Tilt Stages, High Precision Tip/Tilt Z/Tip/Tilt Stages

NEW: Motorized Precision Rotary Positioning Stages Back to Overview

PI provides a number of high performance tilt stages with different drive technologies.

A large, motorized, high performance Z and Tip/Tilt table with 10” platform diameter and air bearing guides is available as the V-523 stage.

For the highest resolution and bandwidth, piezo tip/tilt stages are available.

M-042.00 Tilt Stage with Optional PZT Drives

One & Two Axis Tilt Stages
Zero Backlash
Sub-µrad Resolution
Manual and DC Motor Drives
Optional PZT Drives for Tracking and Scanning

M-041 through M-044 are one and two axis tilt stages for small loads. They are spring preloaded for elimination of backlash and feature superior resolution and repeatability to goniometric cradles. Versions with PZT translators allow for ultra-high resolution dynamic scanning and tracking. (See "PZT Active Optics" section for fast, ultra-high resolution, tip/tilt platforms).

The basic versions (part number extension .00) are equipped with manual micrometer drives providing 65 and 80 µrad minimum incremental motion, respectively. The versions with extension .D0 are equipped with closed loop DC servo motor drives providing 15 and 12 µrad minimum incremental motion, respectively. A set of limit switches eliminates the possibility of overtravel.

For sub-µrad resolution and dynamic tracking or scanning, optional closed loop and open loop PZT drive upgrade kits are available (see "PZT Actuators" section for further details and recommended drivers). The PZT drives can also be ordered later to upgrade manual or motorized systems.

A large, motorized, high performance Z and Tip/Tilt table with 10” platform diameter and air bearing guides is available as the V-523 stage.

ORDERING INFORMATION:
M-041.00 Small Tilt Stage, θ_X,Manual Micrometer Drive
M-041.D0 Small Tilt Stage, θ_X, DC Motor Drive
M-042.00 Small Tilt Stage, θ_X θ_Y, Manual Micrometer Drive
M-042.D0 Small Tilt Stage, θ_X, θ_Y, DC Motor Drive
M-043.00 Tilt Stage, θ_X, Manual Micrometer Drive
M-043.D0 Tilt Stage, θ_X, DC Motor Drive
M-044.00 Tilt Stage, θ_X θ_Y, Manual Micrometer Drive
M-044.D0 Tilt Stage, θ_X θ_Y, DC Motor Drive

UPGRADES:
M-041.U0 Open Loop PZT Drive Upgrade Kit for M-041 Tilt Stages
M-041.US Closed Loop PZT Drive Upgrade Kit for M-041 Tilt Stages
M-042.U0 Open Loop PZT Drive Upgrade Kit for M-042 Tilt Stages
M-042.US Closed Loop PZT Drive Upgrade Kit for M-042 Tilt Stages
M-043.U0 Open Loop PZT Drive Upgrade Kit for M-043 Tilt Stages
M-043.US Closed Loop PZT Drive Upgrade Kit for M-043 Tilt Stages
M-044.U0 Open Loop PZT Drive Upgrade Kit for M-044 Tilt Stages
M-044.US Closed Loop PZT Drive Upgrade Kit for M-044 Tilt Stages

TECHNICAL DATA:
Models	M-041.00	M-042.00	M-043.00	M-044.00	M-041.D0	M-042.D0	M-043.D0	M-044.D0	Units	<link>Notes
Tilt Axes	q _X	q _{Xq Y}	q _X	q _{Xq Y}	q _X	q _{Xq Y}	q _X	q _{Xq Y}
Tilt Range	± 9	± 9	± 7	± 7	± 9	± 9	± 7	± 7	deg (axis)
Fine Range (PZT option)	±1.2	±0.6	±1.4	±1.4	±1.2	±0.6	±1.4	±1.4	mrad (axis)
Design resolution	-	-	-	-	4.7	4.7	3.8	3.8	µrad	A3
Min. incremental motion	80	80	65	65	15	15	12	12	µrad	A4
Min. incremental motion (PZT option)	0.5	0.5	0.5	0.5	0.5	0.5	0.5	0.5	µrad	A4
Rotation / linear input	80	80	65	65	80	80	65	65	µrad / µm	A5
Unidirectional repeatability	-	-	-	-	20	20	15	15	µrad
* Backlash	-	-	-	-	400	400	350	350	µrad
Max. velocity	-	-	-	-	3.2	3.2	2.6	2.6	deg/sec
Max. load (A)	4	4	5	5	4	4	5	5	kg
Max torque (B, C)	450, 150	450, 150	750, 250	750, 250	450, 150	450, 150	750, 250	750, 250	mNm
Drive	M-622 Micrometer	M-622 Micrometer	M-624 Micrometer	M-624 Micrometer	M-222.20 DC-Mike	M-222.20 DC-Mike	M-222.20 DC-Mike	M-222.20 DC-Mike
PZT drive (optional)	P-840.20 / P-841.20	P-840.10 / P-841.10	P-840.30 / P-841.30	P-840.30 / P-841.30	P-840.20 / P-841.20	P-840.10 / P-841.10	P-840.30 / P-841.30	P-840.30 / P-841.30		D1
Weight	0.4	0.6	0.8	1.2	0.5	0.7	0.9	1.5	kg
Material	Al	Al	Al	Al	Al	Al	Al	Al		L