- Ultra-high-performance closed-loop scanner for AFM / SPM
- Compact manipulation tool for bio- / nanotechnology
- Resonant frequency 9.8 kHz for particularly fast scanning
- Parallel measuring technology for automatic compensation of guiding errors
- Resolution 50 picometers
- Travel range 5 µm × 5 µm × 5 µm
- Scanning probe microscopy
- Atomic force microscopy
- Scanning and screening
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High tracking accuracy in the nanometer range due to parallel position measuring
All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.
Product Change Notification Piezo Actuator Driven Products
User Manual PZ304
P-363 3-D model
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