Linear Piezo Stages for Nanopositioning (Flexure Guided)
The linear piezo stages shown here are flexure-guided and driven by integrated piezo stacks. Direct-drive (faster response and higher stiffness) and motion-amplified designs (longer travel ranges) are available. Flexure guides are frictionless, backlash and maintenance free and provide better straightness and flatness of motion compared to other guiding mechanisms. For highest linearity, resolution and repeatability in the nanometer realm, non-contacting position sensors are integrated to provide closed-loop operation with our line of advanced piezo servo controllers.
PI’s piezo flexure nanopositioners provide excellent responsiveness and step/settle times typically in the millisecond range (and below for direct drive mechanisms), minimal tilt and out-of-plane motion, all based on zero-wear components.
PIHera Piezo Nanopositioning Stage
Compact, High Performance
- 50µm to 1800µm motion range
- Closed-Loop, capacitive feedback
- <1 nanometer resolution
- Frictionless precision flexure guides
- X, XY, Z, XYZ combinations
P-611 Piezo Nanopositioning Stage
Compact, Low Cost
- 100µm motion range
- For cost-sensitive applications
- Small footprint: 44x44mm
- <1 nanometer resolution
- Z, XZ, XY, XYZ options
P-752 High Dynamics Piezo Stage
Direct Drive = Highest Performance
- 30µm motion range
- Ultra-fast response
- Ultra-precise trajectory control
- Direct-capacitive feedback
- 0.1 nanometer resolution
P-753 Piezo Flexure Stage/Actuator
Direct Drive, High Dynamics
- 38µm motion
- 0.05nm resolution
- Direct drive = Ultra-fast response
- Frictionless precision flexure guides
- Capacitive direct metrology
P-750 High-Load Piezo Stage
Direct Drive, Direct Metrology
- 75µm motion range, direct drive
- 10kg load capacity
- 1 nanometer guiding precision
- <1 nanometer resolution
- PICMA® long-life piezo drives
P-712 Low-Profile Piezo Scanner
Compact, OEM Stage
- 30µm motion range
- Compact, low profile, 40x40x6mm
- Clear aperture, 25x15mm
- High dynamics, 5msec settling
- <1 nm resolution
P-630 High Dynamics Piezo Stage
Aperture, Direct Drive
- 80µm motion
- 0.1nm resolution
- Direct drive = Faster step & settle
- Frictionless-flexure guided design
- Long-life piezo drives
P-753 Piezo Flexure Stage/Actuator
Direct Drive, High Dynamics
- 38µm motion
- 0.05nm resolution
- Direct drive = Ultra-fast response
- Frictionless precision flexure guides
- Capacitive direct metrology
P-601 Piezo Flexure Z-Actuator
Motion-Amplified, 120 to 480µm
- 120 to 480µm motion
- <1 nanometer resolution
- High dynamics and stiffness
- Flexure guides = Straight motion
- PICMA® long-life piezo drives
P-603 OEM Piezo Flexure Actuator
Motion-Amplified, 100-500µm
- 100, 300, 500µm motion
- Cost-effective OEM design
- Closed-loop option
- Frictionless, flexure guides
- Options: longer travel
With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases). The flexures can be used as guide and preload mechanism at the time. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.
