A-63x PIglide RL Flat Rotation Stage with Air Bearing

Friction-free, Motorized

  • 150 mm, 200 mm or 350 mm
  • motion platform diameter
  • Low profile
  • Eccentricity and flatness < 100 nm
  • Option for self-locking at rest by magnetic preload
A-63x PIglide RL Flat Rotation Stage with Air Bearing
Product Description Specifications Downloads Quote / Order

Product overview

The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance.

3-Phase torque motor

  • Brushless
  • Slotless
  • Low cogging torque

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Accessories and options

  • Incremental or absolute encoder
  • Vacuum feedthrough
  • Self-locking at rest by magnetic preload
  • Clear aperture on request
  • PIglide filter and air preparation kit
  • Single or multi-axis motion controllers and servo drives
  • Multi-axis/customized setups
  • Base plates made of granite and systems for reducing vibration

Application fields

Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet

Datasheet A-63x

Version / Date
2021-12-09
pdf - 2 MB
Version / Date
2021-12-09
pdf - 2 MB
Version / Date
2020-01-14
pdf - 702 KB

Downloads

Datasheet

Datasheet

Datasheet A-63x

Version / Date
2021-12-09
pdf - 2 MB
Version / Date
2021-12-09
pdf - 2 MB
Version / Date
2020-01-14
pdf - 702 KB

Documentation

Documentation

User Manual A630D0001

A-63x Series Low Profile Rotary Air Bearing Stage PIglide RL, Direct-drive Torque Motor Driven with Encoder Feedback

Version / Date
3.0 2021-11-29
pdf - 1 MB
English

3-D Models

3-D Models

A-63x 3-D model

Version / Date
2021-12-09
zip - 3 MB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

A-634.A100 NEW!

PIglide RL rotation stage, air bearing, 150 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, slotless, brushless 3-phase torque motor

A-634.B100 NEW!

PIglide RL rotation stage, air bearing, 150 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, slotless, brushless 3-phase torque motor

A-635.A100

PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, slotless, brushless 3-phase torque motor

A-635.B100

PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, slotless, brushless 3-phase torque motor

A-638.A100 NEW!

PIglide RL rotation stage, air bearing, 350 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, slotless, brushless 3-phase torque motor

A-638.B100 NEW!

PIglide RL rotation stage, air bearing, 350 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, slotless, brushless 3-phase torque motor

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