P-363.2CD
PicoCube XY nanopositioner, high precision, 5 µm × 5 µm, parallel metrology, capacitive sensors, D-sub connector
P-363 PicoCube XY(Z) Piezo Scanner
Dynamic Nanopositioner for Scanning Probe Microscopy
- Ultra-high-performance closed-loop scanner for AFM / SPM
- Compact manipulation tool for bio- / nanotechnology
- Resonant frequency 9.8 kHz for particularly fast scanning
- Parallel measuring technology for automatic compensation of guiding errors
- Resolution 50 picometers
- Travel range 5 µm × 5 µm × 5 µm
P-363.3Cx, dimensions in mm. Removable top plate.
P-363.2Cx, dimensions in mm. Removable top plate.
The P-363 is already in a position to achieve an accuracy of 1 nm after 1 ms (100-nm step in X respectively Y; faster reaction in Z).
300-picometer steps (0.3 nm) with the P-363; measured with external high-resolution capacitive measuring system.
P-363 PicoCube XY(Z) Piezo Scanner
Product Description
Specifications
Downloads
Quote / Order
Application fields
- Scanning probe microscopy
- Atomic force microscopy
- Scanning and screening
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High tracking accuracy in the nanometer range due to parallel position measuring
All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.
Specifications
Specifications
P-363.3CD | P-363.2CD | Unit | Tolerance | |
|---|---|---|---|---|
Active axes | X, Y, Z | X, Y | ||
Motion and positioning | ||||
Integrated sensor | Capacitive | Capacitive | ||
Travel range in X, Y at -250 to +250 V, open loop | ±3 | ±3 | µm | +20 % |
Travel range in Z at -250 to +250 V, open loop | ±2.7 | - | µm | +20 % |
Travel range in X, Y, closed loop | ±2.5 | ±2.5 | µm | |
Travel range in Z, closed loop | ±2.5 | - | µm | |
Resolution, open loop* | 0.03 | 0.03 | nm | Typ. |
Resolution, closed loop | 0.1 | 0.1 | nm | |
Linearity error | 0.05 | 0.05 | % | Typ. |
Repeatability** | 1 | 1 | nm | Typ. |
Pitch / yaw in X, Y | 0.5 | 0.5 | µrad | Typ. |
Tilt with motion in Z | 0.2 | - | µrad | Typ. |
Straightness in X, Y | 3 | 3 | nm | Typ. |
Flatness in X, Y | <10 | <10 | nm | Typ. |
Crosstalk with motion in Z | 5 | - | nm | Typ. |
Mechanical properties | ||||
Resonant frequency in X, Y, unloaded | 3.1 | 4.2 | kHz | ±20 % |
Resonant frequency in Z, unloaded | 9.8 | - | kHz | ±20 % |
Resonant frequency under load in X, Y | 1.5 (20 g) | 2.1 (20 g) | kHz | ±20 % |
Load capacity | 10 | 10 | N | Max. |
Ceramic type | PICA, PICA Shear | PICA Shear | ||
Miscellaneous | ||||
Operating temperature range | -20 to 80 | -20 to 80 | °C | |
Material | Titanium | Titanium | ||
Dimensions | 30 mm × 30 mm × 40 mm | 30 mm × 30 mm × 28 mm | ||
Mass | 225 | 190 | g | ±5 % |
Cable length | 1.5 | 1.5 | m | ±10 mm |
Sensor/voltage connector | D-sub 24W7 (m) | D-sub 24W7 (m) | ||
Recommended electronics | E-536 | E-536 |
* The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
** With 10 % displacement; 50 nm when fully displaced.
All specifications based on room temperature (22 °C ±3 °C).
Downloads
Product Note
Product Note
Product Change Notification Piezo Actuator Driven Products
Version / Date
2021-04-19
pdf - 377 KB
English
Datasheet
Documentation
Documentation
User Manual PZ304
P-363 Positioner
Version / Date
1.0.0 2020-12-18
pdf - 1 MB
Version / Date
1.0.0 2020-12-18
pdf - 1 MB
3-D Models
3-D Models
P-363 3-D model
zip - 318 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
P-363.2CL
PicoCube XY nanopositioner, high precision, 5 µm × 5 µm, parallel metrology, capacitive sensors, LEMO connectors
P-363.3CD
PicoCube XYZ nanopositioner, high precision, 5 µm × 5 µm × 5 µm, parallel metrology, capacitive sensors, D-sub connector
P-363.3CL
PicoCube XYZ nanopositioner, high precision, 5 µm × 5 µm × 5 µm, parallel metrology, capacitive sensors, LEMO connectors
Questions? - Ask a PI Engineer
Compatible Electronics
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Technology
Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.
Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.
Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.