P-561.3CD
PIMars XYZ nanopositioner with long travel range, 100 µm × 100 µm × 100 µm, capacitive sensors, parallel metrology, D-sub connector
P-561 • P-562 • P-563 PIMars Nanopositioning Stage
High-Precision Nanopositioner for up to 3 Axes
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Travel ranges to 300 × 300 × 300 µm
- Highest linearity due to capacitive sensors
- Zero-play, high-precision flexure guide system
- Excellent scanning flatness
- High dynamics XYZ version
- Clear aperture 66 mm × 66 mm
- Outstanding lifetime due to PICMA® piezo actuators
- UHV versions to 10-9 hPa
P-56x.3CD and P-56x.3CL, dimensions in mm
P-561.3DD, dimensions in mm
Response behavior of the P-562.3CD: Step-and-settle in less than 10 ms in X, Y, and Z.
P-561 • P-562 • P-563 PIMars Nanopositioning Stage
Product Description
Specifications
Downloads
Quote / Order
Application fields
- Scanning microscopy
- Mask/wafer positioning
- Interferometry
- Measuring technology
- Biotechnology
- Scanning and screening
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High tracking accuracy in the nanometer range due to parallel position measuring
All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Specifications
Specifications
| P-561.3CD P-561.3CL | P-562.3CD P-562.3CL | P-563.3CD P-563.3CL | P-561.3DD | Unit | Tolerance |
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PIMars XYZ piezo-nanopositioning system, closed-loop travel | 100 × 100 × 100 | 200 × 200 × 200 | 300 × 300 × 300 | 45 × 45 × 15, direct drive | µm |
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Motion and positioning |
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Integrated sensor | Capacitive | Capacitive | Capacitive | Capacitive |
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Travel range at -20 to 120 V, open loop | 150 × 150 × 150 | 300 × 300 × 300 | 340 × 340 × 340 | 58 × 58 × 18 | µm | +20 % / -0 % |
Resolution, open loop | 0.2 | 0.4 | 0.5 | 0.1 | nm | typ. |
Resolution, closed loop | 0.8 | 1 | 2 | 0.2 | nm | typ. |
Linearity error | 0.03 | 0.03 | 0.03 | 0.01* | % | typ. |
Repeatability in X / Y / Z | 2 / 2 / 2 | 2 / 2 / 4 | 2 / 2 / 4 | 2 / 2 / 2 | nm | typ. |
Pitch in X, Y | ±1 | ±2 | ±2 | ±3 | µrad | typ. |
Crosstalk θX, θY (motion in Z) | ±15 | ±20 | ±25 | ±3 | µrad | typ. |
Yaw in X, Y | ±6 | ±10 | ±10 | ±3 | µrad | typ. |
Flatness in X, Y | ±15 | ±20 | ±25 | ±10 | nm | typ. |
Crosstalk in X, Y (motion in Z) | ±30 | ±50 | ±50 | ±20 | nm | typ. |
Mechanical properties |
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Resonant frequency in X / Y / Z, no load | 190 / 190 / 380 | 160 / 160 / 315 | 140 / 140 / 250 | 920 / 920 / 1050 | Hz | ±20 % |
Resonant frequency in X / Y / Z, under load, 100 g | - | 145 / 145 / 275 | 120 / 120 / 215 | 860 / 860 / 950 | Hz | ±20 % |
Resonant frequency in X / Y / Z, under load, 330 g | 140 / 140 / 300 | 130 / 130 / 195 | 110 / 110 / 170 | 500 / 500 / 470 | Hz | ±20 % |
Load capacity** | 5 | 5 | 5 | 5 | kg | max. |
Drive properties |
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Piezo ceramic | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 in Z, P-888 in XY |
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Electrical capacitance in X / Y / Z | 5.2 / 5.2 / 10.4 | 7.4 / 7.4 / 14.8 | 7.4 / 7.4 / 14.8 | 38 / 38 / 6 | µF | ±20 % |
Miscellaneous |
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Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | °C |
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Material | Aluminum | Aluminum | Aluminum | Aluminum |
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Mass | 1.45 | 1.45 | 1.45 | 1.55 | kg | ±5 % |
Sensor / voltage connection | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO | ||
Recommended electronics | E-503, E-505, E-621, E-712, E-727 | E-503, E-505, E-621, E-712, E-727 | E-503, E-505, E-621, E-712, E-727 | E-503, E-505, E-621, E-712, E-727 |
* With digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %.
** When mounted horizontally (standing on a surface, not suspended).
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
All specifications based on room temperature (22 °C ±3 °C).
Super-invar and titanium versions available.
Downloads
Product Note
Product Note
Product Change Notification Piezo Actuator Driven Products
Version / Date
2021-04-19
pdf - 377 KB
English
Datasheet
Documentation
Documentation
Technical Note P500T0002
Unpacking and Packing P-5xx Positioners
Version / Date
2019-03-04
pdf - 448 KB
English
Documentation
User Manual PZ248
P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems
Version / Date
2013-11-22
pdf - 947 KB
Version / Date
2013-11-22
pdf - 972 KB
3-D Models
3-D Models
P-56x 3-D model
zip - 3 MB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
P-561.3CL
PIMars XYZ nanopositioner with long travel range, 100 µm × 100 µm × 100 µm, capacitive sensors, parallel metrology, LEMO connectors
P-561.3DD
PIMars high dynamics XYZ nanopositioner, 45 µm × 45 µm × 15 µm, capacitive sensors, parallel metrology, D-sub connector, direct drive
P-562.3CD
PIMars XYZ nanopositioner with long travel range, 200 µm × 200 µm × 200 µm, capacitive sensors, parallel metrology, D-sub connector
P-562.3CL
PIMars XYZ nanopositioner with long travel range, 200 µm × 200 µm × 200 µm, capacitive sensors, parallel metrology, LEMO connectors
P-563.3CD
PIMars XYZ nanopositioner with long travel range, 300 µm × 300 µm × 300 µm, capacitive sensors, parallel metrology, D-sub connector
P-563.3CL
PIMars XYZ nanopositioner with long travel range, 300 µm × 300 µm × 300 µm, capacitive sensors, parallel metrology, LEMO connectors
Questions? - Ask a PI Engineer
Compatible Electronics
Compatible Accessories
Related Products
Technology
PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.
Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.
Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.