Piezo Actuator Overview

N-110, N-214 · N-215 NEXLINE® High-Load Piezoelectric Nanopositioning Motor / Linear Actuator

The novel, patented NEXLINE® drive design combines long travel ranges (hundreds of millimeters) with high stiffness and high resolution (better than 0.1 nm). Coordinated motion of shear and longitudinal Piezoelectric elements is what allows NEXLINE® to break away from the limitations of conventional Nanopositioning actuators. NEXLINE® motion is possible in two different modes: a high-resolution, high dynamics analog mode, and a step mode with theoretically unlimited travel range.

N-110 NEXLINE® Miniature High-Load Piezoelectric Linear Nanopositioning Drive

NEXLINE® OEM Actuators Offer Extreme Precision and Long Term Stability
NEXLINE® drives can be used wherever high loads must be positioned with very high precision and optional small, dynamic adjustments such as active vibration control). By fine-tuning the combination of shear and longitudinal piezo actuator motion, the incremental motion (analog-mode travel range), holding force and stiffness can be controlled directly.

NEXLINE® comes in different sizes for different loads and forces. In NEXLINE® OEM drives, the clamping and shear elements press against a slider, which is appropriately linked to the moving part of the application. If the application does not pro-vide its own position signal, the NEXLINE® drives can be equipped with internal position sensors, like, for example high-resolution capacitive or incremental sensors.

High-Resolution Dynamic Operation
In the analog mode, motion is provided by the high-stiffness shear Piezoelectric elements. The resonant frequency in the direction of motion is as high as 3 kHz. The settling-time in the analog mode is typically less than 10 ms. The position resolution depends only on the amplifier noise and, in a closed-loop system, on the sensor.

Basically Unlimited Travel Range
Step mode is effectuated with a sequence of shear and clamping motions. The step frequency can reach 100 Hz and, depending on the step size, speeds of up to 0.5 mm/s can be achieved.

Unlimited Lifetime
NEXLINE® actuators can often be found in inaccessible locations deep inside complex equipment, where nanometer-precise alignment and vibration-cancelation are required. This makes long lifetime for NEXLINE® actuators an absolute necessity. The drive can always be brought to a condition with zero-voltage on the individual Piezoelectric elements and with the full holding force available, no matter where it is along its travel range. This eliminates long-term offset voltages, which limit the lifetime of piezo transducers.

Application examples:
Cleanrooms, Vacuum, In conditions which do not permit use of drives with magnetic parts, etc.

 

PT120 - PT140 Piezoceramic Tubes (HVPZT)

PT-series piezoceramic tubes and scanner tubes are used in a wide range of applications from microdispensing to scanning microscopy. These monolithic components contract laterally (radially) and longitudinally when a voltage is applied between their inner and outer electrodes. Multi-electrode tubes are available to provide XYZ motion for use in manipulation and scanning microscopy applications. PI also provides ultra-high-linearity, closed-loop scanning stages for SPM and nanomanipulation.

Precision and Flexibility: PI Ceramic´s Strength
PT Piezoelectric tubes are manufactured to the tightest tolerances. We can provide tubes with diameters as small as 0.8 mm and tolerances as tight as 0.025 mm. All manufacturing processes at PI Ceramic are set up for flexibility. Should our standard actuators not fit your application, let us provide you with a custom design. Our engineers will work with you to find the optimum solution at a very attractive price, even for small quantities.

Application Examples:
Micropositioning, Scanning microscopy (STM, AFM, etc.), Fiber stretching / modulation of optical path length, Micro pumps / ink-jet printing, Micromanipulators, Ultrasonic and sonar applications, etc.

P-871 High-Deflection Closed-Loop, PICMA® Multilayer Piezoelectric Bender Transducer(LVPZT)

P-871 transducers are unique closed-loop piezoelectric benders based on the PL122 to PL140 PICMA®-series multilayer bender-actuators. Equipped with high-resolution position feedback sensors they provide better linearity, accuracy and repeatability than other piezo bender actuators on the market. P-871 benders achieve longer positioning ranges than typical stacked piezoelectric actuators, up to 1.6 mm, and response times in the millisecond range.

Long Lifetime and High Performance
PICMA® Bender actuators are superior to conventional actuators in high-endurance situations. They show substantially longer lifetimes both in static and dynamic operation, even in harsh environments. The monolithic, ceramic-insulated design provides better humidity protection than polymer-film insulation. Diffusion of water molecules into the insulation layer is greatly reduced by the use of cofired, outer ceramic encapsulation.

Closed-Loop Position Control Provides Higher Accuracy
P-871s are ideal devices for scanning, positioning and beam deflection applications and provide much better accuracy, stability and repeatability than conventional open-loop actuators. The special bender design allows the direct application of a strain gauge sensor to the surface without the need for a polymer insulation layer in between. The advantages are faster response, reduced phase lag and precise position control with non-linearity of <0.5%. The settling time for a small-signal step (up to 1% nominal travel) to an accuracy of better than 1% is between 10 ms (P-871.112) and 30 ms (P-871.140).

Application Examples:
Wire bonding, Fiber optic switches, Beam deflection, Scanning of optical components , Alignment of optical components, etc.

PICA™ Stack Piezoceramic Translators - Versatile Piezoelectric Linear Motion (HVPZT)

Ultra-High Reliability, High Displacement, Low Power Requirements
PICA™-Stack translators are specifically designed for high-duty-cycle applications. With our extensive applications knowledge, gained over several decades, we know how to build performance that does not come at the price of reliability. All materials used are specifically matched for robustness and lifetime. Endurance tests on PICA™ piezoelectric translator prove consistent performance, even after billions (1,000,000,000) of cycles. The combination of high displacement and low electrical capacitance provides for excellent dynamic behavior with reduced driving power requirements.

 

Short Leadtime, Standard & Custom Designs Because all piezoelectric materials used in PICA™ piezoelectric translators are manufactured at PI Ceramic, leadtimes are short and quality is outstanding. All standard and custom PICA™-Stack actuators are delivered with performance test sheets.

Application examples:
Nanopositioning, High-load positioning, Precision mechanics, Semiconductor manufacturing and testing, Laser tuning, Switching, Smart structures (adaptronics).

P-010.xxH · P-016.xxH · P-025.xxH PICA™ Thru Piezoelectric Stack Translator with Aperture (HVPZT)

PICA™ Thru translators are hollow Piezoelectric stack actuators, offered in a large variety of standard shapes and sizes with additional custom designs to meet all customer requirements. They combine the advantage of a clear aperture with the strength and force generation of stack actuators. These tubular devices are high-resolution linear actuators for static and dynamic applications.

Ultra-High Reliability, High Displacement, Low Power Requirements
PICA™ Piezoelectric translators are specifically designed for high-duty-cycle applications. With our extensive applications knowledge, gained over several decades, we know how to build performance that does not come at the price of reliability. All materials used are specifically matched for robustness and lifetime. Endurance tests on PICA™ actuators prove consistent performance, even after billions (1,000,000,000) of cycles. The combination of high displacement and low electrical capacitance provides for excellent dynamic behavior with reduced driving-power requirements.

Flexibility: PI Ceramic's Strength
All manufacturing processes at PI Ceramic are set up for flexibility. Should our standard actuators not fit your application, let us provide you with a custom design. Our engineers will work with you to find the optimum solution at a very attractive price, even for small quantities.

Application Examples:
Optics, Image stabilization, Laser tuning, Laser treatment, Precision mechanics, Confocal microscopy, Micropositioning, etc.

P-010.xxP - P-056.xxP PICA™-Power High-Level Dynamics Piezoelectric Translators (HVPZT)

Extra-High Reliability for High-Level Dynamics and High-Temperature Applications

Based on the PIC 255 material, PICA™-Power piezoelectric translators are optimized for high-temperature working conditions and high-duty-cycle dynamic applications. With PI's extensive applications knowledge, gained over several decades, performance does not come at the price of reliability. All materials used are specifically matched for robustness and lifetime. Endurance tests on PICA™-Power piezoelectric translators prove consistent performance, even after more than 1,000,000,000 cycles.

 

Standard & Custom Designs Because all piezoelectric materials used in PICA™-Power piezo translators are manufactured at PI Ceramic, leadtimes are short and quality is outstanding. All standard and custom PICA™-Power actuators are delivered with performance test sheets.

Application examples:
Active vibration damping and cancellation, Nanopositioning, High-load positioning, Precision machining, Semiconductor manufacturing and testing, Laser tuning, Switching, Smart structures (adaptronics), etc.

P-111 - P-151 PICA™-Shear Piezoelectric Actuators - Compact Multiaxis Motion

PICA™-Shear series multi-axis piezoelectric actuators are only available from PI / PI Ceramic. These devices are extremely compact and feature sub-namometer resolution and ultra-fast response. They are available in a variety of geometries providing displacements to 10 µm.

High Stiffness, High Duty Cycles
PICA™-Shear piezoelectric actuators exhibit high stiffness, both parallel and perpendicular to the motion direction. Based on the piezoelectric shear effect, PICA™-Shear X and XY piezoelectric actuators show almost twice the displacement amplitudes of conventional stacked piezoelectric actuators at the same electric field. Consequently they can be made smaller and have higher resonant frequencies. This results in reduced power requirements for a given induced displacement in dynamic X- and Y-axis operation.

Low Power Requirements, Ultra-High Reliability, Long Travel Ranges
PICA™ piezoelectric actuators are specifically designed for high-duty-cycle applications. All materials used are specifically matched for robustness and lifetime. Endurance tests proved consistent performance even after billions (1,000,000,000) of cycles. The combination of high displacement and low electrical capacitance provides for excellent dynamic behavior with reduced driving power requirements.

Custom Actuators
All manufacturing processes at PI Ceramic are set up for flexibility. Should our standard actuators not fit your application, let us provide you with a custom design. Our engineers will work with you to find the optimum solution at a very attractive price, even for small quantities.

Application Examples:
Nanopositioning, Precision mechanics, Active vibration cancellation, Semiconductor manufacturing and testing, Laser tuning, Atomic force microscopy, Switching, Scanning applications, Linear motors, etc.

P-287 Open-Loop Piezoelectric Z/Tilt Flexure Stage

P-287 positioners are high-resolution, piezoelectrically-driven flexure stages providing tilt-ranges up to 12 mrad and vertical travel up to 700 µm. A ball seat is machined into the tip to decouple rotation if the P-287 is used as a linear drive. In that case an external guiding system is recommended (e.g. frictionless diaphragm spring).

 

Working Principle
P-287 piezoelectric positioners are equipped with PICA piezoceramic translators integrated into a zero stiction/friction, ultra-high-resolution, wire-EDM-cut flexure motion amplifier system. The linear motion of the integrated piezo translator produces an arc motion of the tip.

Application examples:
Nanopositioning, Wafer inspection, Medical analysis, Biotechnology, Optics, etc.

P-290 Long-Travel Piezoelectric Nanopositioning Flexure Z-Stage

The P-290 is a piezoelectrically driven Z-stage providing 1 mm vertical displacement. It is designed for high-resolution static and low-frequency dynamic positioning applications.

 

 

Working Principle
The P-290 vertical positioning platform is driven by a piezoelectric actuator system consisting of of two stacked piezo flexure tilt positioners machined from one solid piece of stainless steel. Each of the two tilt positioners is equipped with one PICA piezoelectric stack actuator integrated into a wire-EDM-cut flexure motion amplifier system. The positioning platform is guided by additional linear ball bearings to eliminate tilt.

Application examples:
Wafer inspection, Nanopositioning, Medical analysis, Biotechnology, Optics, etc.

P-661 PILine® Miniature High-Speed, Ultrasonic Piezoelectric Linear Motor for OEMs

PILine® Piezoelectric Linear Motors - Smaller, Faster, More Effective
Despite their small size, PILine® P-661 Piezoelectric linear motors generate higher driving and holding forces than conventional ultrasonic piezomotors.

They are based on a novel, patented ultrasonic piezoelectric drive developed by PI. At the heart of the system is a piezoceramic plate which is excited to produce high-frequency eigenmode oscillations. A friction tip attached to the plate moves along an inclined linear path at the eigenmode frequency. Through its contact with the friction bar, it drives the moving part of the mechanics forward or backwards. With each oscillatory cycle, the mechanics executes a step of a few nanometers; the macroscopic result is smooth motion with a virtually unlimited travel range.

High Speed and Acceleration, Self-Locking
PILine® piezoelectric motor drives can provide accelerations of up to 15 g and speeds of up to 600 mm/s, together with high resolution and high holding force. Because the ceramic stator is pressed against the slider, holding forces are generated when the motor is at rest. The result is very high position stability without the heat dissipation common in conventional linear motors.

Integration
These drives can be operated in any orientation. For best performance, both the drive housing and the friction bar must be mounted on flat surfaces. The environment must be kept clean, dry and free of dust.

Accessories
PILine® motors require a drive electronics for exciting the ultrasonic oscillations. The way of how to control this drive electronics either by analog or pulsed signals strongly depends on the application. Therefore the drive electronics is not included in the delivery and can be ordered separately.

Application examples:
Biotechnology, Micromanipulation, Microscopy, Quality control, Semiconductor test equipment, Metrology, Mass storage testing, R&D, Photonics packaging, etc.

P-753 LISA Piezoelectric NanoAutomation® Stages / Actuators with Direct Metrology

P-753 LISA (Linear Stage Actuators) high-speed nanopositioners can be employed both as linear actuators or as precision nanopositioning translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezoelectric drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely good straightness of travel.

NanoAutomation® : Achieve Nanometer Precision in Milliseconds
The direct-drive design, together with careful attention to mass minimization, results in significant reduction in inertial recoil forces, enhancing overall system response, throughput and stability with settling times in the millisecond range. Furthermore our new digital control electronics with DDL (Dynamic Digital Linearization) can be used to increase linearity and effective bandwidth in scanning applications by up to 1000-fold.

Interchangeability: Auto-Calibration with ID-Chip
For optimized operation and interchangeability of nanomechanisms and controllers, models P-753.xCD are equipped with an ID-chip which holds all calibration data and sends it to the digital controller (e.g. E-750.CP). Models P-753.xxC can be used with either analog or digital controllers.

Long Lifetime
P-753 stages are equipped with the award winning PICMA® Piezoelectric drives, integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® drives are more robust than conventional Piezoelectric actuators, featuring superior lifetime and performance in both dynamic and static applications. Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.

Application Examples:
Disk drive testing, FBG writing (fiber bragg gratings), Metrology, Nanopositioning, Scanning microscopy, Photonics, Scanning interferometry, Biotechnology, Micromanipulation, etc.

P-783 Piezo Z-Stage / Actuator with Direct Metrology

Compact, Yet Long Travel Range
The P-783 piezoelectric positioner is a compact, closed-loop actuator providing a scanning and positioning range of 300 µm. It is designed for applications with small loads ranging from a few grams to a few hundred grams.

P-783 Z-stages feature direct-measuring, non-contact LVDT sensors (direct metrology). Unlike indirect sensors, direct-metrology sensors measure the actual distance between the fixed frame and the moving part of the stage. This results in higher motion linearity, long-term stability, phase fidelity, and-because external disturbances are seen by the sensor immediately-a stiffer, faster-responding servo-loop.

Working Principle
P-783 piezoelectric nanopositioning stages are equipped with the award winning PICMA® drives, integrated into a flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® actuators are more robust than conventional piezoelectric actuators, featuring superior lifetime and performance in both dynamic and static applications. Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.

Application Examples:
Metrology, Wafer inspection, PCB inspection, Nanopositioning, Switching, Biotechnology, Micromanipulation, etc.

 

 

P-820 Small-Load Miniature Piezoelectric Translators (LVPZT)

P-820 Small-load compact piezoelectric translators are high-resolution linear actuators for static and low-frequency dynamic applications. They provide sub-millisecond response and sub-nanometer resolution.

Design
The translators are equipped with highly reliable multilayer PZT ceramic stacks protected by a non-magnetic stainless steel case with internal spring preload. The standard translator tip is a stainless steel flat. Select the P-820.95 ball tip option to help decouple off-axis and torque loads from the translator.

 

Mounting
For push/pull forces up to 3 N the translator can be mounted by clamping around the case. For larger forces the translator must be mounted by the base. For positioning of magnetic parts the P-176.30 magnetic adapter can be glued onto the translator tip.

Application examples:
Static and low-level dynamic positioning of small parts, Fiber alignment, Laser tuning, etc.

PICMA® High-Performance Monolithic Multilayer Piezoelectric Actuators (LVPZT)

Ultra-High Reliability, High Displacement, Low Power Requirements
PICMA® (PI Ceramic Monolithic Actuator) Piezoelectric actuators are characterized by their high performance and reliability, even in extremely harsh environments. They are superior to conventional multilayer actuators in industrial applications and high-endurance situations, where they show substantially longer lifetimes both in static and dynamic operation.

 

Optimized PZT Ceramics, New Production Process
PICMA® Piezoelectric actuators are made from a PZT-ceramic material in which the piezoceramic properties such as stiffness, capacitance, displacement, temperature stability and lifetime are optimally combined. The actuators' monolithic design and special electrode structure was made possible by advances in production technology. This development is just one reflection of the more than 30 years experience PI has with thousands of industrial PZT applications.

Application examples:
Static and dynamic positioning, disk drive testing, smart structures, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc.

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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