LMS-180 Precision Linear Stage

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

  • Travel ranges to 508 mm (20")
  • Velocity to 500 mm/s
  • Incremental encoder with 15 nm resolution
LMS-180 Precision Linear Stage
Product Description Specifications Downloads Quote / Order

Reference-class linear stage

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo or stepper motors are available with the same footprint.

 

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Fields of application

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

Specifications

Datasheet

Datasheet LMS-180

Version / Date
2017-04-19
pdf - 656 KB
Version / Date
2017-04-19
pdf - 660 KB
Version / Date
2017-08-08
pdf - 737 KB

Downloads

Product Note

Product Note

Product Change Notification Motor Driven Products

Version / Date
2021-04-19
pdf - 917 KB
English

Datasheet

Datasheet

Datasheet LMS-180

Version / Date
2017-04-19
pdf - 656 KB
Version / Date
2017-04-19
pdf - 660 KB
Version / Date
2017-08-08
pdf - 737 KB

Documentation

Documentation

User Manual LMS-180

Precision Linear Stage

Version / Date
MAN_LMS-180_9_EN_01.PDF
pdf - 925 KB
Version / Date
2017-04-21
pdf - 930 KB

3-D Models

3-D Models

LMS-180 3-D model

zip - 11 MB
Separate connection cable required for motor and sensor connection respectively.

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

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