P-561 • P-562 • P-563 PIMars Nanopositioning Stage
High-Precision Nanopositioner for up to 3 Axes
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Travel ranges to 300 × 300 × 300 µm
- Highest linearity due to capacitive sensors
- Zero-play, high-precision flexure guide system
- Excellent scanning flatness
- High dynamics XYZ version
- Clear aperture 66 mm × 66 mm
- Outstanding lifetime due to PICMA® piezo actuators
- UHV versions to 10-9 hPa
Application fields
- Scanning microscopy
- Mask/wafer positioning
- Interferometry
- Measuring technology
- Biotechnology
- Scanning and screening
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High tracking accuracy in the nanometer range due to parallel position measuring
All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Specifications
Specifications
| P-561.3CD P-561.3CL | P-562.3CD P-562.3CL | P-563.3CD P-563.3CL | P-561.3DD | Unit | Tolerance |
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PIMars XYZ piezo-nanopositioning system, closed-loop travel | 100 × 100 × 100 | 200 × 200 × 200 | 300 × 300 × 300 | 45 × 45 × 15, direct drive | µm |
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Motion and positioning |
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Integrated sensor | Capacitive | Capacitive | Capacitive | Capacitive |
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Travel range at -20 to 120 V, open loop | 150 × 150 × 150 | 300 × 300 × 300 | 340 × 340 × 340 | 58 × 58 × 18 | µm | +20 % / -0 % |
Resolution, open loop | 0.2 | 0.4 | 0.5 | 0.1 | nm | typ. |
Resolution, closed loop | 0.8 | 1 | 2 | 0.2 | nm | typ. |
Linearity error | 0.03 | 0.03 | 0.03 | 0.01* | % | typ. |
Repeatability in X / Y / Z | 2 / 2 / 2 | 2 / 2 / 4 | 2 / 2 / 4 | 2 / 2 / 2 | nm | typ. |
Pitch in X, Y | ±1 | ±2 | ±2 | ±3 | µrad | typ. |
Crosstalk θX, θY (motion in Z) | ±15 | ±20 | ±25 | ±3 | µrad | typ. |
Yaw in X, Y | ±6 | ±10 | ±10 | ±3 | µrad | typ. |
Flatness in X, Y | ±15 | ±20 | ±25 | ±10 | nm | typ. |
Crosstalk in X, Y (motion in Z) | ±30 | ±50 | ±50 | ±20 | nm | typ. |
Mechanical properties |
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Resonant frequency in X / Y / Z, no load | 190 / 190 / 380 | 160 / 160 / 315 | 140 / 140 / 250 | 920 / 920 / 1050 | Hz | ±20 % |
Resonant frequency in X / Y / Z, under load, 100 g | - | 145 / 145 / 275 | 120 / 120 / 215 | 860 / 860 / 950 | Hz | ±20 % |
Resonant frequency in X / Y / Z, under load, 330 g | 140 / 140 / 300 | 130 / 130 / 195 | 110 / 110 / 170 | 500 / 500 / 470 | Hz | ±20 % |
Load capacity** | 5 | 5 | 5 | 5 | kg | max. |
Drive properties |
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Piezo ceramic | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 in Z, P-888 in XY |
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Electrical capacitance in X / Y / Z | 5.2 / 5.2 / 10.4 | 7.4 / 7.4 / 14.8 | 7.4 / 7.4 / 14.8 | 38 / 38 / 6 | µF | ±20 % |
Miscellaneous |
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Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | °C |
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Material | Aluminum | Aluminum | Aluminum | Aluminum |
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Mass | 1.45 | 1.45 | 1.45 | 1.55 | kg | ±5 % |
Sensor / voltage connection | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | ||
Recommended electronics | E-503, E-505, E-621, E-712, E-727 | E-503, E-505, E-621, E-712, E-727 | E-503, E-505, E-621, E-712, E-727 | E-503, E-505, E-621, E-712, E-727 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
Technical Note P500T0002
Unpacking and Packing P-5xx Positioners
User Manual PZ248
P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems
3-D Models
P-56x 3-D model
Quote / Order
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.

Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.

Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.