PI provides a large selection of high precision and high-speed tilt and tip tilt stages with a variety of different drive concepts. Air bearings tilt stages provide high speed motion, large travel ranges, support high loads, and are completely wear-free and maintenance free. Piezo flexure amplified tilt and tip tilt platforms can be used for fast laser beam steering, image stabilization, and improvement of laser welding applications. Their high resolution down to the nanoradian and fast response in the millisecond range makes them ideal for free space optical communication and error compensation in beam delivery applications, e.g. in the semiconductor industry.
Voice coil tip / tilt platforms provide larger angular travel than piezo flexure units, but at slightly lower resolution.
Applications of PI tilt stages and Z-tip/tilt platforms and goniometric rotation stages are found in alignment, laser beam steering, optics, and wafer test and inspection.