Vertical Linear Stages – Precision Motorized Z-Positioners

PI provides a number of different vertical linear stages, spanning from stepper motor driven stages to piezo-Z flexure nanopositioners. Vertical positioning stages (Z-stages, lift stages, or elevator stages) are used in focusing or precision positioning and alignment applications, and are often mission-critical in high-end industrial and research applications from optics to photonics alignment and semiconductor testing.

Voice Coil Z-Stages & Frictionless Air Bearing Z & Tip/Tilt Stages

Counterbalanced, Linear Motor Driven Z-Stages

A dedicated Z-stage provides better stiffness and straightness compared to a translation stage mounted vertically on a bracket, and gives full access to the sample to be positioned.

Many Options: PI provides a variety of different Z-stages, from low-cost stepper-motor units to high-accuracy lift stages with closed-loop motors and linear encoders for direct position feedback.

Ultra-High-Precision: Piezo Flexure Z-stages and Z-Tip-Tilt positioners and Piezo-Walk Z-Stages, as well as Hybrid Nanopositioning vertical stages, are also available for nanometer and sub-nanometer precise positioning applications.

Vacuum, too
As a specialist for vacuum motion systems, PI miCos also offers HV and UHV vacuum compatible linear positioning stages.

Helical 3D Tomography with Air Bearing Precesion Rotary and Linear Positioning Stages

Piezo-driven Mechatronics Nanopositioning Stage

The UPL-120 is our highest precision vertical linear stage. It is driven by a closed-loop servo motor or closed-loop micro-stepped, 2-phase stepper motor and utilizes a linear scale for position feedback. Other options include an open-loop stepper motor. The high performance of this elevator stage makes it ideal for applications in optical lithography, semiconductor test equipment, photonics alignment, and wafer inspection.

Linear Encoder, Crossed Rollers

13mm travel
0.1 to 0.05µm min. inc. motion
5nm linear encoder resolution
6mm/sec max. velocity
20kg load
Linear encoder option

Details

The L-310 vertical translation stage is available with stepper and servo motors and is driven by a precision ground ball screw and guided by cross-roller bearings. A linear scale option provides higher linearity and repeatability, with resolution to 50 nanometers. L-310 stages can be mounted directly to the L-511 linear stage and L-611 rotary stage series.

Linear Encoder, Crossed Rollers

26mm travel
0.1µm min. inc. motion
5nm encoder resolution
20mm/sec max. velocity
5kg load
Linear encoder option

Details

Combines with L-406 Linear Stages

13mm travel
0.1µm min. inc. motion
5nm linear encoder resolution
5mm/sec max. velocity
2kg load
63x63mm footprint, combines with L-406 compact linear stages

Details

Combines with M-511 Stages

½” vertical travel
0.1µm min. inc. motion
5 & 24nm sensor resolution
3 & 1mm/sec max. velocity
5 & 10kg load
20 & 100N holding force

Details

Low Profile

⌀250mm table
8 kg load capacity
5mm Z-stroke, to 2° tip/tilt
10nm/0.06µrad incremental motion
1nm sensor resolution

Details

Voice Coil Scanner, 7mm

7mm motion
Voice coil linear motor
Adjustable Z-counterbalance
Millisecond settling time
1nm sensor resolution

Details Applications Optical Inspection

PI has experience with a number of counterbalancing technologies for vertical stages including springs, magnets, counterweights, and closed-loop pneumatic solutions that adapt to varying loads. The following examples give an overview of what’s possible.
For more information on counterbalancing options, contact our engineers»

Custom A-121.050B1 Air Bearing stage with mechanical counterweight counterbalance, 50mm travel, linear motor, absolute encoder

Complete XYZ Air Bearing Motion System. XY = A-322 Base Model, 500x500mm Travel. Z Axis is a custom A-123.150B1 Air Bearing stage with pneumatic counterbalance and fail-safe brake, 150mm travel, linear motor, absolute encoder.

Custom A-123.150B1 Air Bearing stage with pneumatic counterbalance and fail-safe brake, 150mm travel, linear motor, absolute encoder

Custom V-408 Cross Roller Bearing Stage stage with pneumatic counterbalance and fail-safe brake, 50mm travel, linear motor, sin/cos encoder

Custom A-123.050B1 Air Bearing stage with pneumatic counterbalance and fail-safe brake, 50mm travel, linear motor, absolute encoder

Counter-balanced Air Bearing Z-Stage mounted on granite bridge

Complete XYZ Motion System. XY = V-508 Cross roller bearing linear motor stages, 170x170mm. Z Axis is a Custom V-408 Cross Roller Bearing Stage stage with pneumatic counterbalance and fail-safe brake, 50mm travel, linear motor, sin/cos encoder.

Custom Z-Theta with piezo XY motion system for miniature CT scanning. Z Axis is a custom A-123.200B1 Air Bearing stage with pneumatic counterbalance, which includes automated counterbalance adjustment for varying loads. The rotary stage is a A-623.050B1. The Q-545 XY stage is based on piezo-motor technology and driven through a slipring.

Split XY-Z System based on A-311 XY Air Bearing Stage and A-123 Linear Stage mounted on Granite Bridge

A new beamline instrumentation system engineered for a customer with A-311 XY stage, A-621 rotary stage, and A-121 vertical stage.

V-308, compact voice-coil driven Z-scanner for optics and microscopy applications. 7mm motion, adjustable magnetic counterbalance, millisecond settling time, 1nm sensor resolution, up to 1kg load.