M-110, M-111 High Resolution Micro Translation Stages

  • 5 and 15 mm Travel Range 
  • 0.05 µm Minimum Incremental Motion 
  • Velocity to 2.5 mm/sec. 
  • Closed-Loop DC Motor 
  • Integrated Hall-Effect Limit Switches

 

Application examples: Photonics packaging, fiber optic instrumentation, fiber alignment, metrology, quality control, test equipment, micro machining.

M-110 and M-111 are ultra-high resolution motorized translation stages providing linear motion of 5 and 15 mm in an extremely compact package. They feature a precision leadscrew with sub-micron resolution and precision linear ball bearings guaranteeing < 0.5 µm straightness of travel. 

Both stages provide a cost effective solution for industrial and OEM environments. A miniature DC or stepper motor actuates motion via a backlash-compensated leadscrew / nut system and gearhead.

To meet the most critical positioning demands the DC motor is equipped with a high resolution encoder featuring resolution of 0.007 µm per count. The combination of the extremely low stiction / friction construction and high resolution encoder allows for minimum incremental motion of 50 nanometers at speeds up to 2.5 mm/sec. 

To protect your investment, non contacting Hall-Effect limit switches are integrated. Each stage includes a 0.5 m cable with 15 pin D-sub connector and a 3 m extension cable. The connector features integrated line drivers for cable lengths up to 10 meters between actuator and controller.

M-110 and M-111 can be combined to XY and XYZ systems for multiaxis alignment applications. A variety of add-on Piezo-NanoAlignment units are available, too. 

ORDERING INFORMATION:
M-110.1DG Micro Translation Stage, 5 mm, Closed-Loop DC Motor
M-111.1DG Micro Translation Stage, 15 mm, Closed-Loop DC Motor
M-110.12S Micro Translation Stage, 5 mm, 2 Phase Stepper Motor
M-111.12S Micro Translation Stage, 15 mm, 2 Phase Stepper Motor

TECHNICAL DATA:
Models M-110.1DG M-111.1DG Units Notes
Travel range  5 15 mm  
Design resolution 0.007 0.007 µm A3
Min. incremental motion 0.05 0.05 µm A4
Unidirectional repeatability 0.1 0.1 µm  
Backlash 2 2 µm   
Max. velocity 1.5 2.5 mm/sec  
Max. normal load capacity 10 10 kg  
Max. push/pull force 10 10 N B2
Max. lateral force 10 10 N  
Encoder resolution 2048 2048 counts/rev.  
Drive screw pitch  0.4  0.4 mm/rev.  
Gear ratio 28.44444:1 28.44444:1    
Nominal motor power 0.6 2 W  
Motor voltage range 0 to ±12  0 to ±12 V  
Weight 0.3 0.4 kg   
Recommended motor controllers C-842, 
C-844,
C-860
C-842, 
C-844,
C-860
  D2

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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