Tag: Piezo Motor

Different Hybrid Drive Concepts to Solve Tough Positioning and Alignment Problems in the Nanometer Range

Surface Slope Metrology: High Precision Tilt Stage Achieves 30nrad Absolute Accuracy

Self-Locking Actuator for Hexapod Applications Combines High Push-Pull Force with Picometer Resolution for Active Optical Alignment in Astronomy

Overview of Different Piezo Motor Design Principles

Ultra-Stable Mirror Mounts for LINC-NIRVANA High Resolution Imager are based on Self-clamping PiezoWalk Motors

Performance and Applications of Inertia Based Positioning Drives: Q-Motion

Piezo Flexure Actuators, Nanopositioners, and Other Piezo Mechanisms for Precision Motion Control Applications