Piezo-Z Stages and Piezo Z-Tip-Tilt Platforms with Nanometer Precision

These high resolution piezo-Z stages, tip-tilt stages and Z-tip-tilt platforms use flexure guides and frictionless motion amplifiers to provide extended motion ranges along with excellent guiding precision.

Vertical travel ranges up to several 100µm and tip-tilt ranges to 4 milliradian are available.

Piezo stages with flexures can achieve linear resolutions down to sub-nanometers and rotary resolutions down to the nanoradian realm.

For longer travel ranges, piezo motor stages and electromagnetic drives are available.

Applications include fast autofocus, interferometry, image scanning, super-resolution microscopy.

Download Whitepaper: Design, Performance and Tuning of Fast Piezo Tip/Tilt Platforms & Steering Mirrors 

Compact Piezo Flexure Z-Stages for Vertical Nanopositioning

P-620.Z - P-622.Z (PIHera family)
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PIHera Piezo-Z Nanopositioner

Compact, Direct Metrology

  • 50 to 400µm Z-axis motion
  • <1 Nanometer resolution
  • Frictionless precision flexure guides
  • Direct capacitive metrology
  • X, XY, Z, XYZ combinations
P-611 Piezo-Z Nanopositioner
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P-611 Piezo Nanopositioning Stage

Compact, Low Cost

  • 100µm motion range
  • For cost-sensitive applications
  • Small footprint: 44x44mm
  • <1 nanometer resolution
  • Z, XZ, XY, XYZ options

Vertical and Z-Tip/Tilt Piezo Flexure Nanopositioning Stages with Aperture

P-612 Piezo-Z Stage
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P-612 Piezo-Z Stage

Compact Elevation Stage, Aperture

  • 100µm Z motion
  • Compact: 60x60x27mm
  • For cost-sensitive applications
  • <1 nanometer resolution
P-733 Piezo-Z Nanopositioner
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P-733.Z High Dynamics Piezo-Z Stage

Direct Metrology, Clear Aperture

  • 100µm Z motion
  • 0.3nm resolution
  • Direct capacitive metrology
  • High stiffness for fast response
  • 50x50mm aperture 
P-541 Piezo-Z & Z-Tip-Tilt Stages
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P-541 Piezo-Z & Z-Tip-Tilt Stages

Low-Profile, 80x80mm Aperture

  • 100µm Z-motion, 1mrad tip/tilt
  • Lowest profile: 16.5mm
  • <1 nanometer resolution
  • Choice of feedback sensors
  • 80x80mm aperture
P-528 Piezo-Z & Z/Tip/Tilt Stages
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P-528 Piezo-Z & Z/Tip/Tilt Stages

Parallel Metrology

  • 50, 100, 200µm Z-motion
  • Up to 4 milliradian Z/tip/tilt
  • Precision trajectory control
  • Sub-nanometer resolution
  • Parallel capacitive metrology

Custom Examples

N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform
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N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform

Nanometer Precision for Semiconductor Industry, Wafer Alignment

Piezo-Z Stages, with Aperture for Microscopy / BioTech

P-736 Piezo-Z Scanner, w/Controller
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P-736 Piezo-Z Scanner, w/Controller

For Microscope Slides

  • 200µm vertical motion
  • 1nm resolution
  • Fast step & settle, from 5msec
  • Low profile: 20mm (0.8")
  • Controller & software included
P-736 Piezo-Z  Scanner, w/Controller
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P-736 Piezo-Z Scanner, w/Controller

For Multi Well-Plates

  • 220µm vertical motion
  • 1nm resolution
  • Fast step & settle, from 5msec
  • Low profile: 20mm (0.8")
  • Controller & software included
P-737 Piezo Z-Stage
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P-737 Piezo Z-Stage

For Microscopy & Biotech

  • 100, 250, 500µm motion
  • 2-5 nanometer resolution
  • Millisecond response
  • Aperture for specimen holders
  • Integrates with motorized XY stages
P-721 PIFOC® Fast Piezo Nano Focus
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P-721 PIFOC® Fast Piezo Nano Focus

100µm, Sub-Nanometer Precision

  • 100µm motion
  • Most affordable package
  • Cost efficient strain gauge sensors
  • Millisecond settling time
  • Compatible with imaging software
P-725 PIFOC® Fast Piezo Nano Focus
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P-725 PIFOC® Fast Piezo Nano Focus

400µm, Sub-Nanometer Precision

  • 400µm motion
  • Affordable package with controller
  • Millisecond settling time
  • Enhanced focus stability
  • Compatible with imaging software
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N-725 PIFOC® Fast Piezo Nano Focus

2mm, PiezoWalk® Motor

  • 2000µm motion
  • PiezoWalk® motor, self-locking
  • Package with controller
  • Millisecond settling time
  • 0.5nm sensor resolution

How Piezo Actuators and Flexures Work

With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases).  The flexures can be used as guide and preload mechanism at the time. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.