Piezo-Z Stages and Piezo Z-Tip-Tilt Platforms with Nanometer Precision

These high resolution piezo-Z stages, tip-tilt stages and Z-tip-tilt platforms use flexure guides and frictionless motion amplifiers to provide extended motion ranges along with excellent guiding precision.

Vertical travel ranges up to several 100µm and tip-tilt ranges to 4 milliradian are available.

Piezo stages with flexures can achieve linear resolutions down to sub-nanometers and rotary resolutions down to the nanoradian realm.

Applications include fast autofocus, interferometry, image scanning, super-resolution microscopy.

Choose from a Product Group below, or scroll to see all Product Groups

Compact Piezo Flexure Z-Stages for Vertical Nanopositioning

P-620.Z - P-622.Z (PIHera family)
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PIHera Piezo-Z Nanopositioner
Compact, Direct Metrology
  • 50 to 400µm Z-axis motion
  • <1 Nanometer resolution
  • Frictionless precision flexure guides
  • Direct capacitive metrology
  • X, XY, Z, XYZ combinations
P-611 Piezo-Z Nanopositioner
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P-611 Piezo Nanopositioning Stage
Compact, Low Cost
  • 100µm motion range
  • For cost-sensitive applications
  • Small footprint: 44x44mm
  • <1 nanometer resolution
  • Z, XZ, XY, XYZ options
S-340 Fast Tip/Tilt Steering Mirror
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Compact Z/Tip/Tilt Steering Mirror Platforms
For Mirrors from ½” to 4”
  • 1 to 3 axis
  • Very high dynamics
  • Up to 70mrad deflection
  • Sub-µrad resolution

Vertical and Z-Tip/Tilt Piezo Flexure Nanopositioning Stages with Aperture

P-612 Piezo-Z Stage
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P-612 Piezo-Z Stage
Compact Elevation Stage, Aperture
  • 100µm Z motion
  • Compact: 60x60x27mm
  • For cost-sensitive applications
  • <1 nanometer resolution
P-733 Piezo-Z Nanopositioner
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P-733.Z High Dynamics Piezo-Z Stage
Direct Metrology, Clear Aperture
  • 100µm Z motion
  • 0.3nm resolution
  • Direct capacitive metrology
  • High stiffness for fast response
  • 50x50mm aperture 
P-541 Piezo-Z & Z-Tip-Tilt Stages
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P-541 Piezo-Z & Z-Tip-Tilt Stages
Low-Profile, 80x80mm Aperture
  • 100µm Z-motion, 1mrad tip/tilt
  • Lowest profile: 16.5mm
  • <1 nanometer resolution
  • Choice of feedback sensors
  • 80x80mm aperture
P-528 Piezo-Z & Z/Tip/Tilt Stages
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P-528 Piezo-Z & Z/Tip/Tilt Stages
Parallel Metrology
  • 50, 100, 200µm Z-motion
  • Up to 4 milliradian Z/tip/tilt
  • Precision trajectory control
  • Sub-nanometer resolution
  • Parallel capacitive metrology

Frictionless Long-Travel Air Bearing Z/Tip/Tilt Stages and Custom Piezo Stages

Piezo-Z Stages, with Aperture for Microscopy / BioTech

P-736 Piezo-Z Scanner, w/Controller
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P-736 Piezo-Z Scanner, w/Controller
For Microscope Slides
  • 200µm vertical motion
  • 1nm resolution
  • Fast step & settle, from 5msec
  • Low profile: 20mm (0.8")
  • Controller & software included
P-736 Piezo-Z  Scanner, w/Controller
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P-736 Piezo-Z Scanner, w/Controller
For Multi Well-Plates
  • 220µm vertical motion
  • 1nm resolution
  • Fast step & settle, from 5msec
  • Low profile: 20mm (0.8")
  • Controller & software included
P-737 Piezo Z-Stage
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P-737 Piezo Z-Stage
For Microscopy & Biotech
  • 100, 250, 500µm motion
  • 2-5 nanometer resolution
  • Millisecond response
  • Aperture for specimen holders
  • Integrates with motorized XY stages
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N-725 PIFOC® Fast Piezo Nano Focus
2mm, PiezoWalk® Motor
  • 2000µm motion
  • PiezoWalk® motor, self-locking
  • Package with controller
  • Millisecond settling time
  • 0.5nm sensor resolution
P-725 High Performance Piezo Focus Scanner
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P-725 High Performance Piezo Focus Scanner
Up to 800µm, Sub-Nanometer Precision
  • 100, 400, 800µm motion
  • Combines higher dynamics & longer travel
  • Millisecond responsiveness
  • Ideal for autofocus, metrology, pathology
  • New high performance controller
P-726 PIFOC® Fast Piezo Nano Focus
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P-726 PIFOC® Fast Piezo Nano Focus
100µm, High-Stiffness, High End
  • 100µm motion
  • Ultra-stiff for heavy objectives
  • Millisecond settling time
  • Enhanced focus stability
  • Compatible with imaging software

How Piezo Actuators and Flexures Work

With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases).  The flexures can be used as guide and preload mechanism at the time. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.