- Only 22 mm in width and 10 mm in height
- Direct position measurement with incremental encoder with up to 1 nm resolution
- Minimum incremental motion up to 2 nm
- XY mounting without adapter
- Q-622 rotation stage mountable without adapter
- Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available
Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 10 mm/s.
Versions with noncontact optical linear encoder available. Resolution 4 nm or 1 nm, depending on the version. Versions with encoder have a reference point switch
Vacuum and nonmagnetic environments
All Q-Motion® linear stages are suitable for operation in high vacuum to 10-6 hPa. Furthermore, ultrahigh vacuum variants are also available for 10-9hPa. Nonmagnetic versions are available on request
Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing
SpecificationsThis content is only available on tablets or desktop devices.
Product Change Notification Q-xxx; N-765
User Manual MP134
Q-522 Q-Motion Miniature Linear Stage, Piezoelectric Inertia Drive
Short Instructions MP139EK
Q-Motion® Positioners: Q-5xx, Q-6xx
Q-522 3-D model
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