- For scanning and positioning in X, Y, Z, θX, θY, θZ
- 800 µm × 800 µm × 200 µm linear travel range
- Up to 1 mrad rotational angle
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Capacitive sensors for highest linearity
- Outstanding lifetime due to PICMA® piezo actuators
- Zero-play, high-precision flexure guide system
- Active compensation in all 6 degrees of freedom
- Semiconductor tests
- Semiconductor manufacturing
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Product Change Notification Piezo Actuator Driven Products
User Manual PZ251
P-587.6CD 6-Axis Nanopositioning System with Capacitive Sensors
Short Instructions PZ240
Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
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