P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

Parallel kinematics in the X and Y axes for faster response times and greater multi-axis accuracy
Travel ranges to 300 × 300 × 300 µm
Highest linearity due to capacitive sensors
Zero-play and highly accurate flexure guides
Excellent scanning flatness
High dynamics XYZ version
Clear aperture 66 mm × 66 mm
Outstanding lifetime thanks to PICMA^® piezo actuators
UHV versions to 10^-9 hPa

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Response behavior of the P-562.3CD: Step-and-settle in less than 10 ms in X, Y, and Z.

P-56x.3CD and P-56x.3CL, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

P-561.3DD, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Application fields

Scanning microscopy
Mask / wafer positioning
Interferometry
Measuring technology
Biotechnology
Scanning and screening

Outstanding lifetime due to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the mechanics' D-sub connector. The auto calibration function on the digital controller automatically uses this data every time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

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Datasheet

Version / Date

2023-12-11

pdf - 776 KB

Version / Date

2023-12-11

pdf - 779 KB

Version / Date

2018-06-20

pdf - 856 KB

Version / Date

2018-07-02

pdf - 932 KB

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Select a travel range:

Motion	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Active axes	X Y Z	X Y Z	X Y Z	X Y Z	X Y Z	X Y Z	X Y Z
Travel range in X	100 µm	100 µm	200 µm	200 µm	300 µm	300 µm	45 µm
Travel range in Y	100 µm	100 µm	200 µm	200 µm	300 µm	300 µm	45 µm
Travel range in Z	100 µm	100 µm	200 µm	200 µm	300 µm	300 µm	15 µm
Travel range in X, open loop, at -20 to 120 V	150 µm	150 µm	300 µm	300 µm	340 µm	340 µm	58 µm	+20 / -0 %
Travel range in Y, open loop, at -20 to +120 V	150 µm	150 µm	300 µm	300 µm	340 µm	340 µm	58 µm	+20 / -0 %
Travel range in Z, open loop, at -20 to 120 V	150 µm	150 µm	300 µm	300 µm	340 µm	340 µm	18 µm	+20 / -0 %
Linearity error in X	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	max.
Linearity error in Y	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	max.
Linearity error in Z	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.08 %	max.
Flatness (Linear crosstalk in X with motion in Z)	± 30 nm	± 30 nm	± 50 nm	± 50 nm	± 50 nm	± 50 nm	± 20 nm	typ.
Straightness (Linear crosstalk in Y with motion in Z)	± 30 nm	± 30 nm	± 50 nm	± 50 nm	± 50 nm	± 50 nm	± 20 nm	typ.
Flatness (Linear crosstalk in Z with motion in X)	± 15 nm	± 15 nm	± 20 nm	± 20 nm	± 25 nm	± 25 nm	± 10 nm	typ.
Flatness (Linear crosstalk in Z with motion in Y)	± 15 nm	± 15 nm	± 20 nm	± 20 nm	± 25 nm	± 25 nm	± 10 nm	typ.
Pitch (Rotational crosstalk in θX with motion in Y)	± 1 µrad	± 1 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 3 µrad	typ.
Yaw (Rotational crosstalk in θX with motion in Z)	± 15 µrad	± 15 µrad	± 20 µrad	± 20 µrad	± 25 µrad	± 25 µrad	± 3 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 1 µrad	± 1 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 3 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 15 µrad	± 15 µrad	± 20 µrad	± 20 µrad	± 25 µrad	± 25 µrad	± 3 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 6 µrad	± 6 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 3 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	± 6 µrad	± 6 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 3 µrad	typ.
Positioning	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Unidirectional repeatability in X	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	typ.
Unidirectional repeatability in Y	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	typ.
Unidirectional repeatability in Z	± 2 nm	± 2 nm	± 4 nm	± 4 nm	± 4 nm	± 4 nm	± 2 nm	typ.
Resolution in X, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.1 nm	typ.
Resolution in Y, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.1 nm	typ.
Resolution in Z, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.1 nm	typ.
Integrated sensor	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring
System resolution in X	0.8 nm	0.8 nm	1 nm	1 nm	2 nm	2 nm	0.2 nm
System resolution in Y	0.8 nm	0.8 nm	1 nm	1 nm	2 nm	2 nm	0.2 nm
System resolution in Z	0.8 nm	0.8 nm	1 nm	1 nm	2 nm	2 nm	0.2 nm
Drive Properties	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	5.2 µF	5.2 µF	7.4 µF	7.4 µF	7.4 µF	7.4 µF	38 µF	±20 %
Electrical capacitance in Y	5.2 µF	5.2 µF	7.4 µF	7.4 µF	7.4 µF	7.4 µF	38 µF	±20 %
Electrical capacitance in Z	10.4 µF	10.4 µF	14.8 µF	14.8 µF	14.8 µF	14.8 µF	6 µF	±20 %
Mechanical Properties	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Resonant frequency in X, unloaded	190 Hz	190 Hz	160 Hz	160 Hz	140 Hz	140 Hz	920 Hz	±20 %
Resonant frequency in X, under load with 350 g	150 Hz	150 Hz	125 Hz	125 Hz	93 Hz	93 Hz	640 Hz	±20 %
Resonant frequency in Y, unloaded	190 Hz	190 Hz	160 Hz	160 Hz	140 Hz	140 Hz	920 Hz	±20 %
Resonant frequency in Y, under load with 350 g	150 Hz	150 Hz	125 Hz	125 Hz	93 Hz	93 Hz	640 Hz	±20 %
Resonant frequency in Z, unloaded	380 Hz	380 Hz	315 Hz	315 Hz	250 Hz	250 Hz	1050 Hz	±20 %
Resonant frequency in Z, under load with 350 g	260 Hz	260 Hz	211 Hz	211 Hz	148 Hz	148 Hz	695 Hz	±20 %
Permissible push force in X	60 N	60 N	50 N	50 N	40 N	40 N	200 N	max.
Permissible push force in Y	60 N	60 N	50 N	50 N	40 N	40 N	200 N	max.
Permissible push force in Z	100 N	100 N	60 N	60 N	30 N	30 N	250 N	max.
Permissible pull force in X	40 N	40 N	40 N	40 N	30 N	30 N	70 N	max.
Permissible pull force in Y	40 N	40 N	40 N	40 N	30 N	30 N	70 N	max.
Permissible pull force in Z	100 N	100 N	60 N	60 N	30 N	30 N	60 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with direct drive
Overall mass	1450 g	1450 g	1450 g	1450 g	1450 g	1450 g	1550 g	±5 %
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Resonant frequency in X, under load with 100 g			145 Hz	145 Hz	120 Hz	120 Hz	860 Hz	±20 %
Resonant frequency in Y, under load with 100 g			145 Hz	145 Hz	120 Hz	120 Hz	860 Hz	±20 %
Resonant frequency in Z, under load with 100 g			275 Hz	275 Hz	215 Hz	215 Hz	950 Hz	±20 %
Miscellaneous	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	D-sub 25W3 (m)	LEMO LVPZT	D-sub 25W3 (m)	LEMO LVPZT	D-sub 25W3 (m)	LEMO LVPZT	D-sub 25W3 (m)
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	+50 / -0 mm
Recommended controllers / drivers	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727

Linearity error of P-561.3DD: With digital controller. Nonlinearity of direct drive positioners measured with analog controllers is typically up to 0.1 %.

Parallel kinematics only available for the X and Y axes (not in Z).

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

Super Invar and titanium versions available.

Ask about customized versions.

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Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

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Datasheet

Version / Date

2023-12-11