- Travel range 30 mm
- Force generation to 10 N
- With NEXACT® piezo walking drive
- Optional: Integrated linear encoder with 20 nm resolution
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Motion in strong magnetic fields and in a vacuum
Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
User Manual MP108
N-381.30 NEXACT® linear actuator
User Manual MP177
N-381.3A NEXACT® linear actuator
N-381 3-D model
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