Nanopositioning Piezo Actuators

Nanopositioning Piezo Actuators

Generating forces of up to 10000 N and strokes of up to 200 µm are the characteristics of nanopositioning piezo actuators based on stacked piezo actuators.

Piezo bender actuators are destined for dynamic motions of up to 2 mm with small loads.

Open piezoceramic actuators with many options for adaptions are directly available from PI Ceramic.

Preloaded Actuators with Low Drive Voltage to 100 V

P-845 Preloaded Piezo Actuators

For Very High Loads and Forces, with Position Sensor
  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 90 µm
  • Push force capacity to 3000 N
  • Pull force capacity to 700 N
  • µs response time
  • Subnanometer resolution

P-844 Preloaded Piezo Actuators

For Very High Loads and Forces

P-840 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces
  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 90 µm
  • Compact housing
  • Push force capacity to 1000 N
  • Pull force capacity to 50 N
  • µs response time
  • Subnanometer resolution
  • Versions with spherical tip

P-820 Preloaded Piezo Actuators

For Medium Loads and Forces

P-810 • P-830 Piezo Actuators

For Medium Loads and Push Forces

Preloaded Actuators with High Drive Voltage to 1000 V

P-216 Preloaded PICA Power Piezo Actuators

Preloaded Piezo Actuators (HVPZT) with Sensor Option
  • Travel range to 180µm
  • Push force to 4500N
  • Pull force to 500N
  • Subnanometer resolution
  • For vacuum/ high temperature

P-235 Preloaded PICA Power Piezo Actuators

Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
  • High Force
  • Travel range 180µm
  • Extremely high stiffness
  • Push force to 30000N
  • Pull force to 3500N

Piezo Benders

PICMA® Piezo Bender Actuators

PICMA® Piezo Bender Actuators

Multilayer Bending Actuators with Large Displacement