- 10, 25 & 50 mm Travel Ranges
- Sub-micrometer Resolution and high Repeatability
- Closed Loop Feedback Servo Motor
- Sub-nm Resolution with Optional Piezo Motor
M-222 through M-226 are compact, ultra-high resolution linear actuators providing linear motion up to 50 mm with sub-micron resolution. They consist of a micrometer screw drive with non-rotating tip driven by a closed loop servo feedback motor and a torque multiplier gearhead combination with motor shaft mounted feedback position encoder. Compared to conventional rotating tip micrometer drives the non-rotating tip design offers the following advantages:
- elimination of torque-based stage platform tilting
- elimination of wear at the contact point
- elimination of tip angle dependent wobble
All models feature an extremely low stiction/friction construction allowing for resolution in the 0.1 micron range and below. All models come with standard flat tips. For High speed linear actuators and linear modules linear motors are recommended.
Versions with the part number extension .50 employ an even higher resolution motor / gearbox /encoder combination, providing design resolution of 8 nanometers and velocity up to 1.5 mm/sec. The high resolution feedback encoder also provides better speed regulation at very low speeds.
An optional piezo tip features 20 µm travel with sub-nanometer resolution for dynamic scanning and tracking.
For mounting, the DC-motor actuators are clamped around the 19 mm diameter. Clamping around the 16 mm diameter sleeve should only have a supporting function; high forces at this point will increase friction and reduce accuracy and resolution. For the same reason, lateral forces on the tip must be avoided.
Vacuum compatible actuator versions (10-6 Torr) of all .20 versions are available. Vacuum modifications are vent holes, non-anodized parts, special vacuum greased motors/gears/drive screws, and encoders with Teflon cables. To order a vacuum model, change last digit to 3, e.g. M-224.23.