

Nanometer Precision for QA & Metrology Applications
These high precision closed-loop flexure-guided piezo stages can be used for scanning probe applications (surface metrology) and static positioning. Most PIHera® stages provide sub-nanometer resolution and even the 1.8 mm versions better than 3 nanometers resolution. The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy; trajectory precision is in the low-nanometer range. High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators. The ability to control motion with millisecond responsiveness and nanometer precision over long travel ranges makes PIHera® stages ideal for measuring and QA applications.

Capacitive Feedback Positon Sensors Offer Greater Motion Linearity
The piezo stages are equipped with non-contact capacitive- nano-measuring sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI Capacitive Feedback are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors. They are significantly less sensitive to influences by external noise and provide much better long term stability than strain gauge sensors.

Typical Applications
Surface Nano- Metrology. Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, Nanopositioning, Quality Assurance, Semiconductor Technology

Features & Advantages

  • No Wear & Tear: Flexures, Actuators and Sensors are Maintenance-Free
  • Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators
  • X, XY, Z and XYZ Stage Versions Available
  • 50 to 1800 micron ravel Ranges
  • Closed-Loop Control for Up to 99.98 % Absolute Accuracy
  • Vacuum-Compatible Stage Versions
  • Stiff and Compact Design for Millisecond Responsiveness
  • Sub-Nanometer Resolution
  • Frictionless, Maintenance-Free Precision Flexure Guiding System
  • Capacitive Direct-Metrology Sensors for Faster Servo Response

High Performance Nanopositioning Motion Controllers: High Speed, Digital and Analog Control
A variety of ultra-low-noise motion controllers with both digital and analog input provide fast communications and come with a wide selection of software tools. 
Examples: Digital: E-753. OEM-Cards: Controller Overview

Models: Vacuum compatible stages are also available

P-620.1 PIHera® Flexure-Guided Nanopositioning Piezo Stage, 50 µm, Capacitive Feedback
P-621.1 PIHera® Flexure-Guided Nanopositioning Piezo Stage, 100 µm, Capacitive Feedback
P-622.1 PIHera® Flexure-Guided Nanopositioning Piezo Stage, 250 µm, Capacitive Feedback
P-625.1 PIHera® Flexure-Guided Nanopositioning Piezo Stage, 500 µm, Capacitive Feedback
P-628.1 PIHera® Flexure-Guided Nanopositioning Piezo Stage, 800 µm, Capacitive Feedback
P-629.1 PIHera® Flexure-Guided Nanopositioning Piezo Stage, 1500 µm, Capacitive Feedback

XY Stages
P-620.2CD PIHera® Flexure-Guided Nanopositioning Piezo XY-Stage, 50 µm, Capacitive Feedback
P-621.2CD PIHera® Flexure-Guided Nanopositioning Piezo XY-Stage, 100 µm, Capacitive Feedback
P-622.2CD PIHera® Flexure-Guided Nanopositioning Piezo XY-Stage, 250 µm, Capacitive Feedback
P-625.2CD PIHera® Flexure-Guided Nanopositioning Piezo XY-Stage, 500 µm, Capacitive Feedback
P-628.2CD PIHera® Flexure-Guided Nanopositioning Piezo XY-Stage, 800 µm, Capacitive Feedback
P-629.2CD PIHera® Flexure-Guided Nanopositioning Piezo XY-Stage, 1500 µm, Capacitive Feedback

P-620.Z PIHera® Flexure-Guided Piezo-Z Nanopositioning Stage, 50 µm, Capacitive Feedback
P-621.Z  PIHera® Flexure-Guided Piezo-Z Nanopositioning Stage, 100 µm, Capacitive Feedback
P-622.Z PIHera® Flexure-Guided Piezo-Z Nanopositioning Stage, 250 µm, Capacitive Feedback

P-620.Z0L PIHera® Flexure-Guided Piezo-Z Nanopositioning Stage, 65 µm
P-621.Z0L PIHera® Flexure-Guided Piezo-Z Nanopositioning Stage, 140 µm
P-622.Z0L PIHera® Flexure-Guided Piezo-Z Nanopositioning Stage, 400 µm

XYZ Nanopositioning Stages 
can be built by combining an XY stage with a Z stage.


Nanopositioning Stage Overview

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