Single Axis Linear Piezo Flexure Nanopositioning Stages

All PI single-axis, flexure-guided, piezo-driven nanopositioners shown here provide excellent responsiveness typically in the millisecond range (and below), minimal tilt and out-of-plane motion, based on zero-wear components.

Applications that greatly benefit from flexure-guided piezo motion include image scanning, overlay, fast autofocus, interferometry, and super-resolution microscopy. Piezo flexure stages succeed, where the accuracy and performance of conventional motorized positioners is limited by friction, slow-response / low bandwidth and insufficient position stability.

Linear Piezo Nanopositioning Stages

30 to 1800µm Motion Range

PIHera Piezo Nanopositioning Stage
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PIHera Piezo Nanopositioning Stage

Compact, High Performance

  • 50µm to 1800µm motion range
  • Closed-Loop, capacitive feedback
  • <1 nanometer resolution
  • Frictionless precision flexure guides
  • X, XY, Z, XYZ combinations
P-611 Piezo-Z Nanopositioner
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P-611 Piezo-Z Stage

Compact, Low Cost

  • 100µm motion range
  • For cost-sensitive applications
  • Small footprint: 44x44mm
  • <1 nanometer resolution
  • Z, XZ, XY, XYZ options
P-752 High Dynamics Piezo Stage
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P-752 High Dynamics Piezo Stage

Direct Drive = Highest Performance

  • 30µm motion range
  • Ultra-fast response
  • Ultra-precise trajectory control
  • Direct-capacitive feedback
  • 0.1 nanometer resolution
P-753 Piezo Flexure Stage/Actuator
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P-753 Piezo Flexure Stage/Actuator

Direct Drive, High Dynamics

  • 38µm motion
  • 0.05nm resolution
  • Direct drive = Ultra-fast response
  • Frictionless precision flexure guides
  • Capacitive direct metrology
P-750 High-Load Piezo Stage
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P-750 High-Load Piezo Stage

Direct Drive, Direct Metrology

  • 75µm motion range, direct drive
  • 10kg load capacity
  • 1 nanometer guiding precision
  • <1 nanometer resolution
  • PICMA® long-life piezo drives

Linear Piezo Nanopositioning Stages

with Aperture (Planar Motion)

P-712 Low-Profile Piezo Scanner
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P-712 Low-Profile Piezo Scanner

Compact, OEM Stage

  • 30µm motion range
  • Compact, low profile, 40x40x6mm
  • Clear aperture, 25x15mm
  • High dynamics, 5msec settling
  • <1 nm resolution
P-630 High Dynamics Piezo Stage
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P-630 High Dynamics Piezo Stage

Aperture, Direct Drive

  • 80µm motion
  • 0.1nm resolution
  • Direct drive = Faster step & settle
  • Frictionless-flexure guided design
  • Long-life piezo drives

Piezo Flexure Actuators

Linear and Vertical Motion

P-753 Piezo Flexure Stage/Actuator
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P-753 Piezo Flexure Stage/Actuator

Direct Drive, High Dynamics

  • 38µm motion
  • 0.05nm resolution
  • Direct drive = Ultra-fast response
  • Frictionless precision flexure guides
  • Capacitive direct metrology
P-601 Piezo Flexure Z-Actuator
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P-601 Piezo Flexure Z-Actuator

Motion-Amplified, 120 to 480µm

  • 120 to 480µm motion
  • <1 nanometer resolution
  • High dynamics and stiffness
  • Flexure guides = Straight motion
  • PICMA® long-life piezo drives
P-603 OEM Piezo Flexure Actuator
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P-603 OEM Piezo Flexure Actuator

Motion-Amplified, 100-500µm

  • 100, 300, 500µm motion
  • Cost-effective OEM design
  • Closed-loop option
  • Frictionless, flexure guides
  • Options: longer travel

How Piezo Actuators and Flexures Work

With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases).  The flexures can be used as guide and preload mechanism at the time. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.