P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

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P-56x.3CD and P-56x.3CL, dimensions in mm

Response behavior of the P-562.3CD: Step-and-settle in less than 10 ms in X, Y, and Z.

Parallel kinematics for faster response times and higher multi-axis accuracy
Travel ranges to 300 × 300 × 300 µm
Highest linearity due to capacitive sensors
Zero-play, high-precision flexure guide system
Excellent scanning flatness
High dynamics XYZ version
Clear aperture 66 mm × 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV versions to 10^-9 hPa

Scanning microscopy
Mask/wafer positioning
Interferometry
Measuring technology
Biotechnology
Scanning and screening

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

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Datasheet

Datasheet P-561 • P-562 • P-563

Version / Date

2018-05-08

Version / Date

2018-05-08

Version / Date

2018-06-20

Version / Date

2018-07-02

Document language

pdf - 762 KB

pdf - 764 KB

pdf - 856 KB

pdf - 932 KB

	P-561.3CD P-561.3CL	P-562.3CD P-562.3CL	P-563.3CD P-563.3CL	P-561.3DD	Unit	Tolerance
PIMars XYZ piezo-nanopositioning system, closed-loop travel	100 × 100 × 100	200 × 200 × 200	300 × 300 × 300	45 × 45 × 15, direct drive	µm
Motion and positioning
Integrated sensor	Capacitive	Capacitive	Capacitive	Capacitive
Travel range at -20 to 120 V, open loop	150 × 150 × 150	300 × 300 × 300	340 × 340 × 340	58 × 58 × 18	µm	+20 % / -0 %
Resolution, open loop	0.2	0.4	0.5	0.1	nm	typ.
Resolution, closed loop	0.8	1	2	0.2	nm	typ.
Linearity error	0.03	0.03	0.03	0.01*	%	typ.
Repeatability in X / Y / Z	2 / 2 / 2	2 / 2 / 4	2 / 2 / 4	2 / 2 / 2	nm	typ.
Pitch in X, Y	±1	±2	±2	±3	µrad	typ.
Crosstalk θ_X, θ_Y (motion in Z)	±15	±20	±25	±3	µrad	typ.
Yaw in X, Y	±6	±10	±10	±3	µrad	typ.
Flatness in X, Y	±15	±20	±25	±10	nm	typ.
Crosstalk in X, Y (motion in Z)	±30	±50	±50	±20	nm	typ.
Mechanical properties
Resonant frequency in X / Y / Z, no load	190 / 190 / 380	160 / 160 / 315	140 / 140 / 250	920 / 920 / 1050	Hz	±20 %
Resonant frequency in X / Y / Z, under load, 100 g	-	145 / 145 / 275	120 / 120 / 215	860 / 860 / 950	Hz	±20 %
Resonant frequency in X / Y / Z, under load, 330 g	140 / 140 / 300	130 / 130 / 195	110 / 110 / 170	500 / 500 / 470	Hz	±20 %
Load capacity**	5	5	5	5	kg	max.
Drive properties
Piezo ceramic	PICMA® P-885	PICMA® P-885	PICMA® P-885	PICMA® P-885 in Z, P-888 in XY
Electrical capacitance in X / Y / Z	5.2 / 5.2 / 10.4	7.4 / 7.4 / 14.8	7.4 / 7.4 / 14.8	38 / 38 / 6	µF	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	-20 to 80	-20 to 80	°C
Material	Aluminum	Aluminum	Aluminum	Aluminum
Mass	1.45	1.45	1.45	1.55	kg	±5 %
Sensor / voltage connection	CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO	CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO	CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO	CD version: D-sub 25W3 (m), 1.5 m cable CL version: LEMO
Recommended electronics	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727

* With digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %.

** When mounted horizontally (standing on a surface, not suspended).

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

Super-invar and titanium versions available.

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Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date

2021-04-19

Document language English

Download

pdf - 377 KB

Datasheet

Datasheet P-561 • P-562 • P-563

Version / Date

2018-05-08

Version / Date

2018-05-08

Version / Date

2018-06-20

Version / Date

2018-07-02

Document language

pdf - 762 KB

pdf - 764 KB

pdf - 856 KB

pdf - 932 KB

Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019

Version / Date

6.1.0 10/2019

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

Documentation

Technical Note P500T0002

Unpacking and Packing P-5xx Positioners

Version / Date

2019-03-04

Document language English

Request download link

Documentation

User Manual PZ248

P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems

Version / Date

2013-11-22

Version / Date

2013-11-22

Document language

Request download link

3-D Models

P-56x 3-D model

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P-561.3CD

PIMars XYZ nanopositioner with long travel range, 100 µm × 100 µm × 100 µm, capacitive sensors, parallel metrology, D-sub connector

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P-561.3CL

PIMars XYZ nanopositioner with long travel range, 100 µm × 100 µm × 100 µm, capacitive sensors, parallel metrology, LEMO connectors

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P-561.3DD

PIMars high dynamics XYZ nanopositioner, 45 µm × 45 µm × 15 µm, capacitive sensors, parallel metrology, D-sub connector, direct drive

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P-562.3CD

PIMars XYZ nanopositioner with long travel range, 200 µm × 200 µm × 200 µm, capacitive sensors, parallel metrology, D-sub connector

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