L-509 V6 • V7 • V9 Precision Linear Stage Suitable for Vacuum
Compact Design, for Loads to 10 kg
- Suitable for vacuum up to 10-9 hPa
- Travel ranges from 26 to 102 mm (1" to 4")
- Repeatability to 0.1 µm
- DC gear motor, stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
Product overview
High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. Therefore, a bakeout temperature of up to 80 °C can be reached. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.
Higher quality for high vacuum applications
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum, the drive screw and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
The highest quality for special requirements in ultrahigh vacuum
In this vacuum class, the product is optimized in all details and thanks to components suitable for ultrahigh vacuum, in order to reach PI V9 vacuum class up to 10-9 hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.
Motor types available
- DC motor with gearhead for high torques and resolution at low motor power, to 10-6 hPa
- 2-phase stepper motor for low velocity and high resolution, to 10-9 hPa
Types of position measuring
- Without encoder (open loop)
- Integrated rotary encoder on the motor shaft
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Specifications
Specifications
Motion | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | X | X | X | X | X | X | |
Travel range in X | 26 mm | 26 mm | 26 mm | 26 mm | 52 mm | 52 mm | 52 mm | 52 mm | 102 mm | 102 mm | 102 mm | 102 mm | |
Maximum velocity in X, unloaded | 10 mm/s | 10 mm/s | 10 mm/s | 1.5 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 1.5 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 1.5 mm/s | |
Linear crosstalk in Y with motion in X | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 8 µm | ± 8 µm | ± 8 µm | ± 8 µm | typ. |
Linear crosstalk in Z with motion in X | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 8 µm | ± 8 µm | ± 8 µm | ± 8 µm | typ. |
Rotational crosstalk in θY with motion in X | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | typ. |
Rotational crosstalk in θZ with motion in X | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | typ. |
Positioning | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
System resolution in X | 5000 nm | 5000 nm | 5000 nm | 8 nm | 5000 nm | 5000 nm | 5000 nm | 8 nm | 5000 nm | 5000 nm | 5000 nm | 8 nm | |
Unidirectional repeatability in X | 0.3 µm | 0.3 µm | 0.3 µm | 0.1 µm | 0.3 µm | 0.3 µm | 0.3 µm | 0.1 µm | 0.3 µm | 0.3 µm | 0.3 µm | 0.1 µm | typ. |
Minimum incremental motion in X | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | typ. |
Limit switch | Forked photoelectric sensor, N/C contact, 5 V, NPN | Mechanical | Mechanical | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Mechanical | Mechanical | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Mechanical | Mechanical | Forked photoelectric sensor, N/C contact, 5 V, NPN | |
Integrated sensor | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | ||||||||||
Resolution, motor encoder | 4096 Impulse/U | 4096 Impulse/U | 4096 Impulse/U | ||||||||||
Motor encoder: Sensor signal | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | ||||||||||
Drive Properties | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
Drive type | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | DC gear motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | DC gear motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | DC gear motor | |
Motor resolution | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | ||||
Nominal voltage | 24 V | 24 V | 24 V | 12 V | 24 V | 24 V | 24 V | 12 V | 24 V | 24 V | 24 V | 12 V | |
Peak voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | ||||
Drive force in negative direction of motion in X | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | typ. |
Drive force in positive direction of motion in X | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | typ. |
Resistance phase-phase | 3.3 Ω | 1.7 Ω | 1.7 Ω | 4.09 Ω | 3.3 Ω | 1.7 Ω | 1.7 Ω | 4.09 Ω | 3.3 Ω | 1.7 Ω | 1.7 Ω | 4.09 Ω | typ. |
Inductance phase-phase | 2.8 mH | 3 mH | 3 mH | 0.18 mH | 2.8 mH | 3 mH | 3 mH | 0.18 mH | 2.8 mH | 3 mH | 3 mH | 0.18 mH | |
Back EMF, phase-phase, rotational | 1.68 V/kRPM | 1.68 V/kRPM | 1.68 V/kRPM | max. | |||||||||
Mechanical Properties | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
Guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | |
Drive screw type | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | |
Drive screw pitch | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | |
Holding force in X, passive | 50 N | 50 N | 30 N | 50 N | 50 N | 50 N | 30 N | 50 N | 50 N | 50 N | 30 N | 50 N | |
Moved mass in X, unloaded | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | |
Permissible push force in Y | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | max. |
Permissible push force in Z | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | max. |
Permissible torque in θx | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | max. |
Permissible torque in θY | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | max. |
Permissible torque in θZ | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | max. |
Overall mass | 1400 g | 1000 g | 1300 g | 1100 g | 1500 g | 1100 g | 1400 g | 1200 g | 1700 g | 1600 g | 1600 g | 1500 g | |
Material | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | |
Gear ratio i | 29.642 | 29.642 | 29.642 | ||||||||||
Miscellaneous | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
Connector | HD D-sub 26 (m) | D-sub 15-pole (f) | D-sub 15-pole (f) | HD D-sub 26 (m) | HD D-sub 26 (m) | D-sub 15-pole (f) | D-sub 15-pole (f) | HD D-sub 26 (m) | HD D-sub 26 (m) | D-sub 15-pole (f) | D-sub 15-pole (f) | HD D-sub 26 (m) | |
Vacuum class | 10E-6 hPa hPa | 10E-7 hPa hPa | 10E-9 hPa hPa | 10E-6 hPa hPa | 10E-6 hPa hPa | 10E-7 hPa hPa | 10E-9 hPa hPa | 10E-6 hPa hPa | 10E-6 hPa hPa | 10E-7 hPa hPa | 10E-9 hPa hPa | 10E-6 hPa hPa | |
Recommended controllers / drivers | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller | |
Operating temperature range | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | |
Maximum bake out temperature | 80 °C | 80 °C | 150 °C | 80 °C | 80 °C | 80 °C | 150 °C | 80 °C | 80 °C | 150 °C | 80 °C | ||
Cable length | 2 m | 2 m | 2 m | 2 m | 2 m | 2 m |
Downloads
Datasheet
Documentation
User Manual MP186
This document describes the following precision linear positioner, vacuum-compatible 1 E-7 hPa: L-509.0x1300V7; L-509.0x1311V7
User Manual L509T0018
L-509 Vacuum-Compatible Precision Linear Positioner (1E-9 hPa)
User Manual MP174
L-509 Vacuum-Compatible Precision Linear Stage (1 E-6 hPa)
3-D Models
3-D model L-509.054132V6
3-D model L-509.051600V9
3-D model L-509.051100V6
3-D model L-509.034132V6
3-D model L-509.031600V9
3-D model L-509.031300V7
3-D model L-509.031100V6
3-D model L-509.024132V6
3-D model L-509.021600V9
3-D model L-509.021300V7
3-D model L-509.0513xxV7
3-D model L-509.0211xxV6
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Technology

Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.

Rotating Electric Motors
Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.