Vertical Lift Stages / Precision Motorized Z-Stages
PI provides a number of different vertical lift stage designs (often called vertical linear stages, Z-stages, or elevator stages), spanning from stepper motor driven vertical stage platforms to piezo-Z flexure nanopositioning stages. High precision vertical lift stages are used in focusing, metrology or precision positioning and alignment applications. The ability to control the elevation of a platform with sub-micrometer to nanometer precision is often mission-critical in high-end industrial manufacturing and research applications from optics to photonics alignment and semiconductor surface metrology testing. In contrast to a linear stage mounted vertically, vertical lift stages allow 360 degree access to the objects mounted on the Z-platform.
A dedicated Z-stage provides better stiffness and straightness compared to a translation stage mounted vertically on a bracket, and gives full access to the sample to be positioned.
Many Options: PI provides a variety of different Z-stages, from low-cost stepper-motor units to high-accuracy lift stages with closed-loop motors and linear encoders for direct position feedback.
Ultra-High-Precision: Piezo Flexure Z-stages and Z-Tip-Tilt positioners and Piezo-Walk Z-Stages, as well as Hybrid Nanopositioning vertical stages, are also available for nanometer and sub-nanometer precise positioning applications.
Vacuum, too
As a specialist for vacuum motion systems, PI miCos also offers HV and UHV vacuum compatible linear positioning stages.
L-310 Precision Vertical Lift Stage
Linear Encoder, Crossed Rollers
- 26mm travel
- 0.1µm min. inc. motion
5nm encoder resolution
- 20mm/sec max. velocity
- 5kg load
- Linear encoder option
L-306 Precision Vertical Lift Stage
Combines with L-406 Linear Stages
- 13mm travel
- 0.1µm min. inc. motion
- 5nm linear encoder resolution
- 5mm/sec max. velocity
- 2kg load
- 63x63mm footprint, combines with L-406 compact linear stages
M-501 Vertical Lift Stage
Combines with M-511 Stages
- ½” vertical travel
- 0.1µm min. inc. motion
- 5 & 24nm sensor resolution
- 3 & 1mm/sec max. velocity
- 5 & 10kg load
- 20 & 100N holding force
A-523 Z-Tip-Tilt Air Bearing Stage
Low Profile
- ⌀250mm table
- 8 kg load capacity
- 5mm Z-stroke, to 2° tip/tilt
- 10nm/0.06µrad incremental motion
- 1nm sensor resolution
V-308 Fast Nano Focus
Voice Coil Scanner, 7mm
- 7mm motion
- Voice coil linear motor
- Adjustable Z-counterbalance
- Millisecond settling time
- 1nm sensor resolution
PI has experience with a number of counterbalancing technologies for vertical linear stages including springs, magnets, counterweights, and closed-loop pneumatic solutions that adapt to varying loads. The following examples give an overview of what’s possible.
FOR MORE INFORMATION ON COUNTERBALANCING OPTIONS, CONTACT OUR ENGINEERS
A-123.150B1ZB PIglide AT3 Linear Air Bearing Motorized Stage, 1nm Absolute Encoder with BiSS-C Output, 150mm Travel, with Z Counterbalance and Brake
A-123.050B1ZB PIglide AT3 Linear Air Bearing Motorized Stage, 1nm Absolute Encoder with BiSS-C Output, 50mm Travel, with Z Counterbalance and Brake
Custom Z-Theta with piezo XY motion system for miniature CT scanning. Z Axis is a custom A-123.200B1 Air Bearing stage with pneumatic counterbalance, which includes automated counterbalance adjustment for varying loads. The rotary stage is a A-623.050B1. The Q-545 XY stage is based on piezo-motor technology and driven through a slipring.
Piezo Flexure Z-Nanopositioners
Sub-nm Resolution, Zero-Friction
- <1mm travel
- <1nm min. inc. motion
- Millisecond fast step & settle
- High stability & fast scanning
