L-509.021100V6
Vacuum compatible precision linear stage; 2-phase stepper motor; 26 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-6 hPa
L-509 V6 • V7 • V9 Precision Linear Stage Suitable for Vacuum
Compact Design, for Loads to 10 kg
- Suitable for vacuum up to 10-9 hPa
- Travel ranges from 26 to 102 mm (1" to 4")
- Repeatability to 0.1 µm
- DC gear motor, stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
L-509.024132V6, Abmessungen in mm
L-509.031600V9, Abmessungen in mm
L-509.021600V9, Abmessungen in mm
L-509.051300V7, Abmessungen in mm
L-509.031300V7, Abmessungen in mm
L-509.021300V7, Abmessungen in mm
L-509.051100V6, Abmessungen in mm
L-509.031100V6, Abmessungen in mm
L-509.021100V6, Abmessungen in mm
L-509.054132V6, Abmessungen in mm
L-509.034132V6, Abmessungen in mm
L-509.051600V9, Abmessungen in mm
L-509 V6 • V7 • V9 Precision Linear Stage Suitable for Vacuum
Product Description
Specifications
Downloads
Quote / Order
Product overview
High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. Therefore, a bakeout temperature of up to 80 °C can be reached. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.
Higher quality for high vacuum applications
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum, the drive screw and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
The highest quality for special requirements in ultrahigh vacuum
In this vacuum class, the product is optimized in all details and thanks to components suitable for ultrahigh vacuum, in order to reach PI V9 vacuum class up to 10-9 hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.
Motor types available
- DC motor with gearhead for high torques and resolution at low motor power, to 10-6 hPa
- 2-phase stepper motor for low velocity and high resolution, to 10-9 hPa
Types of position measuring
- Without encoder (open loop)
- Integrated rotary encoder on the motor shaft
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Specifications
Specifications
Select a travel range:
Click inside the table and use your arrow keys to scroll left or right.
| Motion | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | X | X | X | X | X | X | |
| Travel range in X | 26 mm | 26 mm | 26 mm | 26 mm | 52 mm | 52 mm | 52 mm | 52 mm | 102 mm | 102 mm | 102 mm | 102 mm | |
| Maximum velocity in X, unloaded | 10 mm/s | 10 mm/s | 10 mm/s | 1.5 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 1.5 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 1.5 mm/s | |
| Linear crosstalk in Y with motion in X | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 8 µm | ± 8 µm | ± 8 µm | ± 8 µm | typ. |
| Linear crosstalk in Z with motion in X | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 4 µm | ± 8 µm | ± 8 µm | ± 8 µm | ± 8 µm | typ. |
| Rotational crosstalk in θY with motion in X | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | typ. |
| Rotational crosstalk in θZ with motion in X | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 60 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 90 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | ± 120 µrad | typ. |
| Positioning | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
| System resolution in X | 5000 nm | 5000 nm | 5000 nm | 8 nm | 5000 nm | 5000 nm | 5000 nm | 8 nm | 5000 nm | 5000 nm | 5000 nm | 8 nm | |
| Unidirectional repeatability in X | 0.3 µm | 0.3 µm | 0.3 µm | 0.1 µm | 0.3 µm | 0.3 µm | 0.3 µm | 0.1 µm | 0.3 µm | 0.3 µm | 0.3 µm | 0.1 µm | typ. |
| Minimum incremental motion in X | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | typ. |
| Limit switch | Forked photoelectric sensor, N/C contact, 5 V, NPN | Mechanical | Mechanical | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Mechanical | Mechanical | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Mechanical | Mechanical | Forked photoelectric sensor, N/C contact, 5 V, NPN | |
| Integrated sensor | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | ||||||||||
| Resolution, motor encoder | 4096 Impulse/U | 4096 Impulse/U | 4096 Impulse/U | ||||||||||
| Motor encoder: Sensor signal | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | ||||||||||
| Drive Properties | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
| Drive type | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | DC gear motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | DC gear motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | DC gear motor | |
| Motor resolution | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | 200 Vollschritte/U | ||||
| Nominal voltage | 24 V | 24 V | 24 V | 12 V | 24 V | 24 V | 24 V | 12 V | 24 V | 24 V | 24 V | 12 V | |
| Peak voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | ||||
| Drive force in negative direction of motion in X | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | typ. |
| Drive force in positive direction of motion in X | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | 60 N | typ. |
| Resistance phase-phase | 3.3 Ω | 1.7 Ω | 1.7 Ω | 4.09 Ω | 3.3 Ω | 1.7 Ω | 1.7 Ω | 4.09 Ω | 3.3 Ω | 1.7 Ω | 1.7 Ω | 4.09 Ω | typ. |
| Inductance phase-phase | 2.8 mH | 3 mH | 3 mH | 0.18 mH | 2.8 mH | 3 mH | 3 mH | 0.18 mH | 2.8 mH | 3 mH | 3 mH | 0.18 mH | |
| Back EMF, phase-phase, rotational | 1.68 V/kRPM | 1.68 V/kRPM | 1.68 V/kRPM | max. | |||||||||
| Mechanical Properties | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
| Guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | |
| Drive screw type | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | |
| Drive screw pitch | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | |
| Holding force in X, passive | 50 N | 50 N | 30 N | 50 N | 50 N | 50 N | 30 N | 50 N | 50 N | 50 N | 30 N | 50 N | |
| Moved mass in X, unloaded | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | 220 g | |
| Permissible push force in Y | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | max. |
| Permissible push force in Z | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | max. |
| Permissible torque in θx | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | 30 N·m | max. |
| Permissible torque in θY | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | max. |
| Permissible torque in θZ | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | max. |
| Overall mass | 1400 g | 1000 g | 1300 g | 1100 g | 1500 g | 1100 g | 1400 g | 1200 g | 1700 g | 1600 g | 1600 g | 1500 g | |
| Material | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | |
| Gear ratio i | 29.642 | 29.642 | 29.642 | ||||||||||
| Miscellaneous | L-509.021100V6 | L-509.021300V7 | L-509.021600V9 | L-509.024132V6 | L-509.031100V6 | L-509.031300V7 | L-509.031600V9 | L-509.034132V6 | L-509.051100V6 | L-509.051300V7 | L-509.051600V9 | L-509.054132V6 | Tolerance |
| Connector | HD D-sub 26 (m) | D-sub 15-pole (f) | D-sub 15-pole (f) | HD D-sub 26 (m) | HD D-sub 26 (m) | D-sub 15-pole (f) | D-sub 15-pole (f) | HD D-sub 26 (m) | HD D-sub 26 (m) | D-sub 15-pole (f) | D-sub 15-pole (f) | HD D-sub 26 (m) | |
| Vacuum class | 10E-6 hPa hPa | 10E-7 hPa hPa | 10E-9 hPa hPa | 10E-6 hPa hPa | 10E-6 hPa hPa | 10E-7 hPa hPa | 10E-9 hPa hPa | 10E-6 hPa hPa | 10E-6 hPa hPa | 10E-7 hPa hPa | 10E-9 hPa hPa | 10E-6 hPa hPa | |
| Recommended controllers / drivers | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller | |
| Operating temperature range | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | |
| Maximum bake out temperature | 80 °C | 80 °C | 150 °C | 80 °C | 80 °C | 80 °C | 150 °C | 80 °C | 80 °C | 150 °C | 80 °C | ||
| Cable length | 2 m | 2 m | 2 m | 2 m | 2 m | 2 m |
Downloads
Datasheet
Documentation
Documentation
User Manual MP186
This document describes the following precision linear positioner, vacuum-compatible 1 E-7 hPa: L-509.0x1300V7; L-509.0x1311V7
Version / Date
1.2 2020-06-29
pdf - 2 MB
English
Documentation
User Manual L509T0018
L-509 Vacuum-Compatible Precision Linear Positioner (1E-9 hPa)
Version / Date
2020-06-29
pdf - 3 MB
English
Documentation
User Manual MP174
L-509 Vacuum-Compatible Precision Linear Stage (1 E-6 hPa)
Version / Date
1.2 2020-06-30
pdf - 3 MB
Version / Date
1.2 2020-06-30
pdf - 3 MB
3-D Models
3-D Models
3-D model L-509.054132V6
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.051600V9
Version / Date
2019-12-06
zip - 4 MB
3-D Models
3-D model L-509.051100V6
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.034132V6
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.031600V9
Version / Date
2019-12-06
zip - 4 MB
3-D Models
3-D model L-509.031300V7
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.031100V6
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.024132V6
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.021600V9
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.021300V7
Version / Date
2019-12-06
zip - 3 MB
3-D Models
3-D model L-509.0513xxV7
Version / Date
2019-12-09
zip - 5 MB
3-D Models
3-D model L-509.0211xxV6
Version / Date
2019-12-09
zip - 7 MB
Separate connection cable required for motor and sensor connection respectively.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
L-509.021300V7
Vacuum compatible precision linear stage; 2-phase stepper motor; 26 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-7 hPa; 2 m cable length
L-509.021600V9
Vacuum compatible precision linear stage; 2-phase stepper motor; 26 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-9 hPa; 2 m cable length
L-509.024132V6
Vacuum compatible precision linear stage; DC gear motor; 26 mm travel range; 100 N load capacity; 1.5 mm/s maximum velocity; ball screw; incremental rotary encoder; vacuum compatible to 10-6 hPa
L-509.031100V6
Vacuum compatible precision linear stage; 2-phase stepper motor; 52 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-6 hPa
L-509.031300V7
Vacuum compatible precision linear stage; 2-phase stepper motor; 52 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-7 hPa; 2 m cable length
L-509.031600V9
Vacuum compatible precision linear stage; 2-phase stepper motor; 52 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-9 hPa; 2 m cable length
L-509.034132V6
Vacuum compatible precision linear stage; DC gear motor; 52 mm travel range; 100 N load capacity; 1.5 mm/s maximum velocity; ball screw; incremental rotary encoder; vacuum compatible to 10-6 hPa
L-509.051100V6
Vacuum compatible precision linear stage; 2-phase stepper motor; 102 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-6 hPa
L-509.051300V7
Vacuum compatible precision linear stage; 2-phase stepper motor; 102 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-7 hPa; 2 m cable length
L-509.051600V9
Vacuum compatible precision linear stage; 2-phase stepper motor; 102 mm travel range; 100 N load capacity; 10 mm/s maximum velocity; ball screw; vacuum compatible to 10-9 hPa; 2 m cable length
L-509.054132V6
Vacuum compatible precision linear stage; DC gear motor; 102 mm travel range; 100 N load capacity; 1.5 mm/s maximum velocity; ball screw; incremental rotary encoder; vacuum compatible to 10-6 hPa
Questions? - Ask a PI Engineer
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