M-221 - M-226 High Precision Actuators with Closed-Loop Feedback Motor

NEW: Motorized Linear Actuators Back to Overview

10, 25 & 50 mm Travel Ranges
Sub-micrometer Resolution and high Repeatability
Closed Loop Feedback Servo Motor
Sub-nm Resolution with Optional Piezo Motor

M-222 through M-226 are compact, ultra-high resolution linear actuators providing linear motion up to 50 mm with sub-micron resolution. They consist of a micrometer screw drive with non-rotating tip driven by a closed loop servo feedback motor and a torque multiplier gearhead combination with motor shaft mounted feedback position encoder. Compared to conventional rotating tip micrometer drives the non-rotating tip design offers the following advantages:

elimination of torque-based stage platform tilting
elimination of wear at the contact point
elimination of tip angle dependent wobble

All models feature an extremely low stiction/friction construction allowing for resolution in the 0.1 micron range and below. All models come with standard flat tips. For High speed linear actuators and linear modules linear motors are recommended.

Versions with the part number extension .50 employ an even higher resolution motor / gearbox /encoder combination, providing design resolution of 8 nanometers and velocity up to 1.5 mm/sec. The high resolution feedback encoder also provides better speed regulation at very low speeds.

An optional piezo tip features 20 µm travel with sub-nanometer resolution for dynamic scanning and tracking.

For mounting, the DC-motor actuators are clamped around the 19 mm diameter. Clamping around the 16 mm diameter sleeve should only have a supporting function; high forces at this point will increase friction and reduce accuracy and resolution. For the same reason, lateral forces on the tip must be avoided.

Vacuum Actuators:
Vacuum compatible actuator versions (10^-6 Torr) of all .20 versions are available. Vacuum modifications are vent holes, non-anodized parts, special vacuum greased motors/gears/drive screws, and encoders with Teflon cables. To order a vacuum model, change last digit to 3, e.g. M-224.23.

ORDERING INFORMATION:

M-222.20 Closed-Loop Servo Feedback Motor Precision Actuator, 10 mm, 0.06 µm Resolution

M-222.50 Closed-Loop Servo Feedback Motor Precision Actuator, 10 mm, 0.008 µm Resolution

M-224.20 Closed-Loop Servo Feedback Motor Precision Actuator, 25 mm, 0.06 µm Resolution

M-224.50 Closed-Loop Servo Feedback Motor Precision Actuator, 25 mm, 0.008 µm Resolution

M-226.20 Closed-Loop Servo Feedback Motor Precision Actuator, 50 mm, 0.06 µm Resolution

M-226.50 Closed-Loop Servo Feedback Motor Precision Actuator, 50 mm, 0.008 µm Resolution

TECHNICAL DATA:
Models	M-222.20	M-224.20	M-226.20	M-222.50	M-224.50	M-226.50	Units	<link>Notes
Travel range	10	25	50	10	25	50	mm
Design resolution	0.059	0.059	0.059	0.0085	0.0085	0.0085	µm	A3
Min. incremental motion	0.1	0.1	0.1	0.05	0.05	0.05	µm	A4
Unidirectional repeatability	0.1	0.1	0.1	0.1	0.1	0.1	µm
Backlash	5	5	5	2	2	2	µm
Max. velocity	0.7	0.7	0.7	1.5	1.5	1.5	mm/sec
Max. push/pull force	40	40	40	100	100	100	N
Max. lateral force	0.02	0.02	0.02	0.02	0.02	0.02	N (at tip)
Encoder resolution	60	60	60	2000	2000	2000	counts/rev.
Drive screw pitch	0.5	0.5	0.5	0.5	0.5	0.5	mm/rev.
* Gear ratio	(31/9)⁴:1 » 141:1	(31/9)^{4 :}1 » 141:1	(31/9)⁴:1 » 141:1	(28/12)⁴:1 » 29.6:1	(28/12)⁴:1 » 29.6:1	(28/12)⁴:1 » 29.6:1
Nominal motor power	2	2	2	3	3	3	W
Motor voltage range	0 to ±12	0 to ±12	0 to ±12	0 to ±12	0 to ±12	0 to ±12	V
Weight	0.16	0.22	0.26	0.4	0.45	0.5	kg
Recommended motor controller	C-842, C-844	C-842, C-844	C-842, C-844	C-842, C-844	C-842, C-844	C-842, C-844		D2