The linear piezo stages shown here are flexure-guided and driven by integrated piezo stacks. Direct-drive (faster response and higher stiffness) and motion-amplified designs (longer travel ranges) are available. Flexure guides are frictionless, backlash and maintenance free and provide better straightness and flatness of motion compared to other guiding mechanisms. For highest linearity, resolution and repeatability in the nanometer realm, non-contacting position sensors are integrated to provide closed-loop operation with our line of advanced piezo servo controllers.

PI’s piezo flexure nanopositioners provide excellent responsiveness and step/settle times typically in the millisecond range (and below for direct drive mechanisms), minimal tilt and out-of-plane motion, all based on zero-wear components.