Q-632 Q–Motion® Rotation Stage

Compact Through Piezo Motor: 30 mm Turntable Diameter

Q-632 Q–Motion® Rotation Stage
Product Description Specifications Downloads Quote / Order
  • Only 32 mm in width and 8 mm in height
  • Direct position measurement with incremental encoder with 0.75 µrad resolution
  • Up to 3 µrad minimum incremental motion
  • Rotation range >360°
  • Velocity 45 °/s
  • Suitable for vacuum to 10-6 hPa

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 45 °/s

Application fields

Microassembly, photonics, optical alignment, microscopy, beamline instrumentation, semiconductor technology, test applications

Specifications

Datasheet

Datasheet Q-632

Version / Date
2019-05-10
Version / Date
2019-05-10
Version / Date
2018-11-21
Document language
pdf - 589 KB
pdf - 597 KB
pdf - 679 KB

Downloads

Product Note

Product Note

Product Change Notification Q-xxx; N-765

Version / Date
2019-03-26
Document language English
pdf - 435 KB

Datasheet

Datasheet

Datasheet Q-632

Version / Date
2019-05-10
Version / Date
2019-05-10
Version / Date
2018-11-21
Document language
pdf - 589 KB
pdf - 597 KB
pdf - 679 KB

Documentation

Documentation

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
Version / Date
3.1.0 2018-06-19
pdf - 696 KB
Documentation

User Manual MP129

Q-632 Q-Motion Miniature Rotation Stage with 30 mm Turntable Diameter, Piezoelectric Inertia Drive
Version / Date
1.1.2 2019-05-16
Version / Date
1.1.2 2019-05-16
Document language
pdf - 857 KB
pdf - 863 KB

3-D Models

3-D Models

Q-632 3-D model

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Q-632.930
Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, incremental encoder, 0.75 µrad resolution, 6 mNm torque, 30 mm diameter, vacuum compatible to 10-6 hPa