6-Axis Stages / Parallel Manipulators with PiezoWalk and Inertia Piezo Motors

In addition to the more traditional 6-axis Hexapod parallel kinematic motion platforms, based on 6 actuators and servo motors, PI also offers  a number of compact, high-precision 6-axis positioners based on piezo motor drives.  

Low Profile Parallel/Serial Kinematics 6-Axis Positioning and Alignment Platforms
The 6-axis precision positioning systems described here are based on a combination of serial and parallel kinematics. Three stacked two-axis linear stages (XY) actuate a tripod in parallel, providing highly precise motion in all 6 degrees of freedom. Each of the 6 linear stages is equipped with a linear piezo motor and a high resolution linear encoder (nanometer or sub-nanometer resolution).

The Q-821 and Q-845 models are driven by ultra-compact inertia piezo motors, the N-865 low profile version uses a higher force PiezoWalk motor (watch video for explanation of operating principle of different piezo motors).

6-Axis Piezo Motor Stages

Q-821 Ultra Compact 6-Axis Motion Platform
The Q-821 is our smallest high precision motorized positioning system with 6 degrees of freedom. It is based on six Q-521 linear stages.

Q-845 Compact 6-Axis Motion Platform
The Q-845 is based on six Q-545 linear stages and provides 5 times the load capacity of the Q-821.

N-865 High End Low Profile 6-Axis Motion Platform
N-865 is based on the higher performing PiezoWalk drives and high-end PIone linear encoders. These special encoders manufactured by PI have been tested to provide resolution down to the picometer range. With an extremely high pitch grid period of only 0.5µm, and a read head based on a Mach-Zehnder interferometer, they can deliver exceptional linearity.

Q-821 Sub-Mini 6-Axis Platform
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Q-821 Sub-Mini 6-Axis Platform

Ultra-Compact, Piezo Inertia Motors

  • 12x12x6mm XYZ travel
  • 12x12x33° rotary travel
  • 0.2kg load
  • 1nm sensor resolution
  • 5mm/sec max. velocity
  • Ø80mm base, 48mm height
Q-845 Miniature 6-Axis Platform
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Q-845 Miniature 6-Axis Platform

Compact, Piezo Inertia Motors

  • 14x14x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1kg load
  • 1nm sensor resolution
  • 5mm/sec max. velocity
  • Ø174mm base, 77mm height
N-865 Ultra-Precise 6-Axis Platform
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N-865 Ultra-Precise 6-Axis Platform

2nm Min. Incremental Motion

  • 13x13x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1.5kg load
  • <0.5nm sensor resolution
  • 5mm/sec max. velocity
  • For ultra-precision requirements

Additional 6-Axis Positioning Systems