Products - PI (Physik Instrumente) L.P.
Five-Axis Air Bearing Stage
PI’s new A-725 is a compact five-axis air bearing nanopositioning system that combines a true planar XY stage with an integrated parallel-kinematics Z-θX-θY module. Designed for semiconductor manufacturing, photonics, metrology, microscopy, and precision automation, the A-725 delivers frictionless motion, exceptional geometric accuracy, and precise multi-axis alignment in a compact footprint.
Low Profile Planar XY Base Stage
Unlike conventional stacked XY stages, the A-725 is built around PI's A-311 planar air bearing stage, where the moving platform glides over a common reference plane in both the X and Y directions. This architecture significantly improves geometric accuracy by eliminating stacking errors and minimizing Abbe offsets.
Parallel-Kinematics Z-Tip-Tilt Module
Integrated directly above the planar stage is PI's low-profileA-523 Z-θX-θY parallel-kinematics module, providing precise vertical positioning and angular alignment while maintaining a low center of gravity.
The system offers XY travel ranges from 100 × 100 mm up to 300 × 400 mm, combined with 5 mm of Z travel and ±2° of tip and tilt motion. A 250 mm platform diameter and payload capacity of up to 8 kg make the A-725 suitable for demanding inspection, alignment, and manufacturing applications.
True Planar XY Motion
The A-725's planar XY architecture provides a significant advantage over conventional integrated mechanical bearing XY stages (this tech-blog article explains the difference). Because the moving platform remains on the same reference plane throughout its travel, geometric errors are minimized, improving positioning accuracy and repeatability across the entire motion envelope.
The integrated parallel-kinematics Z-θX-θY stage and cable management system create a compact five-axis platform with a low overall profile, making it well suited for machines where installation height is limited.
Ironless Direct Drive Motors: Wide Velocity Range, Minimal Velocity Ripple & Vibrations
All five axes are driven by ironless three-phase linear motors that transmit force directly to the moving platform without mechanical transmission elements.
The direct-drive design eliminates friction, backlash, and wear while enabling high velocities and accelerations. Because the moving forces contains no iron, there is no magnetic cogging caused by interaction with the permanent magnets. The result is exceptionally smooth motion, minimal velocity ripple at very low speeds, vibration-free operation at high speeds, and highly linear force characteristics that simplify servo tuning and maximize positioning performance.
Turnkey Motion System
The A-725 is supplied as a fully integrated motion platform with PI ACS-based motion controllers and drives. Advanced control algorithms maximize dynamic performance while compensating for system errors.
Each system is fully configured, wired, and tested by PI, including servo tuning optimized for the customer's payload and application requirements. This turnkey approach minimizes commissioning time and simplifies system integration.
