Nanometer Precision: Nanopositioners, Piezo Stages, Nanopositioning Stages

PI offers the broadest and deepest portfolio of nanometer precision motion technologoies, from piezo-driven nanopositioning and scanning stages to motorized 6-axis hexapod positioning systems. 

A nanopositioning stage is defined as a positioning device capable of nanometer or sub-nanometer resolution. There are several types of nanopositioners; devices featuring the highest dynamics and precision are piezo-driven, flexure guided and equipped with direct metrology position feedback, such as capacitive sensors.

Air bearing stages can also provide nanometer resolution and excellent guiding accuracy over long travel ranges. 

Advantages of typical PI piezo stage positioning systems are: very high reliability even in industrial and space applications (100 billion cycle tested PICMA® piezo drives), frictionless flexure designs, parallel kinematics (better multiaxis trajectory control), parallel metrology (keeps motion of all controlled axes inside the servo loop), capacitive feedback (direct measuring, non contact), digital control (wider dynamic range, better linearity, autocalibration). 

Choose from a Product Group below

Linear Piezo Nanopositioning Stages (Planar Motion - X)

Vertical and Z/Tip/Tilt Piezo Nanopositioning Stages (Flexure Guided) 

XY Piezo Nanopositioning Stages: <2mm Travel, Flexure Guided

XY Piezo Motor Stages: >10mm Travel, Cross Roller Bearings

XYZ Piezo Nanopositioning Stages: 5µm to 300µm Travel, Flexure Guided

6-Axis Piezo Nanopositioning Stages

Theta Z, Theta X, Theta Y, Piezo Stages – Rotation, Tip/Tilt

Phase Shifters and Tip-Tilt Mirror Platforms – Active Optics

All PI flexure-guided piezo positioners are built from-friction free, zero-wear components and provide excellent responsiveness with step & settle typically in the millisecond range. The flexure guiding system also guarantees minimal tilt and out-of-plane motion.

Applications such as image scanning, overlay, fast autofocus, interferometry and super-resolution microscopy, greatly benefit from these characteristics. Conventional motorized positioners have too many limitations, such as friction, slow-response and position stability. 

Other Nanopositioning Stages

Air Bearing Nanopositioners: In addition piezo flexure-guided positioners, PI also provides long travel air bearing nanopositioning stages and unique hybrid drives, several types of piezo-motor-driven stages with long travel ranges and miniature positioners with piezo stepper motors. 

For extreme applications magnetic levitation positioners are also available. In other words, PI can provide the appropriate technology for any application.