Linear Piezo Motors / Actuators for Integration

The linear piezo motors and actuators shown here are intended to be integrated into motion systems that contain a guiding mechanisms.

An overview of integrated piezo motor positioning stages (linear stages, rotation stages and multi-axis positioning systems) can be found here: 

In addition to novel positioning concepts with piezo ceramic motors, PI also offers conventional motorized positioning stages with electrodynamic linear motors and motor/screw drive mechanisms

Piezo Inertia Motors: Miniature Rod-Drive Actuators

Mini-rod stick-slip motors (piezo inertia motors) are based on a small piezo element moving (along) a rod when driven with a quasi sawtooth signal.  A “stick” phase slow enough to transfer motion, is followed by a very rapid “slip” phase where the piezo element retracts but the load cannot follow. 

N-412 Piezo Motor Actuato
Show more

N-412 Piezo Motor Actuato

Direct Drive Piezo Inertia Motor

  • 13mm travel
  • 0.3µm step size
  • 5mm/sec max. velocity
  • 7N push/pull force
  • 10N holding force
N-422 OEM Piezo Motor Actuator
Show more

N-422 OEM Piezo Motor Actuator

Direct Drive Piezo Inertia Motor

  • 35mm travel
  • 0.3µm step size
  • 5mm/sec max. velocity
  • 7N push/pull force
  • 10N holding force

 

Piezo Inertia Motors: Ratchet Type Micrometer Actuators

Piezo ratchet drives are a special form of inertia motors based on the stick-slip effect. A small piezo ceramic actuator embedded in a precision mechanism drives a high resolution screw. The drive principle relies on a quasi-saw tooth signal with a slow expansion phase and a fast contraction phase. This expansion leads to a small rotation of a high resolution lead screw (see animation). When the piezo element has reached its maximum expansion, a much shorter contraction phase follows – too fast for the screw to follow, because of its inertia. 

Show more

N-472 Closed-Loop PiezoMike

Piezo Ratchet Drive

  • <1nm encoder resolution 
  • ¼” and 1/2” (13mm) motion range
  • Self-clamping: Holding force >100N
  • Pushing force 22N
  • Variety of mounting options
Piezo ratchet drives are a special form of inertia motors based on the stick-slip effect. A small piezo ceramic actuator embedded in a precision mechanism drives a high resolution screw. The drive principle relies on a quasi-saw tooth signal with a slow expansion phase and a fast contraction phase. This expansion leads to a small rotation of a high resolution lead screw (see animation). When the piezo element has reached its maximum expansion, a much shorter contraction phase follows – too fast for the screw to follow, because of its inertia.
Show more

N-470 PiezoMike Micrometer

Piezo Ratchet Drive

  • ¼” to 1” (26mm) motion range
  • Self-clamping: Holding force >100N
  • Pushing force 22N
  • 30 nanometer step size
  • Variety of mounting options
N-470.V/U Vacuum PiezoMike
Show more

N-470.V/U Vacuum PiezoMike

Piezo Ratchet Drive

  • ¼” to 1” (26mm) motion range
  • Self-clamping: Holding force >100N
  • Pushing force 22N
  • 20 nanometer step Size
  • Variety of mounting options

Compact PiezoWalk® Linear Motor Actuators

10-15mm/sec

PiezoWalk® Linear Motors are based on the coordinated motion of several piezo elements. They provide a very responsive short travel dithering mode (no stepping required) with sub-nanometer resolution and several long travel modes, optimized for maximum force, speed or constant velocity. PI makes two basic types of PiezoWalk motors: the smaller and faster 300-series and the higher-force 100/200-series. Both provide very high stability and sub-nanometer resolution. 

N-381 PiezoWalk® Linear Actuator
Show more

N-381 PiezoWalk® Linear Actuator

Manipulator, Piezo Stepper

  • 30mm travel
  • 0.03nm open loop resolution
  • 10mm/sec max. velocity
  • 10N push/pull force
  • 20nm encoder integrated
N-310 PiezoWalk® OEM Actuator
Show more

N-310 PiezoWalk® OEM Actuator

Direct Drive, Piezo Stepper

  • Requires external encoder
  • 15 to 125mm motion range
  • 10mm/sec velocity
  • Dither mode for 30pm resolution
  • 10N push/pull force, self locking
  • Vacuum options
N-331 V8 PiezoWalk® Actuator
Show more

N-331 V8 PiezoWalk® Actuator

V8 Drive: Higher Force & Speed

  • 25 to 100mm travel
  • 0.02nm open loop resolution
  • 15mm/sec max. velocity
  • 50N push/pull force
  • 5nm encoder integrated

High-Force PiezoWalk® Linear Motor Actuators

1mm/sec

N-111 PiezoWalk® Linear Actuator
Show more

N-111 PiezoWalk® Linear Actuator

Medium Force, Encoder Option

  • 10mm travel
  • 0.03nm open loop resolution
  • 1mm/sec max. velocity
  • 50N push/pull force
  • 5nm encoder integrated
N-216 NEXLINE® Piezo Motor
Show more

N-216 NEXLINE® Piezo Motor

High-Force PiezoWalk® Direct Drive

  • 5nm encoder resolution 
  • 20mm motion range
  • 1mm/sec velocity
  • Dither mode for 30pm resolution
  • 600N push/pull force, self locking
  • Vacuum options

Custom Examples

Ultrasonic Motor Linear Actuator
Show more

Ultrasonic Motor Linear Actuator

OEM Actuator for Integration

  • 50 mm/sec velocity
  • 200mm / 300mm travel
  • Linear encoder
  • 6N holding force
  • Self-clamping
  • Compact, low profile 

Conventional Actuators

Servo / Stepper Motors